IZx-OMT0049

250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 0.5s 100 0.5s 100 1s 1s 150 150 2s 2s 200 200 5s 5s 250 250 300 300 For IZT40

Table of Contents

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

ZP

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

HRX-OM-Q026

/300-A-20. 8-1 8.1.2 HRSH100/150/200/250/300-A-40. 8-2 8.1.3 HRSH100/150/200/250-W-20. 8-3 HRSH Series HRX-OM-Q026 Contents 8.1.4 HRSH100/150/200/250-W-40. 8-4 8.1.5 Option T High head temp . 8-5 8.1.6 Refrigerant with GWP reference . 8-6 8.1.7 Communication specifications . 8-6 8.2 Dimensions . 8-7 8.2.1 HRSH100-A-20/40. 8-7 8.2.2 HRSH150-A-20/40-, HRSH200-A-20/40. 8-8 8.2.3 HRSH250/300-

Table of Contents

Brown Brown White White Pink Pink Gray Gray Unused Unused Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.

Basic type / Direct mount type Series CY3B/CY3R

, 300 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke specification (XB11) applies to the strokes exceeding 2000 mm.

Table of Contents

Manifold Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit VVX21/22/23 17-3-25 N.C./N.O. Manifold 17-2-74 VDW200/300 C.O. 3 port Single unit Pilot operated Diaphragm operation VXD21/22/23 17-3-33 N.C./N.O. Single unit Pilot operated Disk operation VXP21/22/23 17-3-43 N.C./N.O. Single unit 2 port Pilot operated (Water hammer relief type) VXR21/22/23 17-3-53 N.C./N.O.

Valve Single Unit

Thread type Nil Rc G F N NPT Dimensions NPTF T Applicable fitting d Model A L D Gasket KQ2P-04 16 32 6 4 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 Series Round head combination screw Gasket 22 16 18 20.5 22 12 6 8.5 10 11.5 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 10 5/32" 1/4" 5/16" 3/8" 43 32 35 39 43 Caution SX3000 SX3000-22-2 (M2 x 24) M3 x 30 (Matt nickel plated) M4 x 35 (Matt nickel plated

REA/REB

Model determination 22 Series REAS Model Selection 2 Max.

SV

L Dimension n: Stations L n 2 135.5 125 93.5 24.5 3 135.5 125 104 19 4 148 137.5 114.5 20 5 160.5 150 125 21 6 173 162.5 135.5 22 7 185.5 175 146 23 8 198 187.5 156.5 24 9 198 187.5 167 19 10 210.5 200 177.5 20 11 223 212.5 188 21 12 235.5 225 198.5 22 13 248 237.5 209 23 14 260.5 250 219.5 24 15 260.5 250 230 18.5 16 273 262.5 240.5 19.5 17 285.5 275 251 20.5 18 298 287.5 261.5 21.5 L1 L2

ZP

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

5

22 32 +0.5 +0.3 64 72 IY-G10 Part no.

Square Tube Type Air Cylinder Series MB1

22 22 14 14 20 30 30 12.5 16.5 23.5 23.5 Bracket Combinations Bracket combination table -Refer to table together with combination drawings.

Compact

250, 300, 350, 400, 450, 500, 550, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000 48 20 1000 Page 170 32 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) Page 170 2000 10 25 LEMH Linear guide single axis type 48 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000),

C95

, 320, 400, 500 40 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 100 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Intermediate strokes are available.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

[131.4] Approx. 300 83.4 75.9 64.6 Max. 10 145.2 65.4 35.2 50.6 [57.6] 49.5 55.1 37.6 M8 x 1 (Lead wire length) Approx. 300 61.7 [68.7] Pg7 107.4 [111.8] 97.4 28 18 18 18 18 28 18 18 28 18 18 28 125.2 110.4 147 9.5 22 9.5 22 22 9.5 22 9.5 Note) Refer to page 176 for dimensions of connector types. 65 Base Mounted 10-SY3000/5000/7000/9000 Dimensions: Series 10-SY5000 [ ]: AC 3 position closed

Metal Seal/Rubber Seal Series VQ Body Ported

Note 1) Note 2) Dimensions Formula L1 = 10.5n + 14.5, L2 = 10.5n + 25 n: Station (Maximum 16 stations) n L 1 2 46 56.5 225 235.5 3 56.5 67 237.5 248 4 67 77.5 250 260.5 5 77.5 88 250 260.5 6 88 98.5 262.5 273 7 98.5 109 275 285.5 8 109 119.5 287.5 298 9 119.5 130 300 310.5 10 130 140.5 312.5 323 11 140.5 151 312.5 323 12 151 161.5 325 335.5 13 161.5 172 337.5 348 14 172 182.5 350 360.5 15

mb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

70astamb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22