Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

manifold 10-SS5Z3-60PD2-05U-P 10-SS5Z3-60PD2-05U-P 1 set (Manifold part no.) 10-SZ3160-5LOZ-C6 2 sets (Single solenoid part no.) 10-SZ3260-5LOZ-C6 3 sets (Double solenoid part no.)

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(ZX1A) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] None K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Release valve None [ ]: Weight (g) How to Order Refer to page 13-2-4 for details.

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OUT1 output mode selection in Initial Setting on page 16-2-41. SET Press the SET button.

Metal Seal/Rubber Seal Series VQ Body Ported

fitting assembly for 8 C6: One-touch fitting for 6 2-Rc 1/8, 1/4, C6, C8 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) ( 9.5) 80 39.5 (For C6, C8) (For C6, C8) ( 9.5) DIN rail clamp screw 2-M4 mounting hole 4.5 ~ = ~ = ~ = ~ = 2-M6 mounting hole IN IN IN IN 5.5 (5) 69.5 (40) 6.5 80 58 10.5 37.5 Residual pressure release manual override (For C6, C8) 22 20.5 7 D side U side Stations 1 2 3 n (

5 Port Solenoid Valve SY Series

39.6 [46.6] Approx. 300 (Lead wire length) 89 [93.4] 79 106.8 92 16.9 C6:33.6 N7:37.4 (3.2) 16.9 C6:33.6 N7:37.4 (3.2) 16.9 C6:33.6 N7:37.4 (3.2) Note) Refer to the page 226 for dimensions of connector types. 8 Body Ported Dimensions: Series SY3000 [ ]: AC 3 Position Closed center / Exhaust center / Pressure center Grommet (G), (H): SY3 20(-F2) G H C4, N3 C6, N7 3 4 5 SY3 20-M5(-F2) G H

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10 16 4.3 2-3.2 Mounting holes Manual override 24.5 7.8(C3, C4, C6) (M5: 5.7) Cover dia 1.6 Cross section 0.34mm2 (Lead wire) 34 35 300 (53) 27.5 16.3 18 1.2 13.8 13.6 7 (7.8) (24.5) 2-3.4 Mounting holes 41 Foot bracket M5 X 0.8 P port M5 X 0.8 R port R 3 P 1 10.7 9 M5 X 0.8 External pilot port 32 (Only external pilot style (R)) L plug connector (L): VQZ115-lLl-C3, C4, C6, M5-PR M plug connector

Fieldbus System

How to Order Manifold Assembly Example (SS5Y3-10S6l-l) SS5Y3-10S6Q42-05B-C6 1 set (Type 10 5-station manifold base part no.)

CRBU

Symbol: C5 Applicable to single vane style only Symbol: C6 Applicable to single vane style only MSU Start of rotation is 45 up from the bottom of the vertical line to the left side. Rotation tolerance for CRBU2W10 is . A parallel keyway is used instead of chamfer for size 40. Start of rotation is 45 up from the bottom of the vertical line to the left side.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

4/5 Port Air Operated Valve SYJA3000 Series

B port: C6 (One-touch fitting for 6) P, R port: M5 x 0.8 0.37 0.19 0.72 0.34 0.12 0.44 Closed center SYJA520-C6 Exhaust center Pressure center Single Double 0.54 0.19 0.67 0.38 [0.38] 0.11 [0.11] 0.41 [0.41] 0.41 [0.39] 0.23 [0.12] 0.82 [0.44] 0.36 0.11 0.41 55 3 position 68 (34) 72 (38) 0.21 0.19 0.79 0.32 0.21 0.83 2 position Base mounted (with sub-plate) 0.28 0.18 0.80 0.34 0.20 0.86

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.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 40 41 41 43 45 47 54 54 55 55 56 60 65 68 70 70 71 71 72 77 78 82 84 87 89 91 93 96 97 98 99 99 100 101 102 Series MSUB Rotary Table: Basic Type Vane Style Size: 1, 3, 7, 20 . How to Order . Specifications. Construction. Dimensions .

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

CRB2/CRBU2/CRB1

Symbol: C5 Symbol: C6 Applicable to single vane type only Rotation starts from the horizontal line (90 down from the top to the left side). Rotation tolerance for CRBU2BW10 is . A parallel keyway is used instead of chamfer for size 40. Applicable to single vane type only Start of rotation is 45 up from the bottom of the vertical line to the left side).

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+ 35, L2 = n x 41 + 46 Front ported: L1 = n x 41 + 79, L2 = n x 41 + 90 n (stations) PB IN port direction Model Dimensions 9 348 359 384 395 404 415 448 459 8 313 324 349 360 363 374 407 418 10 383 394 419 430 445 456 489 500 6 243 254 279 290 281 292 325 336 7 278 289 314 325 322 333 366 377 4 173 184 209 220 199 210 243 254 5 208 219 244 255 240 251 284 295 2 103 114 139 150 117 128 161

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Top view from long shaft side) 11-4-18 84 Made to Order Series CRB1 Symbol: C5 Symbol: C6 Change of rotation. (Applicable to single vane type only) Rotation starts from the horizontal line (45 down from the top to the left side). Change of rotation.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Top view from long shaft side) 11-4-18 84 Made to Order Series CRB1 Symbol: C5 Symbol: C6 Change of rotation. (Applicable to single vane type only) Rotation starts from the horizontal line (45 down from the top to the left side). Change of rotation.

Vacuum Regulator

VVQ1000 Bracket Fitting type Fitting size Nil L1 Straight Elbow Size 6 8 1/4" 5/16" Symbol C6 C8 N7 N9 One-touch fitting for IRV20(A) Bottom Bracket Assembly VVQ2000 C6 51A For IRV10(A) P601010-14 For IRV20(A) P601020-14 Fitting type Fitting size Nil L1 Straight Elbow Symbol C6 C8 C10 N7 N9 N11 Size 6 8 10 1/4" 5/16" 3/8" Included Parts No. 1 2 3 Description Bottom bracket Square nut x 4

MY1

Applicable bore size Applicable bore size 16, 20 Application Example Application Example Workpiece W W Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Floating bracket Guide Series MY1B Mounting Example Mounting Example G D Za 30 20 Za 1 E4 E4 E3 E3 C 1 20.5 F B 41

Base Mounted Metal Seal/Rubber Seal Series VQ

C3, C4, C6, M5 C6 T1 U side D side Stations 3 2 1 Terminal no.

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C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 4.5 4.5 M3 mounting hole M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions