Metal Seal/Rubber Seal Series VQ Body Ported

In the internal wiring of F kit, P kit, J kit, G kit, T kit and S kit, double wiring (connected to SOL. A and SOL. B) is adopted for each station regardless of the valve and option types. Mixed single and double wiring is available as an option. 1.

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2 e u t 61 Exploded View of Manifold F kit P kit J kit G kit T kit L kit S kit M kit Construction Semistandard Housing assembly and SI unit no. No. Manifold Part no.

Table of Contents

8 w $4 t e $2 !5 $3 y!7 @8 !4 !

A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

60

t e e r r r r e e e e m m b b o o n n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.

Basic type / Direct mount type Series CY3B/CY3R

x E HA CB L 0 -0.1 T 4 x counter bore dia.

CLA

lor 9~re lock-<J GC GD ~ {o r> tAB ~ 01 9xhaust lockU>l: blank plug .H:h bre&li'lerj with Rod Boot p p p BN Z+ t+Stroke ZZ .. t f S f(Q/(e Stroke ra ~ (mmt ,-.ow "",.f I Bore size (mm) A DB BN BP BO DC 00 oE F GA GB GC GO GL GR J K LZ MM Without boot With boot 40 500 25-500 27 30 60 96 '/. y. 44 16 32 10 85 15 26 54 10 10 M8Xl.25 6 71 M14X1 .S 50 600 25-600 32 35 70 108 'I, 'I< 52 20 40 10

Magnetically Coupled Rodless Cylinder

B T Y L Depth ED T 4-LD PA K 4-MM Counter bore depth C Thread depth M F MX MTS QW PB MY CY N A E depth EK MG Q + Stroke G CX Z + Stroke Stroke adjustment screw LW (inner cover) DA A -X 20HP H HL HA HA HI Data TA TA R 4-J Depth JK Thread depth PC (from counterbore surface) 2-P 2-Counterbore dia.

/

IN OUT M M 1 2 x P 1 (IN), 2 (OUT) port 2 x P 1 (IN), 2 (OUT) port F I J K L I F J (D) DIN terminal: D Conduit terminal: T E (U) (V) E V U 32 31.5 25 (44) G1/2 T T G1/2 M M Cable 6 to 12 2 x P 1 (IN), 2 (OUT) port 2 x P 1 (IN), 2 (OUT) port I F J I F J With bracket 1 f 2.6 Bracket e 2 x 8.5 b a d (mm) Electrical entry Bracket mounting dimension Grommet Model Port size P Conduit DIN terminal

Modular Type Filter Regulator Series AW

t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

AC Servo Motor Driver (Pulse input type/Positioning type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 * : J Z j z 1 0 1 1 11 + ; K [ k { 1 1 0 0 12 , < L l | 1 1 0 1 13 = M ] m } 1 1 1 0 14 . > N ^ n 1 1 1 1 15 / ?

CG5-S

q o i r y t !

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model For AC10*-A For AC20*-B For AC25*-B For AC30*-B For AC40*-B For AC40*-06-B For AC50*-B For AC55*-B For AC60*-B Descriptio Round type Standard G27-10-R1 G36-10-01 G46-10-01 Note1) Pressure gauge G27-10-R1 G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

A2 ASP T ASN T AQ ASV Inch Size AK L4 L5 (1) A1 (2) A2 (2) M1 Max.

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) P kit Flat ribbon cable connector (26P) J/G kit T kit Terminal block (VQ1000, 24 terminals) T kit Terminal block (VQ2000) M kit Stations L kit (VQ1000/2000): 3.

LEC-OM02704CN

X E T X ( ) * S T X E T X ( ) 6 =A =A (2) 10 S O H S T X E T X ( ) S T X E T X ( ) * 6 ( ) (3) EOT neutral EOT () E O T () (4) o r o r 1 2 or 16 4 8 14 5 14 14.3.2 (1) 16 (ASCII) () SOH STX ETX EOT 01H 02H 03H 04H start of head() start of text() end of text() end of transmission() ctrlA ctrlB ctrlC ctrlD (2) ASCII b8 0 0 0 0 0 0 0 0 b7 0 0 0 0 1 1 1 1 b6

V

n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

AC Servo Motor Driver (Network card type ）

Actual speed t New set-point (bit 4) t Target position (set-point) t Profile velocity t Current target position processed t Set-point acknowledge (bit 12) t Target reached (bit 10) t (5) Set of set-points After the current positioning operation is completed, the next positioning is started.