MGG

1 300st st: Stroke (mm) 200st 100st 0 0 20 40 60 80 100 120 Allowable end load F (N) MGGL 50Stroke 3 900st (Ball bushing type) Deflection Y (mm) 800st 2 700st 600st 500st 1 400st 200st 300st st: Stroke (mm) 100st 0 0 20 40 60 80 100 120 Allowable end load F (N) 7 Guide Cylinder Series MGG MGGL 63Stroke 2.5 (Ball bushing type) 900st 2 Deflection Y (mm) 800st 700st 600st 1 500st 400st st:

Guide Cylinder Series MGG

1 300st st: Stroke (mm) 200st 100st 0 0 20 40 60 80 100 120 Allowable end load F (N) MGGL 50Stroke 3 900st (Ball bushing type) Deflection Y (mm) 800st 2 700st 600st 500st 1 400st 200st 300st st: Stroke (mm) 100st 0 0 20 40 60 80 100 120 Allowable end load F (N) 7 Guide Cylinder Series MGG MGGL 63Stroke 2.5 (Ball bushing type) 900st 2 Deflection Y (mm) 800st 700st 600st 1 500st 400st st:

NCQ8

For 075, 106 K Auto switch 2 sides x 4 places O-counter bore R depth M1 E A + Stroke 0.13 A Symbol C W Z R Q P M1 K J I H E D M2 N O Standard Standard Super compact Super compact Bore 1/4"st 1/8"to1"st 1 1/4"to2"st 1/4"to1"st 1 1/4"to2"st 3/8"to2"st 075(3/4") 106(1 1/16") 150(1 1/2") 200(2") 250(2 1/2") 1.69 0.31 1.25 1.56 0.06 0.25 1.22 0.15 0.25 1.31 0.19 0.86 2.25 1.19 1.75 0.46 0.46 #10

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

17+ST 27 37 47 57 67 49.5+ST 59.5 69.5 79.5 89.5 99.5 61+ST 71 81 91 101 111 Part no.

CV/MVGQ

2 10-15-13 Series CVJ3 Single Acting, Spring Return/Basic Style (B) M5 x 0.8 CVJ3B S Bore size Stroke M5 x 0.8 28 [34.5] 48 [49] Manual override Width across flats B1 Rod End Nut Bore size (mm) 10 16 H1 B1 7 3.2 16 [17] S + Stroke Z + Stroke 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) NN NB NA MM HX H F D C B A ND Z Z S Z S Z S S 128

EXxx-OMO0027

DYE DYF Red ST LED is flashing. (Diagnosis is activated) (2)The wire of the output device is broken or disconnected. (2)Check if the connector is loose and if the wire is broken. Red/green ST LED is flashing. Unit has failed Stop the operation and contact SMC. Red ST(I) LED is ON. (Diagnosis is activated) Check the parts with error by using the LED display or master or H.T.

Fieldbus system EtherNet/IP TM compatible SI unit

DYE DYF Red ST LED is flashing. (Diagnosis is activated) Red/green ST LED is flashing. Unit has failed Stop the operation and contact SMC. Red ST(I) LED is ON. (Diagnosis is activated) Check the parts with error by using the LED display or PLC or H.T. Re-wire the short-circuited part or check if the cable and input device are normal.

EXxx-OMQ0016

Red ST(M) LED is flashing. (Diagnosis is activated) 8 Turn OFF the power for the unit and then turn it ON again. If the error is not eliminated, stop the operation and contact SMC. 9 An internal memory error has occurred in the SI unit. Red ST(M) LED is ON. Red/green ST(M) LED is flashing alternately.

Fieldbus system DeviceNet TM compatible SI unit

ST(M) flashes in green. Analogue input unit Refer to failure 5. displays error. Analogue output unit Refer to failure 6. displays error. Analogue I/O unit Refer to failure 7. displays error. Contact SMC if it does not recover after replacing the SI unit whose unit is broken. -34No.EX-OMN0030-D \ SI unit Red ST(M) LED is flashing. Refer to failure 8. Red ST(M) LED is ON.

Fieldbus system CC-Link compatible SI unit

Green ST(M) LED is flashing. Analogue input unit Refer to failure 5. displays error. Analogue output unit Refer to failure 6. displays error. Analogue I/O unit Refer to failure 7. displays error. Contact SMC if it does not recover after replacing the SI unit whose unit is broken. -34No.EX-OMN0034-B SI unit Red ST(M) LED is flashing Refer to failure 8. Red ST(M) LED is ON.

EXxx-OMN0029CN

ST () LED PLC H.T.ON/OFF DXE DXF ST () LED PLC ON/OFF ST / (60 ) -36No.EX-OMN0029CN-D EX600No. H.T. () LED PLC H.T. ON/OFF LED PLC () ON/OFF DYB / 3 H.T. ST () LED PLC H.T. ON/OFF LED PLC DYE DYF ST () ON/OFF ST / H.T. ST(I) () LED PLC H.T.ON/OFF ST(I) () LED PLC ON/OFF H.T. ST(0) () LED PLC 4 DME DMF H.T.

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

bolt) and M4 x 0.7 (Hexagon nut) M3 x 0.5 x 10 L (Hexagon socket head cap screw) 2 x M4 x 0.7 through Steel ball Steel ball (14+ST) (16) 4 2 x M3 x 0.5 through 6 (mm) ST 10 20 30 40 50 14+ST 24 34 44 54 64 17+ST 27 37 47 57 67 49.5+ST 59.5 69.5 79.5 89.5 99.5 61+ST 71 81 91 101 111 Part no.

ISO Cylinder

51 to 100 st 101 to 150 st Auto switch model Bore size A dimensions B 5 to 50 st 51 to 100 st 101 to 150 st 8 18.5 18.5 18.5 6.5 10 16.5 16.5 16.5 6.5 12 18 18 18 7.5 8 17 17 17 5 10 15 15 15 5 12 16.5 16.5 16.5 6 D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV 16 18 33.5 49 13.5 [7.5] 16 16.5 32 47.5 12 [6] 16 12.5 28 43.5 8 [2] 20 10.5 (35.5) 60.5

EXxx-OMQ0015CN

ST () LED PLC DXE DXF H.T.ON/OFF ST () LED PLC ON/OFF ST / : (66 ) -28No.EX-OMQ0015CN EX600No. LED PLC H.T. () H.T. ON/OFF LED PLC () ON/OFF DYB / 3 LED PLC H.T. ST () LED PLC H.T. ON/OFF DYE DYF ST () ON/OFF ST / LED PLC H.T. ST(I) () LED PLC H.T. ON/OFF ST(I) () ON/OFF LED PLC H.T. ST(O) () 4 DME DMF H.T.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Red/green ST LED is flashing. Red ST(I) LED is ON. (Diagnosis is activated) Check the parts with error by using the LED display or unit diagnostic data or master. Re-wire the short-circuited part or check if the cable and input device are normal. Input device power supply is short-circuited. Red ST(I) LED is flashing.

Fieldbus system EtherNet/IP compatible SI Unit

Green ST(M) LED is flashing. Frequency count unit Refer to Fault 5 displays error. If the error is not eliminated even after supplying power, the unit failure is possible. Replace the applicable I/O unit. Red ST(M) LED is Refer to Fault 6 flashing. Red ST(M) LED is ON.

Fieldbus system EtherCAT compatible SI Unit

Green ST(M) LED is flashing. Refer to Fault 5 Frequency count unit displays error. If the error is not eliminated even after supplying power, the unit failure is possible. Replace the applicable I/O unit. Red ST(M) LED is Refer to Fault 6 flashing. Red ST(M) LED is ON.

Fieldbus system PROFINET compatible SI Unit

Replace the applicable I/O unit. -35No.EX-OMY0027 SI unit Red ST(M) LED is flashing. Refer to Fault 9 Red ST(M) LED is ON. Refer to Fault 10 Or red/green ST(M) LED is flashing alternately. Red PWR or PWR(V) Refer to Fault 11 LED is ON. L/A port1 or L/A port2 Refer to Fault 12 LED is ON or OFF. SF or BF LED is Refer to Fault 13 red ON or red flashing. The valve does not work correctly.

Fieldbus system EtherNet/IP TM compatible SI Unit

Green ST(M) LED is flashing. Analogue input unit displays error. Refer to Fault 5. Analogue output unit displays error. Refer to Fault 6. Analogue I/O unit displays error. Refer to Fault 7. Contact SMC if it does not recover after replacing the SI unit whose unit is broken. -32No.EX-OMS0027 SI unit Red ST(M) LED is flashing. Refer to Fault 8. Red ST(M) LED is ON.

Fieldbus system PROFIBUS DP compatible SI unit

Red ST(M) LED is flashing. (When diagnosis is activated) 8 (3)ON/OFF count of the valve has exceeded the set value. Red ST(M) LED is ON. SI unit has failed. Stop the operation and contact SMC. 9 Red/green ST(M) LED is flashing alternately. Connection between the units is defective. Confirm that there is no loose connection between the units and connect them correctly.