Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Unit: g Model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Auto Switch Dimensions Auto Switch Internal Circuit D-M9 M2.5 x 4l mounting hole Slotted set screw Indicator light D-M9B, N, P D-M9N DC(+) Brown 2.6 Main circuit of switch Main circuit of switch Main circuit of switch OUT Black 2.7 2.8 4 22 DC(-) Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC(+) Brown 22

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

20 209 up to 600 14 17 221 15 194 206 30 20 209 U up to 750 22 26 287 23 246 264 42 30 269 CX L RR up to 750 22 26 287 23 246 264 42 30 269 Z + Stroke ZZ + Stroke Double clevis(D)/Locking at head end (Hl) Wl Hl/ Rl (mm) Port Cushion valve Stroke range Bore size (mm) +0.3 +0.1 CDH10 U Z RR CZ Z L CX ZZ ZZ CDH10 32 40 50 63 80 100 up to 500 10 13 162 10.5 28 170 23 14 172.5 180.5 up to 500

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

30 10.5 11 15 15 23 23 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 10 10 14 14 22 22 23 23 30 30 42 42 U CX L Z + Stroke RR ZZ + Stroke Double clevis/(D) Port Cushion valve Double clevis CDH10 (mm) Bore size (mm) Stroke range H10 CX +0.3 ZZ Z U RR L CD +0.1 CZ 32 40 50 63 80 100 164.5 169 197 197 251 251 154 158 182 182 228 228 13 13 17 17 26 26 14 14 20 20 30 30 10.5 11

ITV

V, 30 mA PNP open collector output: Max. 30 mA Switch output Within 1% (full span) Within 0.5% (full span) Within 0.5% (full span) Within 0.2% (full span) Within 0.12% (full span)/C 3% (full span) MPa: 0.01, kgf/cm2: 0.01, bar: 0.01, PSI: 0.1 , kPa: 1 Linearity Hysteresis Repeatability Sensitivity Temperature characteristics Accuracy Minimum unit Output pressure display Note 4) Rated pressure

70pvpump

LVD PAX1000, PA3000, PA5000 LVQ Proper tightening torque (Nm) Connection threads Rc 1/4 12 to 14 LQ Rc 3/8 22 to 24 LVN Rc 1/2 28 to 30 Rc 3/4 28 to 30 TI/ TIL 3. Ensure space for maintenance. When installing and mounting, be sure to allow the space required for maintenance and inspections. Confirm the necessary maintenance space in the instruction manual for each piece of equipment.

Style: Pressure Switch with Piping Adapter, Body Size: 40 (AC40), Thread Type: F (G), Port Size: 03 (3/8), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa, Mounting: Right

Air Pilot Operated Series NVSA

E 6 \ ao ih'/ \ &d-bbr* jli.rion bor Mr !l!9@ !ryrq! l r"d lrtu (drd.d rrr rd 6l l u?qq''3. T!4qr'3.I rro9 b llia' rub. Bb ud rid @orral 'e d jsdM br prol .8, 'l xc (., d.r.it 6 Dd i.) ror bd no iincloi hr tror cMedoi. conrr.l. or ddr r3, (.) d.dr q (3) fi' r?rF nurh prus., T Pslro T xroc.3 T pb10. T xnG3 | ri.!l(._r,vrbodylo!'lo'|n. T I g.Prhr eql-tsPd ,utdroi bor c9{r Fibt M .'

q"s

I { 0 s l I l 6 l ; D.0 t' 6 l 0.6 0.5 o.4 0.3 6 ' ) !

Precision Regulator

Modular adapter IR-X170 ARJ AR425 to 935 ARX AMR ARM Applicable modular size IR1000 series: 20 type IR2000 series: 30 type IR3000 series: 40 type ARP IR-A 1 The Made-to-Order product (IR-X170) is the product number with a modular adapter attached to the standard product.

IR1000/2000/3000

Printed in Japan. 1st printing October, 1998 D-SMC.L.A. P-84.5 (YG)

Process Pump

40 50 5 0 10 15 20 25 Discharge rate (L/min) Discharge rate (L/min) PAF3410 Air Consumption PAF5410 Air Consumption 200 SUP = 0.5 MPa 300 SUP = 0.5 MPa Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 0 10 15 20 25 5 0 20 30 40 50 10 0 Discharge rate (L/min) Discharge rate

ISE70_71-AB.eng

If the sub display is switched during the arbitrary display setting, the display will be returned to the arbitrary display 30 sec. later. (The default setting does not include arbitrary display.)

•

As a rule, it should be tightened an additional 15 to 30 apply pressure evenly around Ihe collar so that il goes slraighl down. 2. Pull out the tube while holding down the release bushing so Ihat il does not come out.

Style: Pressure Switch with Piping Adapter, Body Size: 30 (AC30), Thread Type: N (NPT), Port Size: 03 (3/8), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa, Mounting: Right

Style: Pressure Switch with Piping Adapter, Body Size: 30 (AC30), Thread Type: Rc, Port Size: 03 (3/8), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa, Mounting: Right

Style: Pressure Switch with Piping Adapter, Body Size: 30 (AC30), Thread Type: N (NPT), Port Size: 02 (1/4), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa, Mounting: Right

Body Size: AC30, Thread Type: NPT, Port Size: 3/8, Set Pressure Range: 0.1 to 0.6 MPa, Lead Wire Length: 3m, Pressure Unit of the Scale Plate: MPa, Mounting: Right

Body Size: AC30, Thread Type: Rc, Port Size: 3/8, Set Pressure Range: 0.1 to 0.6 MPa, Lead Wire Length: 3m, Pressure Unit of the Scale Plate: MPa, Mounting: Right

Body Size: AC30, Thread Type: NPT, Port Size: 1/4, Set Pressure Range: 0.1 to 0.6 MPa, Lead Wire Length: 3m, Pressure Unit of the Scale Plate: MPa, Mounting: Right