Vacuum Unit

P A Ejector system, Vacuum pump system, Individual wiring manifold, With supply valve/release valve, Without pressure sensor/switch L4 L3 L2 L1 1.5 DIN rail mounting bracket Option symbol (-B)5 5 3.8 79 (Ejector system) 84 (Vacuum pump system) 4 x M4 Mounting hole 5.5 10 DIN rail clamping screw (When Option -B is selected)5 1.3 4.6 2 x Common pilot pressure supply (PS) port1 (5.3) (35) (L5

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

L6 A Note) Model Applicable tubing O.D. d H Weight (g) D L1 L2 L3 L4 L5 M T Min. Max. Min.

0.4

center Nil None Port 4(A) Port 2(B) kit 2(B) (A)4 A B 4 (R1)5 1 (P) 3(R2) L Cylinder port 3 position pressure center kit 2(B) (A)4 Symbol Port size Port location 5 With One-touch fittings for 3.2 With One-touch fittings for 4 With One-touch fittings for 6 M5 thread With One-touch fittings for 3.2 With One-touch fittings for 4 With One-touch fittings for 6 M5 thread C3 C4 C6 M5 L3 L4 L6 L5

240

[mm] L5 [mm] L5 [mm] L5 [mm] m 100 100 100 100 Wall Y L5 50 50 50 50 0 0.2 0.4 0.6 0.8 1 0 0 0 0 0 0.2 0.4 0.6 0.8 1 0.0 0.4 0.8 1.2 1.6 2.0 Work load [kg] 0.0 0.4 0.8 1.2 1.6 2.0 Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 160 160 160 160 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 120 120 120 120 Z 80 80 80 80 Me m 40 40 40 40 0 0.2 0.4 0.6 0.8 1 0 0 0.2 0.4 0.6 0.8 1 0 0.0 0.4

Integrated Controller

[mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm] L5 [mm] L5 [mm] L5 [mm] Bottom m Me 600 600 1000 1000 Y L5 400 400 500 500 200 200 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 1000 1000 800 800 1500 1500 L6 [mm] L6 [mm] L6 [mm] L6 [mm] L6 600 600 m Me 1000 1000 Z 400 400 500 500 200 200 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30

Support Guide/11-LEFG Series

[mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

(1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L5 (1) A (2) D3 L4 Max.

Title not found

P2, L5 RT3-3-1 S/S . P2, L5 RT3-1-3 S/S . P2, L5 RT1-3-1 S/S . P2, L5 X1 S/S . P3, L10 1 2 1 2 1/2 B Thd D A Thd C Hole Dia. Stainless Steel Threaded Parts Page & Part No. Line No. Page & Part No. Line No. D Line No.

Table of Contents

Controller model Mounting screw Mounting bracket assembly LC1-1H-N3 M3 x 0.5 LC1-1-N3 Power terminal: TB LC1-1H-N5 M5 x 0.8 LC1-1-N5 LC1-1H-L3 M3 LC1-1-L3 LC1-1H-L5 M5 LC1-1-L5 Communication connector: CN3 Motor power line connector: CN5 Mounting with T-nuts Regenerative absorption unit connector: CN6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Dedicated Controller

Controller model Mounting screw Mounting bracket assembly LC1-1H-N3 M3 x 0.5 LC1-1-N3 Power terminal: TB LC1-1H-N5 M5 x 0.8 LC1-1-N5 LC1-1H-L3 M3 LC1-1-L3 LC1-1H-L5 M5 LC1-1-L5 Communication connector: CN3 Motor power line connector: CN5 Mounting with T-nuts Regenerative absorption unit connector: CN6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Electric Actuators

General purpose input/output connector: CN2 LJ1 LG1 LC1 LX LC6D/LC6C Switches Controller model Mounting screw Mounting bracket assembly M3 x 0.5 LC1-1-N3 LC1-1-N3 Power terminal: TB M5 x 0.8 LC1-1-N5 LC1-1-N5 M3 LC1-1-L3 LC1-1-L3 M5 LC1-1-L5 LC1-1-L5 Communication connector: CN3 Motor power line connector: CN5 Mounting with T-nuts Regenerative absorption unit connector: CN6 Controller Command

Electric Actuator with Integrated Guide

Controller model Mounting screw Mounting bracket assembly LC1-1H-N3 M3 x 0.5 LC1-1-N3 Power terminal: TB LC1-1H-N5 M5 x 0.8 LC1-1-N5 LC1-1H-L3 M3 LC1-1-L3 LC1-1H-L5 M5 LC1-1-L5 Communication connector: CN3 Motor power line connector: CN5 Mounting with T-nuts Regenerative absorption unit connector: CN6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

AK Applicable tubing O.D. d L2 L3 M Inch size ASS ASR D2 L1 ASF T2 L4 H1 H1 (Hexagon width across flats) (Hexagon width across flats) H2 H2 (He (Hexagon width across flats) xagon width across flats) (Hexagon width across flats) D3 A1 L5 D1 A2 T1 Inch Size L4 Weight (g) d T1 D1 A2 A1 D3 M L3 L2 L1 H1 H2 D2 Max. Min.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

D3 D2 L1 Connecting thread T L2 Uni thread H D1 D2 L1 L2 L5 A Max.

Air Fittings & Tubing

N FA FB L1 L3 L4 L5 L6 P Q1 Q2 MA MB L2 65 40 61.5 47 73 55 86 19 26 29 39 41 57 KM11-04-08-6 6 10 18 29.5 19.5 27 12 16 18.5 6 10.6 8 4 KM11-04-08-10 10 86 KM11-06-10-6 6 76 KM11-06-10-10 10 102 10 19.5 31.5 21.5 31 13.5 17 21 7.5 13 10 6 KM11-08-12-6 6 85 KM11-08-12-10 10 116 11.5 22.5 35.5 24 34.5 14.7 18.5 22 9 15.5 12 8 SKM, #1 to #6 KM12 Thread Rc(PT) T Part No. N H (Hex.)

F

L6 P Q1 Q2 MA MB Mass (g) KM11-04-08-6 6 65 40 22 4 8 10 18 29.5 19.5 27 10.6 12 16 18.5 6 KM11-04-08-10 10 86 61.5 30 KM11-06-10-6 6 76 47 32 6 10 10 19.5 31.5 21.5 31 13 13.5 17 21 7.5 KM11-06-10-10 10 102 73 44 KM11-08-12-6 6 85 55 44 8 12 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 22 9 KM11-08-12-10 10 116 86 62 L5 FB N L1 L2 L3 L4 L6 P Q1 Q2 MA MB FA B Port Min Weight Model Inside Dia (g

ISA2

Electrical entry dimensions Left Right Right angle Straight union n Stations 1 Stations L1 L2 L3 L4 L5 1 46 62.5 73 2 84 38 120 135.5 3 122 38 76 162.5 173 4 160 76 114 200 210.5 5 198 114 152 237.5 248 6 236 152 190 275 285.5 63 (Max. 65) 41 32.2 The direction of a right angle connector cannot be changed.

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

1 2 3 5 6 9(1) 100V AC(50/60Hz) 200V AC 110V AC 24V DC 12V DC Other voltage Note)Coil voltage 100V AC: With surge voltage suppressor Note)"YOZ" is not available Electrical entry G Y YO Grommet DIN connector DIN terminal (Without connector) Note 1) Consult SMC for other voltages. 4.3-11 Series VQ20/30 Dimensions Plug lead unit manifold (VV2Q22) Equation L1= (n1) X 29+49 L2=L110 L3=L410.5 L5

Vacuum

734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirensio Pad Diameters @2 . s4 . Q6 ' oB Pad Diameters @10. a13. @16 Flat type Flat type Flat with rib Deep typezPRloD . l6D only Flat type Applicable Tube Male Thrcad/Weight List (sr) Flat type .