OMU0023

response Start ID Note 2) Error function Check Details of sum End code error ) T1-T2-T3-T4 1 byte 1 byte 1 byte 2 bytes T1-T2-T3-T4 The MSB of the function code is Problems 3.5 character code Note 5) CRC 3.5 character times Note 1) 01 FF times Note 1) changed to 1.

Compact Cylinder with Air Cushion Series RQ

Material: Chrome molybdenum steel (Nickel plated) mm Bore size (mm) YA 03 B D E F M T1 T2 Part no.

Compact Cylinder with Air Cushion

24 31 24 55 24 31 64 72 Y-G10 22 32 100 79 Knuckle pin and snap ring are included.

RQ

24 31 24 55 24 31 64 72 22 32 79 Knuckle pin and snap ring are included.

Valve Single Unit

Connector block assembly (For 9 to 17 stations (T1) terminal block) t-6 SX5000-64-8A SX3000-64-8A M3 x 30 (Matt nickel plated) SX3000-22-2 (M2 x 24) SX5000-57-6 Round head combination screw y Gasket DIN rail SX3000-57-4 VZ1000-11-1u i Refer to page 1-6-77. Note) The numbers t1 to 4 are for 24 VDC. For 12 VDC, suffix -12V to the parts no.

Valve Single Unit

Connector block assembly (For 9 to 17 stations (T1) terminal block) t-6 SX5000-64-8A SX3000-64-8A M3 x 30 (Matt nickel plated) SX3000-22-2 (M2 x 24) SX5000-57-6 Round head combination screw y Gasket DIN rail SX3000-57-4 VZ1000-11-1u i Refer to page 1-6-77. Note) The numbers t1 to 4 are for 24 VDC. For 12 VDC, suffix -12V to the parts no.

Electric Actuator

Time [s] Method 2: Calculation T1 T2 T3 T4 T5 Cycle time T can be found from the following equation. T6 T = T1 + T2 + T3 + T4 [s] Calculation example) T1 to T4 can be calculated as follows. L : Stroke [mm] V : Speed [mm/s] a1: Acceleration [mm/s2] a2: Deceleration [mm/s2] T1 and T3 can be obtained by the following equation.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

JXCx-OMT0034CN

STATION No (X10) 161 (x10) STATION No (X1) (x1) B RATE IF CC-Link F D C 10Mbps B 5Mbps A 2.5Mbps 230.4kbps 9 625kbps 8 156kbps 7 5 4 10Mbps 3 5Mbps 2 2.5Mbps 115.2kbps 1 625kbps 0 156kbps B RATE 1(LEC-T1)IF 115.2kbps 2 15 - 4.2 (CN2SW) CC-Link (CN2SW)CC-Link (CN2SW) () PC/TB (CN2)(LEC-T1-)(LEC-W2)(LEC) (CN2SW)CC-Link (LEC) 16 - 4.3 (LEC) (LEC)(LEC-T1-) (LEC-W2)(LEC) (LEC)(LEC)(

Environment

L Speed: V [mm/s] Cycle time T can be found from the following equation. a1 a2 T = T1 + T2 + T3 + T4 [s] T1: Acceleration time and T3: Deceleration time can be obtained by the following equation. Time [s] T1 = V/a1 [s] T3 = V/a2 [s] T1 T2 T3 T4 T2: Constant speed time can be found from the following equation.

JXCx-OMT0061CN

LED . 28 8.1 LED . 28 8.2 LED . 28 9. . 29 9.1 . 29 9.2 No. . 29 9.3 / . 29 9.4 . 30 9.5 . 30 10. . 32 10.1 . 32 11. . 47 11.1 . 47 11.2 . 50 11.3 . 52 11.4 . 53 12. . 54 12.1 . 54 12.2 . 54 12.3 . 55 (1) . 55 (2) () . 55 (3) . 55 12.4 . 56 12.5 . 56 13. () . 57 13.1 . 57 13.2 . 58 14. . 59 14.1 . 59 14.2 No. . 59 [1] . 59 [2] . 60 2 - [3] . 61 [4] HOLD . 61 [5]

10

) 51.5 (59.5) 55 1 2 52.5 55 57.5 57.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 47.5 50 52.5 52.5 36 (41.5) 47 (55) 51.5 (59.5) 55 3 ( ): Denotes the Normally Open (N.O.) dimensions.

7

, T1 = 297 5K, 0.07 bar P 0.14 bar.

Compact Cylinder with Lock Series CLQ

M26 x 1.5 24 31 100 I-G10 22 32 79 21 44 55 M26 x 1.5 24 31 22 Applicable bore size (mm) Applicable pin part no.

Series SV

SX5000-57-6 SX3000-146-2 SX5000-138-1 SV2000-55-1SV2000-55-2A SV2000-21-1 (M3 x 30) VZ1000-11-1SV1000-69A SX7000-57-5 SX3000-146-2 SV3000-65-1 SV3000-55-1SV3000-55-2A SV3000-21-1 (M4 x 35) VZ1000-11-4SV3000-69A SX3000-57-4 SX3000-146-2 SX3000-181-1 SV1000-55-1SV1000-55-2-1 SX3000-22-2 (M2 x 24) VZ1000-11-1SV1000-69A SY9000-11-2 SX3000-146-2 SV4000-65-1 SV4000-55-1SV4000-55-2A SV2000-21-2

AC Servo Motor Driver

And also, design the enclosure so that the ambient temperature in the enclosure is 55 (131 ) or less, refer to the spec manual.

ZSE1/ISE1

15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port M5 x 0.8 depth 5 Piping port 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 16-6-5

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 777

Electric Actuators

Speed:V [mm/s] a1 a2 Reaches the target position T = T1 + T2 + T3 + T4 [s] P T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.