Step Motor Controller

L DIN rail AXT100-DR-l 5.25 12.5 (Pitch) 7.5 For l, enter a number from the No. line in the table below.

ZP

A J K B Y C D Misc.

PFxx-OMX0007

PLS1_L U8 0 Y 0: 100 (L/pulse) 1: 1000 (L/pulse) 1520 0x05F0 0 R/W 1530 0x05FA 0 R/W PLS1_Ft3 U8 0 Y 0: 1 (L/pulse) 1: 10 (L/pulse) 0: Add (Addition) 1: dEC1 AC (Setting of the accumulated flow output direction) Setting of the accumulated flow output direction 1600 0x0640 0 R/W U8 0 Y (Subtraction OUT1) 2: dEC2 (Subtraction OUT2) 0: 1.0 sec 1: 2.0 sec 2: 5.0 sec 1800 0x0708 0 R/W FiL (Digital

Digital Flow Switch (Integrated display type) ( compatible)

L type) [00.50] 00.50 L/min (100 L type) [0.126] 0.126 L/min (250 L type) [ P_2] Set value (OUT2) Page 44 5% of maximum rated flow [00.20] 00.20 L/min (4 L type) [000.8] 000.8 L/min (16 L type) [002.0] 002.0 L/min (40 L type) [000.5] 000.5 L/min (100 L type) [00.12] 00.12 L/min (250 L type) [ H_2] Hysteresis (OUT2) Page 45 [ dtH2] Delay time setting at ON [ 0.00] 0.00 s Page 45 [ dtL2] Delay

AC

Y50 SAC4006, #12 14 AC4000-06 to AC4040-06 Y50 Y60 SAC5000, #12 AMR AC5000, AC5500, AC6000 15 Y60 AC5020, AC5520, AC6020 AWM L Bracket/ Interface with L Bracket AWD ITV VBA VE VY G AL Interface with L bracket L bracket L bracket Interface with L bracket A B C D E F G R L Applicable model L bracket, Interface with L bracket Model 20 12 4.5 B110L 3 Y10L 25 5 8 2.25 27 AC1000 to AC1020 Interface

0.4

) w t r y @0 u i !

ZP

Piping capacity y 0.02 L Selection Graph (3) Conductance by Tube I.D.

ITV-E

The expect ed perf orm ance and saf et y assurance w i l l be t he responsi bi l i t y of t he person w ho has det erm i ned t he com pat i bi l i t y of t he syst em .

O

The expect ed perf orm ance and saf et y assurance w i l l be t he responsi bi l i t y of t he person w ho has det erm i ned t he com pat i bi l i t y of t he syst em .

O

The expect ed perf orm ance and saf et y assurance w i l l be t he responsi bi l i t y of t he person w ho has det erm i ned t he com pat i bi l i t y of t he syst em .

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

~Bod~y~ty~pe~~:;l Electrical entry O-Plug in F-Through base ~4@ NVFR2 @OO Plug-in Non plug-in NVFR2 1.-_ Port size =Non-locking B-Lock type --r.W~H~ho-u~t~s-u~b-p~la~te-push type (Screw type) (Flush) 01T J1j Non plug-in NPTF ~ ClJ Y.O ~ 02T NPTF ~ Symbol .A-Non-Iocking C-Iock type Push type (L) )l(Bottom ported 1/8 NPTF only.

LJ1H

Nil Standard motor SMC controller Series LC1 compatible L R Left Right Lead screw lead G R Y Matsushita Electric Industrial Co., Ltd.

Mechanically Jointed Rodless Cylinders

Coordinates and Moments Load Weight and Static Moment Horizontal mounting Wall mounting Ceiling mounting z M1 M3: Yawing M2 M3 M1 M2 M2 y m1 x g X x Y y m2 x g z X Z m3 x g x X x Y M1: Pitching Vertical mounting Mounting direction Static load m Horizontal m1 Ceiling m2 Wall m3 Vertical m4 Note) m3 x g x Z m3 x g x X m1 x g x X m1 x g x Y m2 x g x X m2 x g x Y m4 x g x Z m4 x g x Y y M1

Compact Rotary Actuator Series CRQ2

Y = L2 = X = L1 = (mm) (mm) L2 6 (9 Y) to Y 7 (10 Y) to Y Y 3 to 9 3 to 10 L1 {10 (18 X) } to (X 2) {10 (20 X) } to (X 2) X 8 to18 10 to 20 Size 10 15 Size 10 15 Symbol: A11 Symbol: A12 Symbol: A13 Shaft with through-hole Minimum machining diameter for d1 is 0.1.

Aluminum High Vacuum Angle Valve

Without auto switch (without built-in magnet) D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not applicable for H4, H5, Size 25 not for H4. y Number of auto switches/Mounting

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

DO Without connector With connector Y DIN terminal (Type Y) YO Without connector Note) Do not replace V111 (G, H, L, M, W) with V115 (DIN terminal) and vice versa when replacing pilot valve assembly only.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Size Foot bracket Mounting screws included in foot bracket 30 CRA1L30-Y-1 M5 x 0.8 x 25 50 CRA1L50-Y-1 M8 x 1.25 x 35 63 M10 x 1.5 x 40 CRA1L63-Y-1 80 CRA1L80-Y-1 M12 x 1.75 x 50 100 CRA1L100-Y-1 M12 x 1.75 x 50 Note 1) The part numbers shown above include mounting screw.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Size Foot bracket Mounting screws included in foot bracket 30 CRA1L30-Y-1 M5 x 0.8 x 25 50 CRA1L50-Y-1 M8 x 1.25 x 35 63 CRA1L63-Y-1 M10 x 1.5 x 40 80 CRA1L80-Y-1 M12 x 1.75 x 50 100 CRA1L100-Y-1 M12 x 1.75 x 50 Note 1) The part numbers shown above include mounting screw.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Flange bracket material: Carbon steel 7-6-19 20 Series CQ2 Accessory Bracket Double Knuckle Joint Single Knuckle Joint For I-G012, I-Z015A I-G02, I-G03 For I-G04, I-G05 I-G08, I-G10 For Y-G012, Y-Z015A Y-G02, Y-G03 For Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Axis d9 ND hole H10 Axis d9 Material: Carbon steel Material: Cast iron Material: Carbon steel Material: Cast iron Courtesy of Steven

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !