Modular F.R.L. Unit

06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Note 6) Pressure switch with piping adapter 02 03 04 IS1000E-40 Note 6) Y24-01 02 Y34-01 02 Y34-01 02 Y44-02 03 Y54-03 04 Y14-M5 Cross interface Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

KR

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Plug: KRP Applicable fitting size d Model T A Weight (g) L D KRP-08 KRP-06 6 1 2 3.5 5 KRP-10 KRP-12 8 35 16 10 39 18.5 12 43 20 14 46 22 VMG 8 10 12 Applicable fitting Spatter Cover 1: KR (Applicable tube: FR soft nylon) Applicable fitting size Model Weight (g) D L KR-08C KR-06C 6 0.9 1.0 1.5 1.6

Modular F.R.L. Units

Outlet pressure MPa Existing model New Conditions AR20-02-A AR20-02-A AR20-02 New New 0.3 Inlet pressure: 0.5 MPa Outlet pressure: 0.3 MPa Flow rate: 500 L/min (ANR) New New AR20-02-A AR20-02 500 Flow rate L/min (ANR) Replacement in hand!

Modular/F.R.L. Units Series AC

J C 2 A E EE D DD With Auto Drain PANEL FITTING IN OUT Z CC AA K L V U X W T S Y Q F H Bracket and Mounting Nut (Optional) IN OUT J C 2 A E D DD 7 Series AR20~40 Regulator How To Order AR 20 N 02 B Y Z X48 Regulator With External Epoxy Coating, Stainless Fasteners Name Plate, Caution Plate On Bowl in psi, F Body Size Symbol 20 30 40 Size 1/8 3/8 1/2 Handle Orientation Symbol Nil Y Description

/

Conduit terminal U 100.5 E J D I M A C H L B F K N.C.

0.4

Note) ( ): VVQ1000-NC-n Dimensions Blanking plug (For one-touch fittings) A L D Model Applicable fitting size d A L D Model Applicable fitting size d KQ2PIt is inserted into an unused cylinder port and SUP/EXH ports. Purchasing order is available in units of 10 pieces.

KP/KPQ/KPG

M L 8 12 KPQL12-00 KPGL12-00 31.4 7.5 25 50 40 20 20.9 Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

Elbow: KPL D 2-Applicable tubing Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS M M L Q L Q 20.7 4.5 18 3.5 3.5 3 10.4 KPL04-00 4 22.8 5.3 19.5 9 9 7 12.8 KPL06-00 6 D 26.3 6 21.5 22 15 11 15.2 KPL08-00 8 4.2 29.4 6.8 24 35 25 16 18.5 KPL10-00 10 M 8 31.4 7.5 25 50 40 20 20.9 KPL12-00 L 12 Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

Elbow: KPL D 2-Applicable tubing Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS M M L Q L Q 20.7 4.5 18 3.5 3.5 3 10.4 KPL04-00 4 22.8 5.3 19.5 9 9 7 12.8 KPL06-00 6 D 26.3 6 21.5 22 15 11 15.2 KPL08-00 8 4.2 29.4 6.8 24 35 25 16 18.5 KPL10-00 10 M 8 31.4 7.5 25 50 40 20 20.9 KPL12-00 L 12 Note 1) D indicates the maximum diameter.

VZS

8, 1/4 VQ7 ( ): Rc 1/8 EVS L plug connector 2 position double: VZS3250-L(Z)-01 02 3 position closed center: VZS3350-L(Z)-01 02 3 position exhaust center: VZS3450-L(Z)-01 02 3 position pressure center: VZS3550-L(Z)-01 02 K plug connector 2 position double: VZS3250-KZ-01 02 3 position closed center: VZS3350-KZ-01 02 3 position exhaust center: VZS3450-KZ-01 02 3 position pressure center: VZS3550

A

Y L E Air Pressure H Air Hydro (The available Air Hydro Bore Sizes: 20 ~ 100 CQ2 only) B O R E S I Z E S ( M M) 12 16 20 25 32 40 50 63 80 100 H O W T O O R D E R D O U B L E A C T I N G D O U B L E R O D S TA N D A R D S T R O K E Bore Size Air Pressure Type Air Hydro Type 12, 16 5, 10, 15, 20, 25, 30 20, 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 32, 40 35, 40, 45, 50, 75, 100 30, 35,

Stainless Steel 316 Fittings

31.7 35 40.5 M L Q A D N M O L Q Note 1) D is maximum diameter.

Intrinsically Safe Valve

(LL) 53-SY5 20-LL-01 (-F2) 3 4 5 L (Lead wire length) 156 Insulator: Red (+) Insulator: Black () 5.9 4.1 0.3 mm2 14.7 12 84.3 Terminal type (TT) 53-SY5 20-TT-01 (-F2) 3 4 5 Max. 10 L (Lead wire length) 189.6 Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 101.1 7 Body Ported Series 53-SY5000/7000/9000 Dimensions: 53-SY7000 2-position single L-type plug connector (L) 53-SY7120-L-02 (-F2) With

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

SYJ300/500/700

20 X S070 1/4, 1/8 (P, R port) 23 15 48 VQ VKF VQZ L plug connector (L): SYJ74-LM plug connector (M): SYJ74-M01 02 01 02 DIN terminal (D): SYJ74-D01 02 M8 connector (WO): SYJ74-WO01 02 VZ VS VFN Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 89.6 Max. 10 58 [65] 91.5 84 42.6 62.5 72.7 M8 x 1 45 69.1 [76.1] Approx. 300 (Lead wire length) Pg7 80.6 [82.8] 90.6 70.8 [73] 79.7

0.55

1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 stations 20 Manifold Option Description Part no.

KQ2

(mm) 3.2 4 6 Mass (g) D 2 x applicable tubing Model D L Q M KQ2L23-00 KQ2L04-00 KQ2L06-00 3 6 6 9.6 10.4 12.8 17.5 18 20 4.3 4.5 5.3 15.5 16 17 3 4.2 11.4 2.5 4.2 9.0 8 KQ2L08-00 15.2 23 6 18.5 21.6 14.9 10 10 KQ2L10-00 18.5 26.5 6.8 21 35.2 25.0 17 D 12 KQ2L12-00 20.9 28.5 7.5 22 50.2 39.7 21 16 KQ2L16-00 26.5 34 10 25 100 (84) 29 8 4.2 Note 1) D: Max. diameter Note 2) ( ): Valves for soft

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Air Fittings & Tubing

D Nylon Urethane Effective area (mm2) (1) Weight (g) M L Q 16 17 6.4 13.4 4.4 10.6 9 13 4 6 KQ2TW04-00 KQ2TW06-00 10.4 12.8 18 20 8.7 9.9 8 KQ2TW08-00 15.2 23 11.1 18.5 25.6 17.7 20 Kl 10 KQ2TW10-00 18.5 26.5 12.8 21 40 28.4 33 12 KQ2TW12-00 20.9 28.5 13.9 22 57.4 45.4 39 Ml Note1) D: max. diameter Hl Dl Different diameter cross: KQ2TX MS Tube O.D. (mm) Part No.

7.5

SJ3000-42-1A-l SJ3000-42-2A-l SJ3000-42-3A-l SJ3000-42-4A-l SJ3000-42-6A-l SJ3000-42-5A For D-sub connector For flat ribbon cable 26 pins For flat ribbon cable 20 pins m: 1 (Connector upward) For flat ribbon cable 10 pins D side m: 2 (Connector lateral) For PC wiring 20 pins For EX180 serial wiring Note) For PC wiring 20 pins with power supply terminal SJ3000-76-2A-05 Note) SI unit is not