C76

9 58 23.8 10 12.2 M10 x 1.5 38 7 17 34.5 17 M8 x 1 34.5 38 47 24 M38 x 1.5 14 46.5 G 1/8 35 16 12 69 28.3 12 14.2 M12 x 1.75 50 8 22 42.5 19 M10 x 1 42.5 45 57 40 ZZ S XC Item 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Stroke Bore 32 68 (93) 118 139 143 164 168 189 214 97 (122)

C76

30 G 1/8 37.5 12 M30 x 1.5 20 57 45 42.5 M10 x 1 19 42.5 22 8 50 M12 x 1.75 14.2 12 28.3 69 12 16 35 G 1/8 46.5 14 M38 x 1.5 24 40 ZZ S XC Item 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Stroke Bore 32 68 (93) 118 139 143 164 168 189 214 97 (122) 147 172 172 197 197 222 247 140

MY1

Therefore, also check the allowable load for the selected conditions. 16 20 25 32 40 50 63 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 MY1C 30 14 10 49 21 6 60 23 20 68 30 8.2 115 35 35 93 42 11.5 150 50 50 130 60 16 The above values are the maximum allowable values for moment and load.

AC Servo Motor Driver (CC-Link Type ）

14 29 14.

Cylinder with Lock

80 12 55 287 4.5 72 119.5 100 30 14 100 14 65 311 4.5 89 138.5 120 32 16 Bore size LS 32 193 40 211 50 234 63 246 80 297 100 321 Rod flange: MWBWF FT FE Port Cushion valve 4 x FD Fd FB FY FX FZ [mm] Bore size FB FD Fd FE FT FX FY FZ 32 56 7 30 3 10 72 38 87 40 65 9 35 3 10 83 46 101 50 77 9 40 2 12 100 52 120 63 92 9 45 2 12 115 62 135 80 100 12 45 4 16 126 63 153 100 120 14 55 4 16 150

Compact Manifold Regulator Series ARM5

L1=(14 x n)+36 10 16 14 10 14 Y W Pressure gauge (Accessory) V X 2 x 4.3 L3=50+R+V L4=50+T+X H H L L S S O O M4 thread hole U U C C P P K K 50 SMC 25 S T R L2=(14 x n)+29 29 55 (Max. 58) Note) U IN IN IN 33 15 14 Note) Max. dimension is the size when the handle is unlocked.

Table of Contents

Applicable strokes: 150, 250, 350, 450, 550, 650, 750, 850, 950, 1050 Example) LG1H2121SC-150-F2-X2 Allowable Moment (Nm) Allowable dynamic moment Allowable static moment LG1H21 Model Mounting orientation Load movement direction Pitching Rolling Yawing 142 79 150 a = 1000 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a 4000 a = 2000 L1 (mm) Pitching Mep m : Transfer load (kg) a

MXQ

(mm) MXQ20-40 MXQ20-75 MXQ20-40 MXQ20-40 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-30 MXQ20-30 MXQ20-75 MXQ20-30 0.06 MXQ20-40 MXQ20-40 MXQ20-100 MXQ20-125 MXQ20-150 MXQ20-100 MXQ20-100 MXQ20-125 MXQ20-125 MXQ20-150 MXQ20-150 0.06 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-150 MXQ20-150 MXQ20-150 0.08 MXQ20-30 MXQ20-30 MXQ20

Base Mounted Metal Seal/Rubber Seal Series VQ

275 285.5 Dimensions: Side Entry Connector [-FS] n 1 2 3 4 5 6 7 8 9 12 13 14 15 16 10 11 L L3 L4 137.5 148 150 160.5 150 160.5 162.5 173 175 185.5 187.5 198 200 210.5 212.5 223 225 235.5 300 310.5 287.5 298 275 285.5 262.5 273 250 260.5 237.5 248 225 235.5 2-4-190 Base Mounted Series VQ0/1000 Plug Lead Unit VQ1000 VQC Indicator light SQ Manual override VQ0 VQ4 VQ5 VQZ VQD ~ = 6 DIN rail

MGP

1/8 Rc 1/8 Rc 1/4 Rc 1/4 7 13 9 14 32 40 50 63 25, 50, 75, 100, 125, 150, 175, 200 250, 300, 350, 400 66 44 14 14 M8 x 1.25 M8 x 1.25 18 10 72 44 14 12 M10 x 1.5 M10 x 1.5 21.5 11 M10 77 49 16.5 16.5 M10 x 1.5 M10 x 1.5 28 13.5 WA R S T U VA VB WB Bore size (mm) X XA XB XC XL YY YL Z Over 25st to 100st Over 300st Over 200st to 300st 33 34 36 38 Over 25st to 100st 83 84 86 88 Over 100st to

24

124 M14 x 2.0 28 11 MGPM (Slide bearing)/A, DB, E Dimensions MGPL (Ball bushing), MGPA (High precision ball bushing)/A, DB, E Dimensions [mm] [mm] Bore size [mm] A DB E Bore size [mm] A DB E 150 st or less Over 150 st 150 st or less Over 150 st 80 146.5 193 30 0 46.5 100 166 203 36 0 37 150 st or less Over 150 st 150 st or less Over 150 st 80 160 193 25 13.5 46.5 100 180 203 30 14 37 End

MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

ZP

8 14 40 33 20 52 7 17 150 250 155 40 4 x 14 4 x 9 88 4 x 16 4 x 10 34 Symbol/Type HB: Heavy-duty (Bellows) Heavy-duty Pad 32, 150 Pad diameter For heavy or large work pieces How to Order ZP2 32 HB N Pad unit Pad diameter Pad material Symbol Pad diameter 32 150 Symbol Material NBR Silicone rubber FKM CR 32 150 N S F C Note) Silicone rubber is only applicable to the 32 pad.

CM2

9 28 9 18 24 24 5 15.5 10 30 8 M8 X 1.25 13 20 8 41 20 M10 X 1.25 17 6 M26 X 1.5 15 14 9 33.5 9 22 30 30 5.5 19.5 10 30 10 13 25 8 45 26 M10 X 1.25 17 6 M26 X 1.5 15 14 9 37.5 9 22 34.5 30 5.5 19.5 10 30 12 13 32 8 45 26 M14 X 1.5 M32 X 2 22 8 21.5 18 10 46.5 11 24 42.5 38 7 21 15 39 14 16 40 11 50 32 Dimensions by stroke Built-in One-touch fitting (mm) Stroke 1 to 50 51 to 100 101 to 150

Valve Single Unit

129 15.5 173 162.5 139.5 16.5 185.5 175 150 17.5 185.5 175 160.5 12.5 198 187.5 171 13.5 Stations n L1 L2 L3 L4 11 stations 223 212.5 192 15.5 12 13 14 15 16 17 18 19 20 stations 210.5 200 181.5 14.5 235.5 225 202.5 16.5 248 237.5 213 17.5 248 237.5 223.5 12 260.5 250 234 13 273 262.5 244.5 14 285.5 275 255 15 298 287.5 265.5 16 310.5 300 276 17 1-6-78 Exploded View/DIN Rail Manifold Type

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

134.1 13 94.5 6 173 162.5 144.6 14 105 7 185.5 175 155.1 15 115.5 8 198 187.5 165.6 16 126 9 210.5 200 176.1 17 136.5 10 210.5 200 186.6 12 147 11 223 212.5 197.1 13 157.5 12 235.5 225 207.6 14 168 13 248 237.5 218.1 15 178.5 14 260.5 250 228.6 16 189 15 273 262.5 239.1 17 199.5 16 273 262.5 249.6 11.5 210 L1 L2 L3 L4 L5 187 EX500 Decentralized Serial Wiring 10-SV Dimensions: Series 10-SV2000

Basic type / Direct mount type Series CY3B/CY3R

14 B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 H 13.5 12.5 13 20 20.5 22 29 33 33 CC 32 38 I 28 34 40 50 58 72 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 J 4.5 4.5 6 6 8 8 10 12 12 E 4 1.5 2 2 2 2 3 8 8 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 V T C 8 14 14 26 32 32 41 F 8 9 10 13 13 16 16 2 2 L 35 38 57 66 70 80 92 110 122

Electric Actuator

15 D x 150 (= E) 60 778 10 4 600 606 B [mm] 878 12 5 750 706 Model L 561.5 610.5 661.5 710.5 761.5 810.5 A B n D E 11-LEFS40;-200 11-LEFS40;-200B 11-LEFS40;-300 11-LEFS40;-300B 11-LEFS40;-400 11-LEFS40;-400B 378 6 2 300 978 14 6 900 206 806 478 6 2 300 1078 14 6 900 306 906 578 8 3 450 1178 16 7 1050 406 1006 25 Electric Actuator/Slider Type Belt Drive Step Motor (Servo/24 VDC) Servo Motor

Table of Contents

1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69 25.5 40 150 153 (168) 59 35.5 70 81 VXR2390-20 2 VXR2392-20 ( ): N.O. 17-3-60 1 The VX series will be revised shortly.

Table of Contents

Vacuum regulator 13-14-2 Series IRV 13-14-3 Controls the vacuum pressure in accordance with external electric signals.