XLF Series

n n n (KF flange) F F F Fd d d d Heater (option) Auto switch (option) G G G G H H H H B B B B A A A A A A A A Unit: mm Model A B C D E Fn Fd G H XLF-16 40 103 38 1 30 17 40 XLF-25 50 113 48 1 12 40 26 39 XLF-40 65 158 66 2 11 55 41 63 XLF-50 70 170 79 2 11 75 52 68 XLF-63 88 196 100 3 11 87 95 70 69 XLF-80 90 235 117 3 11 114 110 83 96 XLF-100 108 300 154 3 11 134 130 102 131 XLF-160 138

High Vacuum L Type Valve

C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-

XMA/XYA Series

110 83 96 D G C XYA Series / Straight Valve C B Fd (K Flange) 45 H Fn (KF Flange) A E Unit: mm Model n Fd XYA-25 100.2 79.5 48 1 23.5 40 26 64 XYA-40 130 106 66 2 38 55 41 84 XYA-50 178 119 79 2 53 75 52 95 XYA-63 209 149 100 3 61 87 95 70 118 XYA-80 268 178 117 3 80 114 110 83 142 9 XM-OMP0001-A 5.

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New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Thermo-con

JAPAN 11.1 (281) 6.2 (157) H OUT Air Air 3.8 (97) 1.2 (30) L 10.6 (270) IN DRAIN 12.6 (321) 0.5 (12) Circulating fluid drain port (with plug) Rc1/4 14.3 (364) Circulating fluid level gauge Foot (Accessory) Filter cover Circulating fluid inlet Rc1/4 Filter 6.0 (152) 1.1 (29) 14.1 (358) 0.8 (21) 4 x Plastic foot Option (Fitting part) Power Cable (Accessory) NPT fitting specification (-N, -FN

High Vacuum L Type Valve

C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-

NCQ2/CQ2

Auto Switch Mounting Height (N)CDQ2, (N)CDQ2W, (N)CDQ2www-wS/-wT (Single acting), (N)CDQ2K, (N)CDQ2KW (Non-rotating rod) (N)CDQ2 (Long stroke), CDQ2wS (High lateral load) CDQ2wR/wV (Water resistant) Applicable Cylinder Series: Auto switch model D-F7 /J79 D-F7 W/J79W D-F7BAL D-F79F/F7NTL D-A7 H/A80H D-F7 V D-F7 WV D-J79C D-A7 D-A80 D-A73C D-A80C D-A79W D-M9 V D-A9 V D-P3DW Bore size U 21.5

Profile Design ISO/VDMA Air Cylinder Series CP95

(1+ ) FB allowable L1 L2 FB1 allowable 32 62.5 34.5 + st 80 N 40 74.0 39.0 + st 125 N 50 76.0 44.5 + st 195 N 63 91.0 44.5 + st 310 N 80 93.0 53.0 + st 500 N 100 104.0 57.5 + st 785 N e.g. 63mm bore, 100mm stroke, Ws = 20N Ws = (2kgs) 20N 144.5 91 FB1 = 20 (1+ ) = 51.76N Replacement parts: Seal kits 32 includes order No. from to , 40 100 includes from to FB1 = 51.76N 310N (from table)

Coolant valve

/VS) M12 connector type (Non-polar type) Surge voltage suppressor (WS/VS) Light/surge voltage suppressor (WZ/VZ) Light/surge voltage suppressor (WZ/VZ) 8 SGC200-OMM0002-F SGC / SGH Series Coolant Valve / Precautions 6 Be sure to read this before handling.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

CNA Vertical (Downward) Vertical (Upward) Horizontal collision CNS CLS Type of impact CLQ MLGP RLQ W 2 g Kinetic energy E1 V2 MLU Thrust energy E2 Fs Ws Fs Fs + Ws ML1C Absorbed energy E E1 + E2 DSymbol V: Impact speed (m/s) g: Gravitational acceleration (m/s2) W: Impact object weight (kg) F: Cylinder thrust (N) s: Stroke length of shock absorber (m) -X Air Cushion Stroke Note) The speed

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

CNA Vertical (Downward) Vertical (Upward) Horizontal collision CNS CLS Type of impact CLQ MLGP RLQ W 2 g Kinetic energy E1 V2 MLU Thrust energy E2 Fs Ws Fs Fs + Ws ML1C Absorbed energy E E1 + E2 DSymbol V: Impact speed (m/s) g: Gravitational acceleration (m/s2) W: Impact object weight (kg) F: Cylinder thrust (N) s: Stroke length of shock absorber (m) -X Air Cushion Stroke Note) The speed

ML1

ML2B Horizontal impact Vertical impact (down) Vertical impact (up) ML1C REA Configuration of impact REC RHC MTS W 2g Oparating energy E1 V2 CC Thrust energy E2 Fs Fs+Ws Fs-Ws Absorbing energy E E1+E2 Symbols V: Impact speed (m/s) g: Gravitational acceleration (9.8m/s2) W: Impact mass amount (kg) F: Cylinder thrust (N) s: Stroke length of shock absorber (m) Note) "Impact speed" means the speed

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/VS) Surge voltage suppressor (WS/VS) (Ground) 3 () (+) 3 ( ) 2 1 Varistor Coil Varistor Coil 3 4 4 ( ) 4 (+) () 4-pin type Light/surge voltage suppressor (WZ/VZ) Light/surge voltage suppressor (WZ/VZ) (Ground) 3 ( ) 3 () (+) Varistor Coil NL 1 2 Varistor Coil 3 4 5 4 ( ) 4 (+) () 5-pin type Back page 4 Series SGH Specific Product Precautions 3 Be sure to read before handling.

5-Port Solenoid Valve

refer to the Plug-in Mixed Mounting Type Manifold (from page 165). y Valve stations Symbol Stations Note 02 2 stations Double wiring*1 e SI unit DIN Rail Option 0 Without SI unit Q DeviceNet (Version A) N PROFIBUS DP (Version A) V CC-Link ZE EtherNet/IP (1 port) EA EtherNet/IP (2 ports) D EtherCAT F PROFINET WE EtherNet/IP compatible wireless base*1 WF PROFINET compatible wireless base*1 WS

The AFW is available for US and Canadian customers only.8 threaded models to 1,500 SCFM (3"NPT), Three filtration/coalescing grades available as well as activated carbon, Differential pressure indicator and float type auto drains are standard, Modular connectivity permits compact assembly , 232 psi max. operating pressure, Spinner, AFW400(A)-WS, AFW700(A)-WS, FILTER, 0.1 lb

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g~ 57 WS I Bore F (mm) ' H IA IB ' L W N S WC ZZ GA GB 40 44 52 52 47 97 58 97 72 97 52 55 -49 58 49 58 37.5 43.5 49.5 37.5 43.5 I 5 7 30 10 30 10 30 12 194 194 194 52 60 52 74 50 55 63 69 49.5 5.5 * Pos$lble to fab(fcate the dImenSIOns of H and L othef than the standafd. N type (Semi-standard) 1 S mba. H L ZZ ~prE! .

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

CNA Vertical (Downward) Vertical (Upward) Horizontal collision CNS CLS Type of impact CLQ MLGP RLQ W 2 g Kinetic energy E1 V2 MLU Thrust energy E2 Fs Ws Fs Fs + Ws ML1C Absorbed energy E E1 + E2 DSymbol V: Impact speed (m/s) g: Gravitational acceleration (m/s2) W: Impact object weight (kg) F: Cylinder thrust (N) s: Stroke length of shock absorber (m) -X Air Cushion Stroke Note) The speed

The KQ series has been discontinued, please see the New KQ2 series , One-touch fittings, metric size , Connection thread: M, R(PT), Rc(PT) , Body color: black , Release button: blue , Tube material: nylon, soft nylon, polyurethane, FITTING, PLUG IN REDUCER *LQA, CONNECTORS, KQ ONE TOUCH FITTING, FN, KQ 6MM, .03540 lb

Accepts nylon and urethane tubes, Applicable for both vacuum and positive pressure applications, Release collar allows easy removal of tubing without damaging the tube, Maximum vacuum pressure of 1.0MPa, FITTING, PLUG-IN REDUCER, CONNECTORS, KQ2 FITTING, FN, KQ2 6MM, 0.01787 lb

XLA- ∗ -F7NJ ∗ - ∗ Series

assembly (Maintenance part) (excluding the body, external seal and accessories) Auto switch (Option) Thermal resistance magnet (for auto switch) Pilot port 7 Heater (Option) Bellows holder (Material: SUS304) External seal (Maintenance part) 3 6 Bellows (Material: SUS316L) 5 Valve (Material: SUS304) 2 Valve seal (Maintenance part) C D J 4 C E E Body (Material: A6063) (KF flange) (K flange) Fd fn