XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

XLGR Series

Dimensions E C D E E L (Width across flats) M (Width across flats) M8 (KF Flange) (K Flange) Fn Fd C Detail of (a) (a) M Rc1/8 J H K B A G A Model A B C D E Fn Fd XLGR-80*-1* 90 250 117 45.5 38.5 114 110 XLGR-100*-1* 108 270.5 154 55 38.5 130 102 XLGR-160*-1* 138 339 200 65 38.5 180 153 Model G H J K L M XLGR-80*-1* 83 105 44 9 13 4 XLGR-100*-1* 102 92 58 9 13 4 XLGR-160*-1* 153 124 62 12.5

XLF Series

n n n (KF flange) F F F Fd d d d Heater (option) Auto switch (option) G G G G H H H H B B B B A A A A A A A A Unit: mm Model A B C D E Fn Fd G H XLF-16 40 103 38 1 30 17 40 XLF-25 50 113 48 1 12 40 26 39 XLF-40 65 158 66 2 11 55 41 63 XLF-50 70 170 79 2 11 75 52 68 XLF-63 88 196 100 3 11 87 95 70 69 XLF-80 90 235 117 3 11 114 110 83 96 XLF-100 108 300 154 3 11 134 130 102 131 XLF-160 138

High Vacuum L Type Valve

C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-

XMA/XYA Series

110 83 96 D G C XYA Series / Straight Valve C B Fd (K Flange) 45 H Fn (KF Flange) A E Unit: mm Model n Fd XYA-25 100.2 79.5 48 1 23.5 40 26 64 XYA-40 130 106 66 2 38 55 41 84 XYA-50 178 119 79 2 53 75 52 95 XYA-63 209 149 100 3 61 87 95 70 118 XYA-80 268 178 117 3 80 114 110 83 142 9 XM-OMP0001-A 5.

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New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Thermo-con

JAPAN 11.1 (281) 6.2 (157) H OUT Air Air 3.8 (97) 1.2 (30) L 10.6 (270) IN DRAIN 12.6 (321) 0.5 (12) Circulating fluid drain port (with plug) Rc1/4 14.3 (364) Circulating fluid level gauge Foot (Accessory) Filter cover Circulating fluid inlet Rc1/4 Filter 6.0 (152) 1.1 (29) 14.1 (358) 0.8 (21) 4 x Plastic foot Option (Fitting part) Power Cable (Accessory) NPT fitting specification (-N, -FN

High Vacuum L Type Valve

C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-

NCQ2/CQ2

Auto Switch Mounting Height (N)CDQ2, (N)CDQ2W, (N)CDQ2www-wS/-wT (Single acting), (N)CDQ2K, (N)CDQ2KW (Non-rotating rod) (N)CDQ2 (Long stroke), CDQ2wS (High lateral load) CDQ2wR/wV (Water resistant) Applicable Cylinder Series: Auto switch model D-F7 /J79 D-F7 W/J79W D-F7BAL D-F79F/F7NTL D-A7 H/A80H D-F7 V D-F7 WV D-J79C D-A7 D-A80 D-A73C D-A80C D-A79W D-M9 V D-A9 V D-P3DW Bore size U 21.5

Profile Design ISO/VDMA Air Cylinder Series CP95

(1+ ) FB allowable L1 L2 FB1 allowable 32 62.5 34.5 + st 80 N 40 74.0 39.0 + st 125 N 50 76.0 44.5 + st 195 N 63 91.0 44.5 + st 310 N 80 93.0 53.0 + st 500 N 100 104.0 57.5 + st 785 N e.g. 63mm bore, 100mm stroke, Ws = 20N Ws = (2kgs) 20N 144.5 91 FB1 = 20 (1+ ) = 51.76N Replacement parts: Seal kits 32 includes order No. from to , 40 100 includes from to FB1 = 51.76N 310N (from table)

Coolant valve

/VS) M12 connector type (Non-polar type) Surge voltage suppressor (WS/VS) Light/surge voltage suppressor (WZ/VZ) Light/surge voltage suppressor (WZ/VZ) 8 SGC200-OMM0002-F SGC / SGH Series Coolant Valve / Precautions 6 Be sure to read this before handling.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

CNA Vertical (Downward) Vertical (Upward) Horizontal collision CNS CLS Type of impact CLQ MLGP RLQ W 2 g Kinetic energy E1 V2 MLU Thrust energy E2 Fs Ws Fs Fs + Ws ML1C Absorbed energy E E1 + E2 DSymbol V: Impact speed (m/s) g: Gravitational acceleration (m/s2) W: Impact object weight (kg) F: Cylinder thrust (N) s: Stroke length of shock absorber (m) -X Air Cushion Stroke Note) The speed

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

CNA Vertical (Downward) Vertical (Upward) Horizontal collision CNS CLS Type of impact CLQ MLGP RLQ W 2 g Kinetic energy E1 V2 MLU Thrust energy E2 Fs Ws Fs Fs + Ws ML1C Absorbed energy E E1 + E2 DSymbol V: Impact speed (m/s) g: Gravitational acceleration (m/s2) W: Impact object weight (kg) F: Cylinder thrust (N) s: Stroke length of shock absorber (m) -X Air Cushion Stroke Note) The speed

ML1

ML2B Horizontal impact Vertical impact (down) Vertical impact (up) ML1C REA Configuration of impact REC RHC MTS W 2g Oparating energy E1 V2 CC Thrust energy E2 Fs Fs+Ws Fs-Ws Absorbing energy E E1+E2 Symbols V: Impact speed (m/s) g: Gravitational acceleration (9.8m/s2) W: Impact mass amount (kg) F: Cylinder thrust (N) s: Stroke length of shock absorber (m) Note) "Impact speed" means the speed

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/VS) Surge voltage suppressor (WS/VS) (Ground) 3 () (+) 3 ( ) 2 1 Varistor Coil Varistor Coil 3 4 4 ( ) 4 (+) () 4-pin type Light/surge voltage suppressor (WZ/VZ) Light/surge voltage suppressor (WZ/VZ) (Ground) 3 ( ) 3 () (+) Varistor Coil NL 1 2 Varistor Coil 3 4 5 4 ( ) 4 (+) () 5-pin type Back page 4 Series SGH Specific Product Precautions 3 Be sure to read before handling.

5-Port Solenoid Valve

refer to the Plug-in Mixed Mounting Type Manifold (from page 165). y Valve stations Symbol Stations Note 02 2 stations Double wiring*1 e SI unit DIN Rail Option 0 Without SI unit Q DeviceNet (Version A) N PROFIBUS DP (Version A) V CC-Link ZE EtherNet/IP (1 port) EA EtherNet/IP (2 ports) D EtherCAT F PROFINET WE EtherNet/IP compatible wireless base*1 WF PROFINET compatible wireless base*1 WS

The AFW is available for US and Canadian customers only.8 threaded models to 1,500 SCFM (3"NPT), Three filtration/coalescing grades available as well as activated carbon, Differential pressure indicator and float type auto drains are standard, Modular connectivity permits compact assembly , 232 psi max. operating pressure, Spinner, AFW400(A)-WS, AFW700(A)-WS, FILTER, 0.1 lb

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g~ 57 WS I Bore F (mm) ' H IA IB ' L W N S WC ZZ GA GB 40 44 52 52 47 97 58 97 72 97 52 55 -49 58 49 58 37.5 43.5 49.5 37.5 43.5 I 5 7 30 10 30 10 30 12 194 194 194 52 60 52 74 50 55 63 69 49.5 5.5 * Pos$lble to fab(fcate the dImenSIOns of H and L othef than the standafd. N type (Semi-standard) 1 S mba. H L ZZ ~prE! .

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

CNA Vertical (Downward) Vertical (Upward) Horizontal collision CNS CLS Type of impact CLQ MLGP RLQ W 2 g Kinetic energy E1 V2 MLU Thrust energy E2 Fs Ws Fs Fs + Ws ML1C Absorbed energy E E1 + E2 DSymbol V: Impact speed (m/s) g: Gravitational acceleration (m/s2) W: Impact object weight (kg) F: Cylinder thrust (N) s: Stroke length of shock absorber (m) -X Air Cushion Stroke Note) The speed