LEC-OM036xx

Gateway Unit Power supply DC24V Power supply line CN Cables, PLC and power supply are prepared by customer) * Refer to 6. CN4: Power supply connector 5. 2 CN3: Bus connector Connect the DeviceNetTM line and the controller (LEC) with the communication cable (LEC-CG-) Gateway Unit PLC DeviceNetTM line. CN Cables, PLC and power supply are prepared by customer) * Refer to 7.

LEC-OM034xx

Gateway Unit Power supply 24 VDC Power supply line CN Cables, PLC and power supply are prepared by customer) * Refer to 6. CN4: Power supply connector 5. 2 CN3: Bus connector Connect the Profibus line and the controller (LEC) with the communication cable (LEC-CG-) Gateway Unit PLC Profibus line. CN Cables, PLC and power supply are prepared by customer) * Refer to 7.

LEC-OM032xx

HUB CN Cables, PLC and power supply are prepared by 5. 3 CN1: CONT connector Connect the gateway unit and the controller (LEC) to communication cable (LEC-CG-). Gateway Controller input power supply 24 VDC unit CN Terminating Resistor (120 1/4W) CN4 CN4 CN4 Controller (LEC) Controller (LEC) Controller (LEC) 21 - * Refer to section 7.

Air Slide Table Series MXJ

(Not plugged in the case of the clean series) 17 12 5 37 43 3 +0.03 0 depth 1.5 11 17 17 A D14 -X 3 2.5 2.5 3.5 A 4.8 Individual -X 3 +0.05 0 depth 1.5 4 x M3 x 0.5 A-A 177 Series MXJ Dimensions With stroke adjuster With adjuster on both ends MXJ4-CN With adjuster on extension end MXJ4-CSN 8 End plate 0.5 Note) Width across flats 4.5 Max. 6.5 3 With adjuster on retraction end MXJ4-CTN 4 8

SMC Electronic Switch Series Variations

ISA Plug (without lead wire) CN ZSE1 ISE1 Output specifications ZSE2 ISE2 14 NPN Open Collector 1 output w/o analog output, 3 revolution adjustment With Connector/How to Order 15 NPN Open Collector 1 output w/o analog output, 200 revolution adjustment ZSP IWithout lead wire (Connector 1 pc., Socket 4 pcs.)

XL

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

Ejector Valve Unit Series ZYY/ZYX 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Y3 SY3000 Rated voltage DC specifications 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Wiring specifications (Vacuum switch) Lead wire length 0.6 m Nil L C CL CN Grommet type AC specifications (50/60 Hz) Lead wire length 3 m 1 2 3 4 100 VAC 200 VAC 110 VAC

High Vacuum Angle Valve, XL Series

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

Ejector Valve Unit, Series ZYY/ZYX

. + vacuum ejector) Series ZYX3000 Series ZYY3000 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYY3000 Connector box type LOU Lead wire/Voltage suppressor specification L Z 5 LOU 10 Y3 ZY S 15 Wiring specifications (Vacuum switch) Lead wire length 0.6m Lead wire length 3m Lead wire length 0.6m Lead wire length 3m Connector type Nil L C CL CN Grommet type Series Y3 SY3000

Aluminum High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

Ejector Valve Unit Series ZYY/ZYX

ZYY3000 (Solenoid valve: SY3000) HEP Related Equipment 1081 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYY3000 Lead wire/ Voltage suppressor specifications Connector box type LOU L Z 5 LOU 10 Y3 ZY S 15 Series Y3 SY3000 Rated voltage DC specifications 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Wiring specifications (Vacuum switch) Lead wire length 0.6 m Nil L C CL CN

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, HRZ - NO SIZE RATING, OTHERS, HRZ- THERMO CHILLER, 2X, HRZ - NO SIZE RATING, 220.46226 lb

CRBB-OM00004

How to Order With vertical auto switch unit Shaft Type Lead wire length Size Nil Grommet / Lead wire: 0.5 m Double shaft with single flat (Sizes: 10 to 30) Long shaft end key, Short shaft with single flat (Size: 40) 10 15 20 30 40 M Grommet / Lead wire: 1 m W L Grommet / Lead wire: 3 m CN Connector / Without lead wire C Connector / Lead wire: 0.5 m Rotation angele Number of auto switches

IDX-OM-W094

71 46 12.5 330 704 355 126 IDFA70 R1-1/2 342 890 825 176 480 905 68 365 849 390 81 20 IDFA80 R2 438 957 863 169 480 958 219 78 100 11.0 463 916 485 170 IDFA90 13 IDFA80 IDFA90 mm IDFA60 745 957 () () 704 916 () () 355 330 485 463 IDFA70 890 () 849 () 390 365 IDFA60/70/80/90 Series 7-3 IDX-OM-W094 7.4 CM IDFA60/70 OLR AC 230V(50Hz) FM MC PRS PRS2 ILS THR C01 C11 TB IDFA80/90 CN

C95

16 3 4 4 4 4 4 10 12 16 16 20 20 30 35 40 45 45 55 34 40 45 51 65 75 3.3 4.3 4.3 4.3 4.3 6.3 41 48 54 60 75 85 6.6 6.6 9 9 11 11 10.5 11 15 15 18 18 32.5 38 46.5 56.5 72 89 10 10 10 12 16 16 142 160 170 190 210 230 32 40 50 63 80 100 22 25 27 32 36 41 5.5 5.5 6.5 6.5 10 10 CP95 C95 C92 CA1 Counter pivot ES Counter pivot E CS1 Bore (mm) Bore (mm) d2 CK S5 K1 K2 L3 G1 L1 G2 EM G3 CA H6 R1 CN

Rotary Table/Vane Style Series MSU

D-LC05: Lead wire 0.5 m D-LC30: Lead wire 3 m D-LC50: Lead wire 5 m Nil L C CL CN 90 180 90 180 Single vane Double vane 90 90 Rotation adjustment range Single vane: Both ends 5 each Double vane: Both ends 2.5 each Vane type Auto switch S D Single vane Double vane Nil Refer to the table below for the applicable auto switch model.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

E B1 B2 B3 L1 TG1 T l1 (Min.) l2 FL H (Max.) d1 d2 d3 CN SR (Max.)

V

R E S W I T C H A 0.7 Including Vacuum Release Valve with Vacuum Switch B 1.0 Including Vacuum Release Valve with Vacuum Switch C 0.7 Including Vacuum Release Valve without Vacuum Switch D 1.0 Including Vacuum Release Valve without Vacuum Switch ZSE1 00 E L E C T R I C A L E N T R Y Blank With 0.6m Grommet Lead L With 3m Grommet Lead C With 0.6m Connector Lead CL With 3m Connector Lead CN