XLF Series

n n n (KF flange) F F F Fd d d d Heater (option) Auto switch (option) G G G G H H H H B B B B A A A A A A A A Unit: mm Model A B C D E Fn Fd G H XLF-16 40 103 38 1 30 17 40 XLF-25 50 113 48 1 12 40 26 39 XLF-40 65 158 66 2 11 55 41 63 XLF-50 70 170 79 2 11 75 52 68 XLF-63 88 196 100 3 11 87 95 70 69 XLF-80 90 235 117 3 11 114 110 83 96 XLF-100 108 300 154 3 11 134 130 102 131 XLF-160 138

High Vacuum L Type Valve

C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-

XMA/XYA Series

110 83 96 D G C XYA Series / Straight Valve C B Fd (K Flange) 45 H Fn (KF Flange) A E Unit: mm Model n Fd XYA-25 100.2 79.5 48 1 23.5 40 26 64 XYA-40 130 106 66 2 38 55 41 84 XYA-50 178 119 79 2 53 75 52 95 XYA-63 209 149 100 3 61 87 95 70 118 XYA-80 268 178 117 3 80 114 110 83 142 9 XM-OMP0001-A 5.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Thermo-con

JAPAN 11.1 (281) 6.2 (157) H OUT Air Air 3.8 (97) 1.2 (30) L 10.6 (270) IN DRAIN 12.6 (321) 0.5 (12) Circulating fluid drain port (with plug) Rc1/4 14.3 (364) Circulating fluid level gauge Foot (Accessory) Filter cover Circulating fluid inlet Rc1/4 Filter 6.0 (152) 1.1 (29) 14.1 (358) 0.8 (21) 4 x Plastic foot Option (Fitting part) Power Cable (Accessory) NPT fitting specification (-N, -FN

155

System / Related Equipment Coolant pump Coolant valve Series SGC W Pressure Switches P.393 Nozzles for Blow P.390 Coolant line pressure control Industrial Filters P.391 2-color display high precision digital pressure switch ISE80 Coolant liquid filtration Nozzle for blow KN 2-color display digital pressure switch ISE75/75H Genaral purpose pressure switch ISG Low maintenance filter FN

High Vacuum L Type Valve

C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-

The HRZ series thermo-chiller is a high performance device for circulating fluid with a constant temperature. Available in 3 temperature range designs so the best chiller can be selected for operating temperature needs.  No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled

The HRZ series thermo-chiller is a high performance device for circulating fluid with a constant temperature. Available in 3 temperature range designs so the best chiller can be selected for operating temperature needs.  No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled

The HRZ series thermo-chiller is a high performance device for circulating fluid with a constant temperature. Available in 3 temperature range designs so the best chiller can be selected for operating temperature needs.  No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled

The HRZ series thermo-chiller is a high performance device for circulating fluid with a constant temperature. Available in 3 temperature range designs so the best chiller can be selected for operating temperature needs.  No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled

The HRZ series thermo-chiller is a high performance device for circulating fluid with a constant temperature. Available in 3 temperature range designs so the best chiller can be selected for operating temperature needs.  No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled

The HRZ series thermo-chiller is a high performance device for circulating fluid with a constant temperature. Available in 3 temperature range designs so the best chiller can be selected for operating temperature needs.  No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled

The KQ series has been discontinued, please see the New KQ2 series , One-touch fittings, metric size , Connection thread: M, R(PT), Rc(PT) , Body color: black , Release button: blue , Tube material: nylon, soft nylon, polyurethane, FITTING, PLUG IN REDUCER *LQA, CONNECTORS, KQ ONE TOUCH FITTING, FN, KQ 6MM, .03540 lb

Accepts nylon and urethane tubes, Applicable for both vacuum and positive pressure applications, Release collar allows easy removal of tubing without damaging the tube, Maximum vacuum pressure of 1.0MPa, FITTING, PLUG-IN REDUCER, CONNECTORS, KQ2 FITTING, FN, KQ2 6MM, 0.01787 lb

XLA- ∗ -F7NJ ∗ - ∗ Series

assembly (Maintenance part) (excluding the body, external seal and accessories) Auto switch (Option) Thermal resistance magnet (for auto switch) Pilot port 7 Heater (Option) Bellows holder (Material: SUS304) External seal (Maintenance part) 3 6 Bellows (Material: SUS316L) 5 Valve (Material: SUS304) 2 Valve seal (Maintenance part) C D J 4 C E E Body (Material: A6063) (KF flange) (K flange) Fd fn

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

MK

Piston area (cm2) X 100 Operation direction R: Rod side (Clamp) H: Head side (Release) Weight/Mounting Through Hole Unit: g Bore size (mm) Clamp stroke (mm) 12 16 20 25 32 40 50 63 10 20 50 70 100 250 280 500 595 87 123 290 320 525 640 1100 1520 1350 1805 Availability of Body Options Additional Weight 12 Unit: g 16 20 25 32 40 50 63 Bore size (mm) Bore size 12, 16 20 to 63 M F N MF FN

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

With lead wire Without lead wire Without connector With lead wire Without lead wire Without connector MO D With connector Without connector DO 4 5 6 24 VDC 12 VDC 9 Other LO M MN Option M plug connector Flow rate (l/min (ANR)) ARBZ5000-00-P DIN terminal Plug-in type A DXT170 5 F Applicable coil Applicable model A Series VZ1000 F VZ1000 VZ3000/5000 Solenoid B VZ3000 VZ5000 Series C FN

Rotary Clamp Cylinders

With boss on head end With arm Bore size Port thread type Regarding body option manufacturable range, refer to the below table. 12 16 20 25 32 40 50 63 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 12 to 25 M thread Rc NPT G Nil Body Option Manufacturable Range FN MF M N F Bore size Nil TN TF 32 to 63 12, 16 20 to 63 Clamp stroke Arms are assembled at the time of shipment.