Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY C L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (
P1 (D-sub 25P female) Cap P2 (D-sub 9P female) P3 (D-sub 9P male) Not used. (Only for maintenance) Power cable Contact signal cable Serial RS-485 communication cable Figure 3-10 Power Cable Insertion and Communication Cable Connection Correct phase rotation is required when attach the power cable to the breaker terminal.
Use assistance to carry object over 20 kg.
20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.
20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.
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.) < Applicable Auto switches > Solid state auto switch D-M9N(V)M9P(V)M9B(V) D-M9NW(V)M9PW(V)M9BW(V) D-M9NA(V)M9PA(V)M9BA(V) Reed auto switch D-A90(V)A93(V)A96(V) Figure 4.
As a guide, turn 90 from the position where it comes to feel tight. 12 < Applicable Auto switches > Solid state auto switch D-F59F5P D-J59J51F5BAL D-F59WF59PWJ59W Reed auto switch D-A53A54A56A64A67 D-A59W Fig.5 Mounting and movement of the auto switch (1) Fix the auto switch on the auto switch mounting bracket with the auto switch mounting screw (M4) and install the set screw. (2) Fit the
[January 2018] D: Contents are added. [March 2018] E: Contents revised in several places. [June 2018] F: Contents revised in several places. [October 2018] G: Contents revised in several places. [March 2020] H: Contents revised in several places.
Body Size: 20, Semi-Standard: 6L (0.1 to 0.6MPa; 3m Lead Wire; MPa)
Resistance(MPa): 1, Operating Temperature Range(°C): -5～60, Number of Inputs: 1, Number of Outputs: 1, Pipe Connection Direction: [Down] Down, Mounting Hole: Presence, Display: No, Lamp: Presence, Lead Wire: 3 m, Hysteresis(MPa): Fixed 0.08 or less, Pressure Setting Range: 0.1 to 0.6 MPa, Liquid contact parts seal material: Without sealing material, Scale plate pressure unit: MPa, Body size: 20
[March 2020] D: Contents revised in several places. [August 2021] E: Contents revised in several places.
((Refer to page 53) ((Refer to page 24) (Refer to page 20) (Refer to page 22) : The outputs will continue to operate during setting. : If a button operation is not performed for 30 seconds during the setting, the display will flash.
D The setting time from when the pressure applied to the pressure switch reaches the set value, to when the ON-OFF output actually begins working. Delay time setting can prevent the output from chattering. Delay time Shows how precisely the pressure can be displayed or set by the digital pressure switch.
Note Bracket A ZS-50-A Interchangeable with ISE70 With 2 mounting screws (M4 x 6L) Bracket B ZS-50-B With 2 mounting screws (M4 x 6L) Lead wire with M12 connector: Straight ZS-31-B Lead wire length: 5 m Lead wire with M12 connector: Right-angled ZS-31-C Lead wire length: 5 m 6 ISE70/71 Series For pressure switch precautions and specific product precautions, refer to the Operation Manual on
Bracket A Bracket B [F 0] Display units, switch output specifications and diagnostic information selection function ISE70(G): 0.500 MPa/ISE71: 0.800 MPa/ ISE75G: 1.000 MPa/ISE76G: 2.50 MPa/ ISE77G: 5.00 MPa/ISE78G: 8.00 MPa Pressure setting Cross recessed round head screw: Nominal size M4 x 6L Cross recessed round head screw: Nominal size M4 x 6L Item Default setting ISE70(G): 0.050 MPa/ISE71
Style: Pressure Switch, Body Size: 30 (AC30), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa, Body Type: Standard
Style: Pressure Switch, Body Size: 40 (AC40), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa, Body Type: Standard
Style: Pressure Switch, Body Size: 60 (AC50, AC60), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa, Body Type: Standard