High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 17.2 10.2 3.6 3.6 XLFV-25-2 46 21.4 10.2 3.6 3.6 XLFV-40-2 54.5 33.9 10.2 3.6 3.6 XLFV-50-2 71 35.3 12 4 2 XLFV-63-2 80.5 43.8 12 4 2 XLFV-80-2 90.5 59.8 12 4 2 13 A Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG

Electric Actuators

J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5BD-50B LXSH5BD-75B LXSH5BD-100B LXSH5BD-125B LXSH5BD-150B Refer to page 301 for mounting.

Best Pneumatics Vol. 14

Note 2) Drain guide is G 1/4 (applicable to AW30 to 40). 1 (4) AW20(K) to 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) AW20(K) AW30(K)/40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) PPA 2 6 8 C J (5) AL N R W Port size Z (6) AW20(K) to 40(K) Body size Symbol Port size When more than one specification is required, indicate in ascending alphanumeric order.

Air Cylinder Series CM2

Grease pack part no.: GR-S-010 (10 g) Nickel plated Nickel plated Technical data 151 Series CM2W Basic Style (B) CM2WB Bore size Stroke Effective thread length 2 x FL H1 H2 Width across flats B2 Width across flats B1 2 x P (Rc, NPT, G) 2 x NN G G MM I Width across flats KA Width across flats KA 2 x Eh8 NA D D AL A K AL A K F N H F N MM NA S + Stroke ZZ + 2 x Stroke H + Stroke l 8 8 Width

Hydraulic

118 90 35.5 80 35 27 19 M12 x 1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16 100 340 34 125 38 6.5 140 112 35.5 80 35 27 19 M14 x 2 27 24 34 M27 x 2 35 1/2 77 140 12 20 16 100 340 34 160 42 9 174 140 45 100 38 36 22 M16 x 2 28 27 38 M33 x 2 40 3/4 94 159 12 24 20 108 375 43 108 Series CHAW Dimensions Foot type: CHAWL H + Stroke H K F T T V V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA

5-Port Solenoid Valve

to 16 stations (EX120) 2 to 24 stations (EX180) Valve stations 2 to 24 stations 2 to 18 stations 2 to 8 stations 2 to 24 stations 2 to 20 stations 2 to 24 stations 2 to 16 stations 2 to 24 stations Flat ribbon cable connector with strain relief Conforming to MIL-C-83503 (Refer to page 57.)

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2 2 2 2 4 2 2 1 1 6 2 No. !

AW

Model Optional specifications AW10(K) AW20P-270AS AR20P-260S AW20(K) AW30(K) AR40P-270AS AR40P-260S AW40(K) AW40(K)-06 AW60(K) AW60P-270AS Note 6) Bracket assembly Note 1) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AR30P-270AS AR30P-260S Note 7) Set nut G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Round type Note 2) Standard 0.02 to 0.2 MPa

Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.

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/Specifications K TFU 0805B-3 3 cores 4 6 8 2.5 4 5 TFU 0805B-2 2 cores TFU 0604B-3 3 cores TFU 0604B-2 2 cores TFU 0425B-3 3 cores TFU 0425B-2 2 cores Model M Burst Pressure Characteristics Curve and Operating Pressure Max. operating pressure (at 20C) Fluid Tubing I.D.

Rotary Actuator

V V K* K* K* -XA46 -XA51 Change of long shaft length (Without keyway) V V V V T, J, K* K* T, K* J* K* MSQ MSZ CRQ2X MSQX -XA52 Change of short shaft length (Without keyway) V V K* K* K* -XA53 Change of double shaft length (Both without keyway) V V V K* -XA54 Change of long shaft length (With four chamfers) V V V X, Z* X, Z* -XA55 Change of short shaft length (With four chamfers)

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R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

NCQ2/CQ2

Minimum lead wire bending radius 10 Auto switch 2 x H thread effective depth C (Also back cover) 2 x 4 x OB counterbore depth RB Q Q (Port size) 2 x P (Rc, NPT, G) (Also back cover) Width across flat K D D 25 M E 2.5 through-hole 2 x 4 x OA thread depth RA K 4 pcs.

Compact Cylinder

) 2 x P (Rc, NPT, G) (Also back cover) Width across flat K D D 25 M E 2.5 through-hole 2 x 4 x OA thread depth RA K 4 pcs.

Modular Type Regulators Series AR

Model Option AR10 AR25(K) AR20(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) Bracket assembly Note 1) AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S AR50P-270AS Note 2) AR20P-270AS AR20P-260S AR25P-270AS AR25P-260S G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L AR10P-270AS AR10P-260S G27-10-R1 Set nut Note 3) Note 3) G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L GC3-10AS [GC3P-010AS (Pressure gauge

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

CLKQ K G P G P Table 2.

CA2

C85 126 21.5 26 17 M26 x 1.5 40 1/2 72 270 80 65 81 1/4 stroke 279 288 C95 Center Trunnion Style: CA2WT CP95 Z + 1/2 stroke NCM Width across flats KA 2-P (Rc, NPT, G) G G Z + l + 1/2 stroke Width across flats B1 MM Width across flats KA Width across flats B1 MM 4-J 2-cushion valve NCA TDe8 D DTY e D E E -X H1 H1 C B 9 f l AL AL F F TT N N K K A A h + l 20TX TZ H H + Stroke ZZ + l + 2 strokes

Aluminum High Vacuum Angle Valve

83 7-1 90 u o K flange i 83 KF flange 2-1 0.2 112 q 114 90 O-ring Part No.

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Brown Brown Load Load Switch 1 Switch 1 Blue Blue Brown Brown Switch 2 Switch 2 Blue Blue Load voltage at ON = Power supply voltage Residual voltage x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Example: Power supply is 24 VDC Internal voltage drop in switch is 4 V. Example: Load impedance is 3 k.

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2 LJ1H20 Vertical Mount Specification X70 Stroke 2 F P K A 1 2 LJ1H20 Dust seal specification Refer to Table below.