Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

Nozzle Type Ionizer

) Circumferential jet bar nozzle (straight type) Bender tube nozzle Long nozzle 6 C O N T E N T S Nozzle Type Ionizer IZN10E Series Technical Data Static Neutralization Characteristics p. 8 Blow Velocity Distribution p. 8 Flow Rate Characteristics p. 9 Ozone Concentration p. 9 Energy saving static neutralization nozzle How to Order p. 10 Specifications p. 11 Accessories p. 12 Repair

Rotary Clamp Cylinders

+0.05 B L U C O L I thread effective depth J (3.3) T S 5.5 D C 4 x G through R + Clamp stroke Z X 2 x 4 x H counterbore K Q + 2 x Clamp stroke A P Both ends tapped: MKA (mm) A B Model MKA MKA50 MKA63 32 40 10 M6 x 1.0 14 M8 x 1.25 18 M10 x 1.5 R + Clamp stroke (Basic) (mm) A B C D M N G H I J K L O P Q R S T U V TN TF X Yh9 Z Model 0.1 0.2 0 0.062 MKB32 MKB40 MKB50 MKB63 14 30 0.15 20 34

Basic type / Direct mount type Series CY3B/CY3R

HB HT HC N X A W K 2 x plug H 2 x P (Piping port) HA CB T 4 x counter bore dia.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

A Adjustment amount by adjustment bolt A Adjustment amount by adjustment bolt A Adjustment amount by adjustment bolt B Adjustment amount by adjustment bolt B Adjustment amount by adjustment bolt B 90 Rotation 90 Rotation 90 Rotation 11-9-13 14 Series MSQ Construction o i t !

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 LE-CP-3-B 360 LE-CP-5-B 590 LE-CP-8-B 1060 LE-CP-A-B 1320 LE-CP-B-B 1920 LE-CP-C-B 2620 Robotic cable Connector B terminal no.

Round Type Hydraulic Cylinder

Head flange type: CHMG GA N Rc P 2 x NN Width across flats B2 H2 GB N Rc P 4 x FD H1 Width across flats B1 D IA I FY B Effective thread A F K H NB S + Stroke ZZ + Stroke FT NC 3 Width across flats NA MM FX FZ (mm) Effective thread length (mm) IA (tolerance) Bore size (mm) Stroke range (mm) A B B1 B2 D F FD FT FX FY FZ GA GB H H1 H2 I K MM N NA 0.020 0.053 0.020 0.053 0.025 0.064 0.025 0.064

Electric Actuators

B-1 A-1 B-2 A-2 B-3 A-3 Signal Cable color S Brown Red Orange Y ellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

48

Direct teaching P P P Position Set in units of 0.01 mm [Pushing]: Pushing start position JOG teaching P P P P P P P P P P P P P P Set in units of 1 mm/s2 Acceleration/deceleration during movement Select from 16-level Acceleration/Deceleration Step data setting (Excerpt) Set in units of 1% Rate of force during pushing operation Select from 3-level (weak, medium, strong) Pushing force Set

CG5-S

flats B1 2-Rc P Dim.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

Mechanically Jointed Rodless Cylinders

MY3A Bore size Stroke G G NG NG 2 x P (Hexagon socket head plug) H (LL) L LD through hole 4 x B counterbore 4 x MM depth M NH 2 x 2 x P PA (Hexagon socket head plug) YW QW NW LW UU TT PB PD PG HG Q + Stroke PC Port variation (2 x JJ counterbore, thread depth from bottom KK) Floating bracket mounting thread 2 x T counter bore depth E 2 x P Head cover piping connection can be freely selected

/

PE 12 E Bracket Main port R T J D 1 2 3 I O M C N P: For mounting 4 locations B H G A Drawing indicates conduit terminal type.

Electric Slide Tables

7 i y r w e #0 @9 @7 @8 @2 @0 u D A A D C-C D-D B-B @5 @4 !9 !1 !5 #1 q C B C B !4 !2 !0 !8 @1 !6 t o @3 @6 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

C95

GD GC EE SW EE SW1 KK WA WA WB B D B ??

C95

B2 ??

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators C2 2 x P (Rc, NPT, G) M5 x 0.8 Effective thread length 2 x FL Width across flats B2 2 x NN B (This drawing shows the cases of 20 and 25.)

C95

style Single clevis style Double clevis style Center trunnion style B L F G C D T Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

CY1F

T Note1) EB LL Concentrated piping on right (CY1F10 to 25R--) KA KB HW EW GD GC 2-P (Hexagon socket head plug) Hexagon socket head bolt For adjustment bolt fixing ES 2-P (Piping port) EY HA EH KC GB KH H GB GA G GA HB KW N N Adjustment bolt A Z + Stroke Concentrated piping on left (CY1F10 to 25L--) KA KB EW 2-P Hexagon socket head bolt For adjustment bolt fixing HW ES (Piping port) 2-P (Hexagon