High Vacuum L Type Valve

Valve size Valve size Material 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Description

XL-OMY0001

1H-2 XLA80A-30-1H-2 11,2 FKM:No.1349-80[ ]P8 XLA16A-30-1-2-XN1 2 M9// XLA16-30-1-2M9// 3 XLA16A-30-1-2M9NA-XN1 412 / 1 / 2 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025** AS568-030** AS568-035** AS568-039** B2401-V15V B2401-V24V B2401-P42V AS568-227V 1 B2401-V15** B2401-V24** B2401-P42** AS568-227** B2401-P4V B2401-P5V B2401-P6V B2401-P8V 2 B2401-P4** B2401-P5

High Vacuum L Type Valve

Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5

XL-OMV0005

Maintenance parts list (Valve seal 1, 2 / External seal / Nut assembly) Description Valve size Valve size Material Part indication No. 16 25 40 50 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Standard AS568-025V

High Vacuum L Type Valve

Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5

FGD-C

FGDA(1 ) FGDB(2 ) 50mm Rc Rc 9/11 FGX-OM-L007-C 5. 1 1) 50mm 2) 0.02MPa 0.02MPa 3) 2 1) 2) 6. ,0.1MPa, 11 1) 2) oC 40 3) IN OUT 4) 5) 6) 7) *2 250mm 8) 21 1) 6 1 2) 3) 2 250mm * * 4) 5) *:FGDT/F 25NmFGDC/E 15Nm 10/11 FGX-OM-L007-C 3 1) 2) 7. 1 2 1 11/11 FGX-OM-L007-C Revision history A P6. 10 1 B P5. P6.1-2. P7.

FGE-C

FGE-KT002 FKM O V CY-24S SUS304/SWCH 001(FGESLA) 002(FGESLB) 003(FGESLC) FGE-CV SUS304 SUS304 M8X1.25XL30 SS400 M8X1.25 SS400 SS400 () 8/12 FGX-OM-L009-B 2 2 FGES L A FGES L B FGES L C 1) () (R) 12 (MPa) 0.7 () 80(60) 4 4 2)8 4 2)12 (mm) 6570250 6570500 (8 6570250) 6570750 (12 6570250) (MPa) 0.1 SUS304 SUS304 O FGESNBR FGELFKM SS400 (kg) 10 13 18 (L) 14 21 29 1) 2) 3) 3 1) (P5

IP80-OM00019

O 21 5. ( 3-1-2 ) 6. () ( 7-2) 22 11 11-1 OUT1OUT2 (1920) 6 90cm3 07 P36801080 P565010-18 180cm3 1 P36801081 P565010-19 O P5 19 20 (1) O (2) A (P22401123) 11-2 IP8100 IP8100 7 M P368010-24 S P368010-25 21 M 22 S M IP610 SIP610 23 11-3 IP8000 IP8000 8 1085mm P368010-20 35100mm P368010-21 50140mm P368010-22 11-4 (IP8*00-**0)2 9 (A) P368010-26 79 (B) P368010-27 911 G1/2 23 24

AIR CYLINDER

In this case, the rigidity of the machinery should also be examined. 9 - 7) How to order 25A D B 125 100 D-M9* C S2 Auto-switch Stroke Bore size Mounting bracket Built-in magnet Secondary battery production facility Air Cylinder Built-in magnet Bore size D Built-in magnet 125 125mm Nil Without magnet 140 140mm 160 160mm Mounting B L *Refer to Maximum stroke table(P5 Table 1) F G Auto-switch

LEC-T1_C

. -106090% -106090 113 - 8.5 5 P5 8.6 SVRE OFF [BK RLS]DC24V [BK RLS] [BK RLS] DC24V [BK RLS] EMG /LEC 114 - 9. 9.1 / 9.2 ON 115 - 5 () 116 - 9.3 50mm 9.4 ( ) 117 - 9.5 9.6 D 100 9.7 118 - 10. No.

Ｖ cylinder

Installation and Handling P5 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Changing between rod extended when energized and rod retracted when energized 2-6. Allowable kinetic energy 2-7. Air cushion 2-8. Control of direction 2-9. Mounting brackets 3. Maintenance P13 3-1. Checks 3-2. Replacement of seals 3-3. Consumable parts 3-4. Troubleshooting 4.

Electrostatic Sensor Monitor

(P5,P6) Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010-2014 SMC Corporation All Rights Reserved No.SFOD-OMO0004-A

ELECTRO-PNEUMATIC POSITIONER

Pilot unit No. having the Throttle shown at left 90cm3 0.7 P36801080 P565010-18 180cm3 1 P36801081 P565010-19 Fig. 19 Throttle mounting Fig. 20 Pilot valve bottom drawing Throttling diameter OUT2 OUT1 O-ring P5 Throttle (Note 1) When mounting the throttle, pay attention not to let dust and others enter the port hole. Be sure to mount an O-ring after mounting the throttle.

High Vacuum L Type Valve

Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5

AIR COMBINATION

June 2015 P5 Installation CAUTION Air combination is added.

LUBRICATOR

P5 Correction:Air SourceCATION P6 Correction:Filtration, Oil mist density at the out side, Flow rate, P8 Correction: bracket assy drawing. P18 Correction:dimension of metal bowl with level gauge. P24 Deletion:bracket assy disassembly drawing. 12.

AIR COMBINATION

63.5 91.4 87.4 104.9 93.9 AC30D-B 28 30 27.8 40.9 37.5 66.9 37.5 67.9 123.6 122 118 156.8 122.1 137.6 142.1 AC40D-B 28 38.4 27.8 48.8 42.5 75.7 42.5 75.7 155.6 154 150 186.9 154.1 169.6 174.1 AC40D-06-B 28 38.4 27.8 48.8 42.5 75.7 42.5 75.7 157.6 156 152 188.9 156.1 171.6 176.1 Note) The dimension of C is the length when the filter regulator knob is unlocked. 27 Revision history P5

Series MLGP

Allowable kinetic energy P5 5. Precautions on model selection P6 6. Operation Principle P6 6-1. Extension locking (type F) 6-2. Retraction locking (type B) 7. Installation P9 7-1. Air supply 7-2. Piping 7-3. Operating environment 7-4. Mounting 7-5. Preparation before operation 8. Pneumatic circuit P12 9. Manual unlocking P14 10. Maintenance P16 10-1. Disassembly/ Replacement 10-2.

VM

Description VH300 244120 244120-1 VH400 244219 244219-1 VH600 Resin e Slide ring 24408-1 24077 JIS B 2401 P5 JIS B 2401 P42 24403 24416-3 240359 JIS B 2401 P10 JIS B 2401 G55 24413 2407102A (2407114A) 24425-6 240359 JIS B 2401 P10 JIS B 2401 P71 24413 2407102A (2407114A) 240417 24047 JIS B 2401 P15 JIS B 2401 G120 r t y u i Slide ring spring Check ball spring O-ring O-ring Handle head Piano

Hand Valve Series VH 1

Description VH300 244120 244120-1 VH400 244219 244219-1 VH600 Resin e Slide ring 24408-1 24077 JIS B 2401 P5 JIS B 2401 P42 24403 24416-3 240359 JIS B 2401 P10 JIS B 2401 G55 24413 2407102A (2407114A) 24425-6 240359 JIS B 2401 P10 JIS B 2401 P71 24413 2407102A (2407114A) 240417 24047 JIS B 2401 P15 JIS B 2401 G120 r t y u i Slide ring spring Check ball spring O-ring O-ring Handle head Piano