SYJ300/500/700

plug connector (L): SYJ72-L-01 (-F) M plug connector (M): SYJ72-M-01 (-F) DIN terminal (D): SYJ72-D-01 (-F) M8 connector (MO): SYJ72-WO-01 (-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 65 31.5 [38.5] 57.5 Max. 10 89.6 16.1 46.2 31.1 M8 x 1 36 18.5 42.6 [49.6] Approx. 300 (Lead wire length) Pg7 80.5 [82.7] 90.5 70.7 [72.9] 79.6 72.2 65.7 49.7 23.5 10.9 23.5 10.9 23.5 10.9

VZ100/300/500

DIN terminal (D) VZ34-D-01 L plug connector (L) VZ34-L-01 VFN 300 (Lead wire length) Applicable cable O.D.: 3.5 to 7 300 (Lead wire length) : With light/surge voltage suppressor 4-6-17 18 Series VZ300 Manifold Specifications Manifold Specifications For external pilot For internal pilot 20-1 40R-2 40-2 40R-1 40-1 Model Manifold type Single base/B mount 21R-1 P(SUP)/R(EXH) Common SUP/Common

Valve Single Unit

SX (Mounting hole) A: Orange B: Green M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) L plug connector (L): SX3240(R)-L-01 M plug connector (M): SX3240(R)-M-01 Manual override (Press and turn for the locking type.)

5 Port Solenoid Valve Series SV1000/2000/3000/4000

) Min. bending radius 20 mm 2 B 2 B 2 B 2 B 71 1 P V 5 84.3 P 1 86.5 V 1 P 3 E 63.5 52.5 Individual SUP spacer Interface regulator SV2000--M1 Interface regulator SV2000--00 Individual EXH spacer 12 Max.21 (7.5) (81) (For DIN rail mounting) (When circular connector is mounted) 11.8 B B B B 145.6 127.6 A A A A B A B A B A B A L Dimension n: Stations L n 2 160.5 150 132.2 14 80 3 173 162.5 148.2

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

2 b 0.18 0.33 0.61 0.18 Cv VX2112-01 VX2122-01 VX2132-01 VX2112-02 VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03

Fieldbus system EtherCAT compatible SI Unit

(When L/A port1 LED is OFF.) LINK has not yet been established. L/A port1 or L/A port2 LEDs are OFF. (2) Check that the connectors of L/A port1 and L/A port2 communication cables are connected and there are no broken wires. (3) Keep noise sources away from the communication 9 cable.

Intrinsically Safe Valve

53-SY5000/7000 Dimensions: 53-SY5000 L-type plug connector (L) 53-SS5Y5-20Stations L1 71 (E-type) 59.5 10 L2 Manual override {1/8"} 16.5 11.5 4 x 4.5 (Mounting hole) 32.7 45.3 EA EB P EA EB P A B A B A B B A 32.7 76.8 32.3 30 L 166.2 21 21 153.6 60 16.2 20 6 x 1/4" {P(1), EA(5), EB(3) port} (Pitch) P = 16 1/8" {A(4), B(2) port} 22 (Lead wire length) Stations n 2 1 67 41.7 36.2 26.5 L-type

60

b o o n n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

29 5 50 70.5 30.5 18 12 29 5 50 86.5 39 23 14 35 7 61 86.5 39 23 14 35 7 61 B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01

Modular Design with Uniform Body Style

B B B AC20-D 1/8 1/8 M5 x 0.8 Width across flats 14 Width across flats 14 N.O.: Black N.C.: Gray B AC30-D to AC60-D B B B B B B Thread type/Rc, G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Barb fitting applicable tubing: T0604 1/4 1/4 1/4 Width across flats 17 Width across flats 17 Width across flats 17 Standard specifications Bracket mount P1 P2 A B C E F G J K M N Q1

4/5 Port Air Operated Valve Series SYJA3000

[111.8] R P R 63.8 (DIN 65.1) 63 (DIN 64.3) R P R B B B B B 122 [126.4] 19 19 19 60 31.5 22 A A A A A 1/4 (P, R port) 13.8 (For DIN: 15.1) 4-4.5 (For mounting) (Pitch) P = 20 29 Manual override (Station n) (Station 1) (Light/Surge voltage suppressor) + + + 73 [80] 57.6 A A 10.5 41 30.5 B B 6.5 (Pitch) P = 20 25 1/8 (A, B port) L plug connector (L) M plug connector (M) DIN terminal (D) M8

Rubber seal 5 Port Solenoid Valve Series SYJ5000

B B B B 21 7 35 17.5 A A A A A 20.9 (DIN 22.1) (DIN 6.7) 1/8 (P, R port) 3.5 5.5 (Pitch) P = 16 18 Built-in speed controller (Station 1) (Station n) Max. 13.5 47.5 (Light/surge voltage suppressor) 52.6 [59.6] + + + 37.2 A A 18.5 5.5 24 B B (Pitch) P = 16 23 M5 x 0.8 (A, B port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) 85.4 77.9 52.6 [59.6] 66.6 M8 x 1 57.1

Table of Contents

Maintenance Caution Model A B C D E Mounting dimension J H L K G F Port size Nominal size (B) ID200 240 240 320 320 1.

VZ3000

G H (Mounting hole) Manual override (Non-locking) (Mounting hole pitch) (Mounting hole pitch) (Lead wire length) G: 300 mm H: 600 mm (Piping port) (PE port) (Lead wire length) L plug connector (L) VZ3140-L-01 M plug connector (M) VZ3140-M-01 300 (Lead wire length) 300 : With light/surge voltage suppressor DIN terminal (D) VZ3140-D-01 Built-in speed controllers VZ3150Applicable cable O.D.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

plug connector (L): 10-SYJ72M-L-01 (-F) M plug connector (M): 10-SYJ72M-M-01 (-F) DIN terminal (D, Y): 10-SYJ72MD Y-01 (-F) M8 connector (WO): 10-SYJ72M-WO-01 (-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 65 31.5 [38.5] 57.5 Max. 10 16.1 46.2 M8 x 1 31.1 36 18.5 42.6 [49.6] Approx. 300 (Lead wire length) Pg7 80.5 [82.7] 70.7 [72.9] 90.5 89.6 72.2 65.7 49.7 23.5 10.9 23.5

Modular/F.R.L. Units Series AC

G46-2-02-L G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Round type Standard 0.02 to 0.2 MPa setting Standard 0.02 to 0.2 MPa setting Standard 0.02 to 0.2 MPa setting Pressure gauge Note 1) Round type (with color zone) Square embedded type Note 2) GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)]

Direct Operated

B L L2 L 12 L1 U M D side Stations n U side 1 2 3 4 5 300 280 X V R S 2 x E Mounting hole H L K J L (mm) n (stations) Model Dimension 3 168 156 218 200 4 204 192 264 246 5 240 228 310 292 6 276 264 356 338 7 8 348 336 448 430 9 384 372 494 476 10 2 L1 L2 L1 L2 96 84 126 108 132 120 172 154 312 300 402 384 VVX31 VVX32 VVX33 (mm) DIN terminal Electrical entry (DC, AC/Class H) A B C D E F

Base Mounted Metal Seal/Rubber Seal Series VQ

jetproof type (IP65) 1 station W Note 1) Insert L (top piping) or B (bottom piping) for elbow type.

Valve Single Unit

Manual override (Mounting hole for manifold) A: Orange B: Green (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 Polarity indication SX5220-01 G H (A, B port) 3 Rc 1/8 2-2.2 die-cast hole (P , EA, EB port) (For manifold gasket positioning) L plug connector (L): SX5220-LC4 C6 C8 M plug connector (M): SX5220-MC4 C6 C8 2-One-touch fittings (A, B port) 2-One-touch fittings Applicable

Air Fittings & Tubing

D1 Port B min. port size Weight (g) a b H (Hex.)