Modular F.R.L. Units

r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Integrated Controller

3000 mm/s2 6 Work load: W [kg] Work load: W [kg] 5 3000 mm/s2 5000 mm/s2 4 3 10 mm/s2 2 1 0 50 100 150 200 250 300 350 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQY16HC Horizontal/Lead 2.5 Vertical/Lead 2.5 45 40 35 30 25 20 15 10 5 0 50 25 75 100 125 150 175 200 11 10 9 8 7 6 5 4 3 2 1 0 Work load: W [kg] Work load: W [kg] 3000 mm/s2 3000 mm/s2 10 mm/s2 5000 mm/s2 0 0 Speed: V [mm/s] 50 100

MB

Bore size (mm) Contents 32 40 50 63 80 100 32 40 50 63 80 100 MBB32-PS MBB40-PS MBB50-PS MBB63-PS MBB80-PS MBB100-PS MBB32-PS-W MBB40-PS-W MBB50-PS-W MBB63-PS-W MBB80-PS-W MBB100-PS-W Set of the No. @9, #0, #1, #2 and #3. Set of the No. @9, #0, #1, #2 and #3.

Proposals for Energy Saving

Solenoid Specifications Apparent power VA Inrush Energized Power consumption W (energized) Temperature increase C (rated voltage) 5 50 3.5 35 6 50 8 55 6.5 45 8 50 10.5 60 9.5 50 11.5 55 Frequency Hz 50 25 12 60 20 8 50 45 20 60 40 15 50 60 25 60 50 20 Symbol Model Power supply AC OUT VXD21 DC AC IN VXD22 DC AC VXD23 DC Note 1) The values are for ambient temperature of 20C 5C and rated voltage

C85

1 w e !3 !

Cylinder with Lock

68 245 45 250 63 10 50 12 5.5 80 264.5 50 269.5 80 12 63 14 6.5 100 320 63 325 100 14.5 71 16 6.5 120 343.5 75 353.5 Double Acting, Double Rod Flange Rod side: CP96NF-W 4 x FB R E2 MF W TF UF Head side: CP96NG-W MF ZF + Stroke [mm] Bore size E2 FB MF R TF UF W ZF 32 50 7 10 32 64 79 16 188 40 55 9 10 36 72 90 20 211 50 70 9 12 45 90 110 25 230 63 80 9 12 50 100 120 25 249.5 80 100 12 16 63

Modular F.R.L. Unit

Nil A B C D q w e q w q w w q e q w The number inside indicates the combination order counted from the inlet side.

Slider Type Ball Screw Drive/11-LEFS Series

Ball screw /Linear guide portion Low particle generation grease Motor size 28 42 56.4 Motor type Step motor (Servo/24 VDC) Electric specifications Encoder Incremental A/B phase (800 pulse/rotation) Rated voltage [V] 24 VDC 10% Power consumption [W] Note 6) 22 38 50 100 Standby power consumption when operating [W] Note 7) 18 16 44 43 Max. instantaneous power consumption [W] Note 8) 51 57

Table of Contents

u w t e r !

10

Contents 32 MBB32-PS-W 40 MBB40-PS 50 MBB50-PS 63 MBB63-PS 80 MBB80-PS 100 MBB100-PS 40 MBB40-PS-W 50 MBB50-PS-W 63 MBB63-PS-W 80 MBB80-PS-W 100 MBB100-PS-W Set of the nos. @9, #0, #1, #2, #3 Set of the nos. @9, #0, #1, #2, #3 * Seal kits consist of items @9 to #3, and can be ordered by using the seal kit number corresponding to each bore size. * Trunnion type should not be disassembled.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

-08 80 18 depth 12 52 13 38 11 16 d1 d2 YB-10 100 21 depth 14 62 17 50 14 19 L UT Weight (g) Bore size (mm) RS W T1 T2 V Part no.

Thermo-chiller

) Ambient temperature 104F (40C) 10 10 8 8 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 6 6 4 4 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-W -20/40(50 Hz) HRS150-W -20/40(60 Hz) 20 20 Facility water temperature 90F (32C)

SY

(g) n: Number of stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For 10 stations or more (5 stations or more in case of SS5Y7), supply pressure to P port on both sides and exhaust from EA and EB ports on both sides.

VFR

Not required (1) VF Non-locking push type Unrestricted 300/50 m/s2 (2) Plug-in type VFR VP4 Dustproof 100, 200 VAC (50/60 Hz), 24 VDC 15 to 10% of rated voltage 5.6 VA/50 Hz, 5.0 VA/60 Hz 3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz 1.8 W Conduit terminal Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

C95

Ht B Auto Switch mounting positions and dimensions [mm] Auto switch operating ranges [mm] D-Z7/Z8, D-Y5/Y7 (W) All models D-Y6, D-Y7 (W) V D-Y7BA Bore Size [mm] Bore Size [mm] D-Z7 D-Z8 D-Y5/Y7 (W) D-Y6/Y7 (W) V D-Y7BA A B Hs Ht Hs Ht Hs Ht 14 1.5 25.5 23 26.5 30 7.5 5.5 3.5 23 23 32 32 25 1.5 29.5 26 30 34 8.5 5.5 3.5 26 26 40 40 26.5 2 33.5 31 34.5 31 38 31 7.5 7 3.5 50 50 31.5 2 39 36

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

Tie-rod Type Hydraulic Cylinder

40 48.5 43 50 43 85 95 80 50 50 55.5 50 56 51 57 51 59 93.5 104 100 59 59 63 59 63.5 58.5 65 58.5 70 104 114 The auto switches listed below cannot be mounted on 63.

Table of Contents

Indoor Three phases 200 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Single phase 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Power source 90 130 0.4 0.45 1.44 1.4 50 60 0.4 0.35 55 65 0.8 0.9 38 46 132 x 2 170 x 2 0.23 0.26 50 Hz 60 Hz 50 Hz 60 Hz Power consumption (W) 0.46 0.52 Current (A) Compact size and lightweight

CNA

3 $0 @8 #7 $2 w #0 $7 $9 $5 %1 %3 $6 @1 @4 !8 @0 !7 !9 @2 @6 $4 A section B section (Release piston bushing) (Piston guide bushing) 100 80 63 50 40 50, 63, 80, 100 @9 !2 !2 Description Material Note Component Parts Description Material Note No. No.

CNA

A F Q GB K With rod boot LH W W D D e E LY V H1 Width across flats B1 8 f l LT KA Width across flats h + l T Y X S + Stroke BN N X Y ZZ + l + 2 stroke LX C H 4-LD With rod boot on both sides LS + Stroke ZZ + 2 strokes ZZ + 2 l + 2 stroke B Bore size (mm) Stroke range (mm) 40 50 63 80 100 LD LH LS LT A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA 9 40 45 50 65 75 207 222 250 306