Vacuum Unit

Symbol Type Note Nil Without option Symbol Vacuum (V) port 06 6 08 8 07 1/4" 09 5/16" When R is selected for q, P needs to be selected.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

In the case of liquids: P Q = 53 Kv (9) G Q : Flow rate [L/min] Kv : Flow coefficient [m3/h] DP : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 232 Kv P (P2 + 0.1) (10) Q : Flow rate [kg/h] Kv : Flow coefficient [m3/h] DP : Pressure difference [MPa] P1 : Upstream pressure [MPa]: DP = P1 P2 P2 : Downstream pressure [MPa] 57 Solenoid

0.4

w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2

Aluminum High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

Table of Contents

for purge air discharge (Option: P) u t e q IN OUT i } r w y HA Purge air for dehumidification Purge air for dehumidification AT ID AMG Component Parts AFF Material Description No.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

q END w END q END w END q Switch for end of rotation q Switch for end of rotation w Switch for end of rotation q Switch for end of rotation w Solid-lined curves indicate the rotation range of the output key (keyway).

Table of Contents

7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

7 No. q w e r t y u i o !

One-touch Fittings Series KQ2

O e b u t ) m m ( e l b a c i l p p A e z i s g n i t t i f d . o N t r a P D L1 L2 P Q A M n o l y N e n a h t e r U 2 . 3 2 . 3 9 9 3 2 U 2 Q K 6 . 9 0 5 5 . 7 1 6 . 9 9 5 3 5 . 5 1 4 . 3 9 . 2 6 4 4 9 9 4 0 U 2 Q K 4 . 0 1 5 . 1 5 8 1 4 . 0 1 7 . 9 5 . 5 3 6 1 2 . 4 2 . 4 2 1 6 6 9 9 6 0 U 2 Q K 8 . 2 1 5 . 5 5 0 2 8 . 2 1 7 . 1 1 5 . 8 3 7 1 4 . 3 1 4 . 3 1 9 1 8 8 9 9 8 0 U 2 Q K 2

New

In the case of liquid: P Q = 1.9 x 106Av (9) G Q : Flow rate [L/min] Av : Flow coefficient [m2] P : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av P(P2 + 0.1) (10) Q : Flow rate [kg/h] Av : Flow coefficient [m2] P : Pressure difference [MPa] P1 : Upstream pressure [MPa]: P = P1 P2 P2 : Downstream pressure [MPa] 34 Solenoid

2/3 Port Valve

=2.4): P 0.08MPa VNH133AB(Cv=1.7): P 0.16MPa VNH413AB(Cv=1.4): P 0.23MPa VNH313AB(Cv=1.0): P 0.45MPa VNH213AB(Cv=0.7): P 0.9MPa VNH113AB(Cv=0.4): P 0.8MPa Calculation by Cv factor Q=14.2 Cv .l/min 10.2P G Calculation by effective area Q=0.8 S .l/min 10.2P G (Symbol) Q : Flow rate(l/min) P : Pressure differential P1-P2(MPa) P1 : Primary pressure(MPa) P2

3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

Magnetically Coupled Rodless Cylinder

wire (NPN) 3-wire (PNP) P P A96V A96 s s s s 5V p P P F9NV F9N IC circuit 5V 12V p P P F9PV F9P s p P P 12V F9BV F9B 2-wire s Relay PLC Grommet Yes 24V s 3-wire (NPN) 3-wire (PNP) p P P F9NWV F9NW Diagnostic indication IC circuit 5V 12V p P P F9PWV F9PW 2-color display p P P F9BWV F9BW 2-wire 12V s Lead wire length symbols 0.5m/ Nil (Example) F9NW 3m/ L F9NWL 5m/ Z F9NWZ Solid state switches

Step Motor Controller

P Signals and terminal status can be monitored. P Parameters can be set.

3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

VFR

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

MY1

PP2 QQ LH RR1 SS RR2 SS H NH NC Auto switch magnet holder G G TT UU TT UU P (Port) P (Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) Cushion needle GB MW A N 2-P (Hexagon socket head taper plug) Z + Stroke 2 x 2-J depth K P (Port) P (Hexagon socket head taper plug) XX (WW) XX (WW) P (Hexagon socket head taper plug) P (Port) VV VV 2-ZZ (Hexagon socket head taper plug

1.1

P. 195 Specified CFC P. 192 SV P. 196 T Temperature fuse P. 196 Thermal relay P. 198 Thermistor P. 196 Thermo couple P. 196 Thermoelectric device P. 193 Thermoelectric system P. 193 Thermo-module P. 193 Thermostat P. 196 Three-phase power supply P. 198 Time division proportional output P. 197 Turbine pump P. 194 U UL standards P. 199 V Vane pump P. 194 Vortex pump P. 194 W Water control

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

Fieldbus System

P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P