CATALOG VC10

MODEL EW53 3-Way Normally Closed ATMOSPHERE EXHAUST EW53GG8DCCP EW53HH8DCCP EW53HJ8DCCP EW53JJ8DCCP EW53KK8DCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055 .075 .150 .020 .048 .075 .075 .150 DE-ENERGIZED ENERGIZED MODEL EW53 3-Way Normally Closed WITH PIPED EXHAUST ** EW53GG8XCCP EW53HH8XCCP EW53HJ8XCCP EW53JJ8XCCP EW53KK8XCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055

Mechanically Jointed Rodless Cylinder Series MY1

Wn X-axis Xn Y-axis Yn Z-axis Zn Z Wa 0.88 kg 65 mm 0 mm 5 mm Y Wb 4.35 kg 150 mm 0 mm 42.5 mm Wc 0.795 kg 150 mm 111 mm 42.5 mm X 65 150 Wd 0.5 kg 150 mm 210 mm 42.5 mm n=a, b, c, d 3.

Air Slide Table Series MXQ

23 25 18 21 NN 2 2 2 2 3 3 4 4 4 H 46 46 46 56 56 56 59 62 G 22 22 22 22 17 18 37 56 N 4 4 4 4 6 6 8 8 8 HA 50 50 50 56 48 56 112 118 124 Model F 45 40 48 58 42 55 50 55 62 GA 18 18 18 22 48 73 74 96 118 KA 126 183 211 239 NA 4 4 4 4 4 8 8 8 8 MXQ20L10 MXQ20L20 MXQ20L30 MXQ20L40 MXQ20L50 MXQ20L75 MXQ20L-100 MXQ20L-125 MXQ20L-150 Note) Note) Note) Refer to the bottom view of MXQ20L-50.

Table of Contents

, 20 Individual exhaust style for nozzle size 18, 20 For vacuum switch and adapter A For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

Electric Slide Tables

Work load m [kg] Work load m [kg] 300 0 50 100 150 200 250 300 350 600 Mey 250 500 Horizontal Vertical 200 400 m L3 [mm] L3 [mm] L3 [mm] 150 300 L3 100 200 50 100 0 0 Yawing Pitching Yawing Rolling 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 L4 200 400 L4 [mm] L4 [mm] L4 [mm] 150 300 100

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

65 35.2 50.6 [57.6] 49.5 55.1 37.6 (Lead wire length) Approx. 300 61.7 [68.7] Pg7 4.3 105.8 81 86 [88.2] 94.9 87.5 18 18 28 28 18 18 18 18 28 4.3 18 18 28 4.3 9.5 22 9.5 22 22 9.5 22 9.5 4.3 Note) Refer to page 176 for dimensions of connector types. 64 Base Mounted 10-SY3000/5000/7000/9000 Dimensions: Series 10-SY5000 [ ]: AC 2 position double Grommet (G), (H): 10-SY5240(R)-02 G H (A, B

Compact Manifold Regulator Series ARM5

56) (16) (9) (18) (19) (52) (9) (11.5) (4.8) NARM2000 .18 1.36 1.69 1.10 1.06 2.76 .79 .45 .94 1.10 2.60 .45 .65 .19 (4.5) (34.5) (43) (28) (27) (70) (20) (11.5) (24) (28) (66) (11.5) (16.5) (4.8) Dimensions by number of stations Model Symbol A C E F G H J K M P NARM1000 L1 1.42 2.17 2.91 3.66 4.41 5.16 5.91 6.65 7.40 8.15 (36) (55) (74) (93) (112) (131) (150) (169) (188) (207) L2 1.06 1.81

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

2.69 5/8-18 0.250 CA2 088 (7/8") 0.75 0.250 0.251 0.50 2.62 0.75 0.38 0.93 0.624 1/4-28 5/8-18 0.45 2.56 5/8-18 0.50 0.50 0.250 106 (1 1/16") 0.88 0.250 0.251 0.25 0.50 2.78 0.12 0.75 0.38 1.12 0.624 5/16-24 5/8-18 0.55 2.81 5/8-18 0.62 0.50 0.312 CS1 125 (1 1/4") 1.06 0.250 0.251 0.38 0.75 3.76 0.25 0.75 0.50 1.32 0.749 7/16-20 3/4-16 0.75 2.81 3/4-16 0.88 0.62 0.437 150 (1 1/2") 1.25

SQ1000/2000

A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

MG

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q CV 16 20 25 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 40 10 19 16 78 1.5 62 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 37.5 10.5 25 18 25, 50, 75, 100, 125, 150

SV

Specified layout (Up to 18 solenoids possible.) 18 18 18 stations 18 stations Note 2) Specified layout: Indicate wiring specifications on a manifold specification sheet. Note 1) Double wiring specifications: Single, double and 3 position solenoid valves can be used on all manifold stations. Use of a single solenoid will result in an unused control signal.

LJ1H

Applicable strokes: 150, 250, 350, 450 Example) LJ1H1011PB-150-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Positioning repeatability Motor Encoder Lead screw Guide Motor/Screw connection Model Performance 0.02 AC servomotor (50W) Incremental system Ground ball screw 12mm, 12mm lead High rigidity direct acting guide With coupling LC1-1B1H(Refer to page

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

ZP

8 14 40 33 20 52 7 17 150 250 155 40 4 x 14 4 x 9 88 4 x 16 4 x 10 34 Symbol/Type HB: Heavy-duty (Bellows) Heavy-duty Pad 32, 150 Pad diameter For heavy or large work pieces How to Order ZP2 32 HB N Pad unit Pad diameter Pad material Symbol Pad diameter 32 150 Symbol Material NBR Silicone rubber FKM CR 32 150 N S F C Note) Silicone rubber is only applicable to the 32 pad.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

, 200, 250, 300, 350, 400 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 Work load [kg] Horizontal Note 2) 18 50 50 30 60 60 30 60 60 Vertical 8 16 30 9 19 37 12 24 46 Force [N] Note 3) (Set value: 45 to 90%) 65 to 131 127 to 255 242 to 485 79 to 157 154 to 308 294 to 588 98 to 197 192 to 385 368 to 736 Up to 300 900 450 225 1200 600

CM2

CS1 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 C76 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

Air Slide Table

175 J 56 56 56 66 90 100 150 205 230 I 16 16 16 16 16 31 20 18 18 NN 2 2 2 2 2 3 4 4 4 H 55 55 55 65 80 44 66 66 G 23 23 23 23 32 44 31 56 N 4 4 4 4 4 6 8 8 8 HA 55 55 55 65 80 65 88 132 132 Model F 55 46 55 65 75 60 48 60 65 GA 23 23 23 23 32 72 88 97 122 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 MXQR2510 MXQR2520 MXQR2530 MXQR2540 MXQR2550 MXQR2575 MXQR25-100 MXQR25-125 MXQR25-150 Note) Note

Electric Actuator

Compatible Drivers Pulse input type /Positioning type Pulse input type CC-Link direct input type SSCNET III type Driver type LECSA Up to 7 D LECSB D LECSC Up to 255 (2 stations occupied) CC-Link LECSS SSCNET III Series Number of point tables Pulse input Applicable network Incremental 17-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Control encoder

Hydraulic

0.15 63 98 90 63 15 15 1/2 165 52 35 27 M12 x 1.5 14 25 to 800 18 15 132 65 42 43 156 0.2 80 118 110 80 17 18 3/4 190 65 35 22 M16 x 1.5 16 25 to 1000 18 18 155 87 40 44 166 0.18 0.23 0.3 100 150 135 102 19 20 3/4 230 75 40 22 M18 x 1.5 25 to 1000 22 20 190 109 42 18 44 172 (mm) Rod series B-series rod C-series rod Bore size (mm) MM A MA D E MM K G H ZZ A MA D E K G H ZZ 32 34

Proposals for Energy Saving

D L1 56 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Nozzles for Blowing Series KN Nozzle for One-touch fitting/KN (mm) Model Nozzle size D Connection size L1 A 1 1.5 2 1.5 2 2 2.5 2.5 3 6 6 6 8 8 10 10 12 12 35 35 35 39 39 43 43 45.5 45.5 18 18 18 20.5 20.5 22 22 24 24 KN-Q06-100 KN-Q06-150 KN-Q06-200 KN-Q08-150 KN-Q08-200 KN-Q10-200 KN-Q10-250 KN-Q12