EXxx-OMY0006CN

SF LEDBF LED Table 10-19 SF / BF LED SF BF SI SI Device name IP GSD -PROFIsafe SI F(2Hz) --(0.5Hz) --(Acknowledgement) (Commissioning Mode ) --10.9.1.2. US1 LED Table 10-20 US1 LED US1 US1 17V US1 17V20.4V US1 (21.6V ) 10.9.1.3.

5 Port Solenoid Valve SY Series

Caution 3 5 7 SX 000-16-1A (with mounting screw) 3 5 7 SY9000 has no bracket.

PSxx-OMM0006CN

] <> (50)(50) [UnL] 5 [000] / 1 / ( ) 1 (/30 ) -51No.PS-OMM0006CN-E , (1015 ) <> 5 UnLLoC 5 5 (30) 5 000 (30) 51/ 1 -52No.PS-OMM0006CN-E ZSE40A(F)/ISE40A ( ) No.1 ON ON OFF Yes No.2 No ON OFF No.1 OFF No.3 No.4 No.5 () No.6 No.7 -53No.PS-OMM0006CN-E No.8 Yes No No.9 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 No.17 No.18 No.19 -54No.PS-OMM0006CN-E No.

PSxx-OMM0002CN

] <> (40)~(40) [UnL] 5 [000] / 1 / ( ) 1 (/30 ) -41No.PS-OMM0002CN-F , (1015 ) <> 5 UnLLoC 5 5 (30 ) 5 000 (30 ) 41 / 1 -42No.PS-OMM0002CN-F ZSE80(F)/ISE80(H) ,, (), No.1 ON ON OFF Yes No.2 No ON OFF No.1 OFF No.3 No.4 No.5 No.6 No.7 -43No.PS-OMM0002CN-F No.8 Yes No No.9 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 No.17 -44No.PS-OMM0002CN-F No.

CNS

RY E V FT VA AL A K F BN N N RT M C B FX FZ H S + Stroke ZZ + Stroke Bore size (mm) Stroke range (mm) FD FX A AL B BF BN BP BQ C D E EA F FA FT FY FZ G GA 125 140 160 16 Up to 1400 50 47 145 145 205 1/2 3/8 115 36 90 63 35 14 19 14 190 100 230 155 16 Up to 1400 50 47 161 160 245 1/2 3/8 128 36 90 63 35 14 19 20 212 112 255 180 18.5 Up to 1400 56 53 182 180 290 1/2 3/8 144 40 90 63 43 14

Cylinder with Lock Series CNS

V FT VA AL A K F BN N N M C B FX FZ H S + Stroke ZZ + Stroke With rod boot 75 15 40 l h + l ZZ1 + l + Stroke Long strokes Rc(PT) BQ Plug with breathing hole BC element M GA T 4-J Width across flats KA 2-Rc(PT) P Cylinder port G G Rc(PT) BP Unlocking port GL GR GB 4-FD FA MM Q FY BF D EA RY E V FT VA AL A K F BN N N RT M C B FX FZ H S + Stroke ZZ + Stroke (mm) Bore size (mm) Stroke range

EX600-SPRA_eng

Red BF LED is On The communication with the master has been established, but a diagnosis error has occurred. Red SF LED is On x10 x1 LED display LED display Off Off URL http://www.smcworld.com PWR(V) Display ST(M) PWR BF Displays bus fault. SF for 2 hours each in direction X, Y and Z respectively (De-energized) Displays system fault.

EX500-GPR1A.eng

BF LED is turned on 2 Check the signal line from PLC is connected correctly. Check the wiring and pin number. Check the address setting is correct. Check the bus terminator setting. RUN LED is turned off 1 Check the power for input and control ( DC24V ) is supplied.

CL

e MLU ML1C Plug cap 2 positions l h + l ZZ + l + Stroke S + Stroke ZZ + Stroke D-X 20Data Stroke range (mm) Bore size (mm) A AL B B1 BF BX BY C D BP EA EB F FA FD FT FX FY FZ FV GA GB GC H1 Without rod boot Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 Up to 1000 Up to 1000 Up to 1200 With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 1

CL

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA 125 to 160 CNS CLS With rod boot A Rc BP lock-up port Unlocked when pressurized CLQ GC B Rc BP lock-up port 4-FD 4-J 2-Rc P MLGP RLQ BF e MLU ML1C Plug cap 2 positions l h + l ZZ + l + Stroke S + Stroke ZZ + Stroke D-X 20Data Stroke range (mm)

CLS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-FD MM BZ GB lRY EA BF FY D E W AL FT C B M A K F RT N N FX FZ BY S + Stroke H ZZ + Stroke BW With rod boot 180, 200, 250 BZ BV e BG BE f l 15 h + l 4-MA Effective thread depth MB (To attach eyebolt) ZZ1 + l + Stroke Bore size (mm) Stroke range (mm)

CNG

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Rc P 4-FD Width across flats KA Width across flats B1 CNA GB Head side cylinder port PH MM CNS FY 0.15 E 0 0.05 BZ BC BF D I CLS H1 CLQ AL C 0.1 FX 0.15 8-J BN FT A K S + Stroke H ZZ + Stroke F FZ NA MLGP BC RLQ MLU e ML1C DZZ + l + Stroke h + l f 8 l

CNG

D I H1 AL C0. 1 FX 0. 15 8-J A K S + Stroke H ZZ + Stroke F BN FT FZ NA BC e ZZ + l + Stroke h + l f 8 l With rod boot (mm) Stroke range with rod boot Standard Long stroke Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 A AL B1 BC BF BN BP BZ C D E F GA GB GC GK GL GR GQ H1 20 to 200 18 15.5 13 38 38 93 1/8 44.5 14 8 12 2 85 10 (12) 18 5.5 6 4 8 5 to 200 201

Cylinder with Lock Series CLS

FY W AL FT C N N M RT A K 43 B FX FZ BY S + Stroke H ZZ + Stroke With rod boot 75 l 40 15 h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) 125 140 160 A AL B BA BB BC BF BY BZ C D FT FX FY FZ GA GB GC J 50 47 145 75 18 145 110 136 115 36 14 190 100 230 16 107 58 M14 x 1.5 to 1400 50 47 161 78 18 2 160 110 146 128 36 20 212 112 255 16 114 64 M14 x 1.5 to 1400 56 53 182 95 23

Cylinder with Lock Series CNG

D I H1 AL C0. 1 FX 0. 15 8-J A K S + Stroke H ZZ + Stroke F BN FT FZ NA BC e ZZ + l + Stroke h + l f 8 l With rod boot (mm) Stroke range with rod boot Standard Long stroke Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 A AL B1 BC BF BN BP BZ C D E F GA GB GC GK GL GR GQ H1 20 to 200 18 15.5 13 38 38 93 1/8 44.5 14 8 12 2 85 10 (12) 18 5.5 6 4 8 5 201 to 350

EX250-SPR_eng

DIA BF BF Red lights up when bus failure is detected. SI unit SI unit EX250 : Contact each manufacture about Communication cable and Bus Tee. Do not operate in an atmosphere containing flammable or explosive gases. Fire or an explosion can result. This product is not designed to be explosion proof.

0.4

VVQC 000 3A 1 1 VVQC 000 1A 1 D C6 Series Series SV 1 2 1 2 VQC1000 VQC1000 SYJ VQC2000 VQC2000 Note) Tie-rods (2 pcs.) for additional stations included.

New

For Air 1.0 Downstream pressure of valve (P2) [MPa] Upstream pressure of valve P1z1.0 MPa 0.8 Subsonic 0.9 0.6 Critical pressure 0.8 0.7 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 3/64 (1.2) 50 100 150 3/32 (2.4) 100 200 300 400 1/8 (3.2) 300 200 100 400 500 600 700 5/32 (4) 200 1, 000 800 400 600 7/32 (5.6) Series VXN2 250 500 7/32 (5.6) Series VXN3 500 1, 000 1, 500 2, 000 Flow rate Q [L/min

IZ-OMU0031-CN

30 -25No.IZ*-OMU0031 [F98] (F) OUT1 OUT2 OUT2 <> [F98] [on] [oFF] [oFF]() 2 [F90] -26No.IZ*-OMU0031 [F99] <> [F99] ON 5 [F99] -27No.IZ*-OMU0031 / () () 1"Hi" 1 1"Hi" 1 / 1() 10F.S. () 1 LoC1 < -> 5 LoCUnL () / -28No.IZ*-OMU0031 5 [UnL] [LoC] 5 [LoC] [UnL] 30/ [UnL] [FAL]3[LoC] -29No.IZ*-OMU0031 [000] <> (29)(29) [UnL] 5 [000] / / ( ) 1 (/30 ) -30No.IZ*-

Table of Contents

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.