Cooling Capacity: 008 (8 kW), Type: 1 (Ethylene Glycol), Pump Inverter Control: None, Option: CN (C+N)

Cooling Capacity: 008 (8 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: CN (C+N)

Cooling Capacity: 008 (8 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: CN (C+N)

Cooling Capacity: 8 kW, Type: Ethylene Glycol, Pump Inverter Control: None, Option: C+N

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+N

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: C+N

1

X: 33 mm or less H: M10 or less 25 25 J: 6 mm or more, I: 13 mm or less J: 6 mm or more, I: 13 mm or less H: M5 or more, X: 20 mm or less H: M5 or less For 12 For 12 H: M4 or less H: M4 or less H: M6 or more, X: 22.5 mm or less H: M6 or less 16 16 H: M6 or less H: M6 or less XA18 XA6 H: M8 or more, X: 26.5 mm or less H: M8 or less 20 20 H: M6 or less H: M6 or less H: M10 or more, X: 33 mm

Base Mounted Metal Seal/Rubber Seal Series VQ

Description Zinc die-casted Zinc die-casted Body Body Stainless steel Aluminum/HNBR Spool/Sleeve Spool valve Resin Resin Piston Piston Replacement Parts Replacement Parts Note) Note) VQ111 --1 (H) (Y) Voltage1 to 6 VQ111 --1 (H) (Y) Voltage1 to 6 Pilot valve assembly Single r Pilot valve assembly r Single Note) VQ131 --1 Note) VQ131 --1 (H) (Y) Voltage1 to 6 (H) (Y) Voltage1 to 6 t t Pilot

Electric Actuator/Slider Type

LE-CSM-R is MR-PWS1CBL M-A -H manufactured by Mitsubishi Electric Corporation. LE-CSB-R is MR-BKS1CBL M-A -H manufactured by Mitsubishi Electric Corporation.

Proposals for Energy Saving

ON YES Hysteresis mode OFF P-1 P-2 Real-time flow rate "P" H H Sensors Measuring Instruments ON Window comparator mode H: Hysteresis NO OFF P-1 P-2 Real-time flow rate OUT1 Output mode ON YES Hysteresis mode OFF n-1 n-2 Real-time flow rate "n" H H ON Window comparator mode H: Hysteresis OFF NO n-2 n-1 Real-time flow rate Accumulated pulse output ( ) Accumulated switch output ( )

MXS Series Air Slide Table

(NN-1) X H G Cross section AA Cross section BB (mm) Note) Refer to "Dimensions" of MXS20 on P. 62 for one with shock absorber as symmetric.

LEC-OM02904

(9001100) [mm] D H T E ()L d W D T Max.

JXCx-OMU0004

P.46 c 31 No.JXC-OMU0004-A 7.2 (1)3 (1) e e (4) [2] i j 3 LED a LED a i j 7 LED f 3 h O g 3 7 LED 0 LED b LED b g h 32 No.JXC-OMU0004-A (4) h NO( 7 LED f 2)7 LED h h *NO NO. 1 2 3 (5 g 7 LED 7 LED f 1 g h * h 4 7 LED f 6 g 2 7 LED f g 33 No.JXC-OMU0004-A (7) i j e 3) g 2 7 LED g j i * 47 e NO. (*) 1 1CW [CW] 2.

JXCx-OMT0023

OPTIONS AND AUXILIARY EQUIPMENT (b) Cable internal wiring diagram MR-J3ENCBL2M-L/-H MR-J3ENCBL5M-L/-H LE-CSE-SA LE-CSE-RA LE-CSE-SB LE-CSE-RB MR-J3ENCBL10M-L/-H Encoder side Servo amplifier Driver connector side connector P5 LG 1 2 3 P5 6 LG MR MRR MR MRR 3 4 5 4 9 2 SD Plate 9 SHD 11 6 11.

Direct Solenoid

@H.

ZSE1/ISE1

H L L H H 15 15 Indicator light (Red) Indicator light (Red) 23 23 SE1-01-16/-17 I Z I Z SE1-01-16C/-17C Pressure setting trimmer 2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 2-3.5 Mounting hole T1

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13

Title not found

Slroke = 079 (20mrt) w h Boot Mr limelers i. Parenlneses CPA1 BN do Boot with Boot' BORE D E G'GB J K M MM N P H z.

Air Cylinder CP Series Cylinder Positioner Assembly

Slroke = 079 (20mrt) w h Boot Mr limelers i. Parenlneses CPA1 BN do Boot with Boot' BORE D E G'GB J K M MM N P H z.

V

H O W T O O R D E R NCRB1BW R O TA R Y A C T U AT O R NCDRB1BW S A U T O S W I T C H L E N G T H O F L E A D W I R E D ...W/ Auto Switch Magnet ...Without Magnet Grommet 0.5m Lead W L Grommet 5m Lead W C Connector 0.5m Lead W CL Connector 3m Lead W CN Connector No Lead Wire M O U N T I N G B ...Basic F ...Flange T Y P E O F A U T O S W I T C H B O R E ( M M) P O R T L O C AT I O N 10 15 20