High Vacuum Angle Valve, XL Series

None H0 High temp. type With heater for 80C (176F) H1 5 to 150C (41 to 302F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Option specifications/Combination table Option specifications Symbol Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 A Indicator H0 Without heater High temp. type H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F

KF

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

SI Unit for Vacuum Manifold

Hysteresis H2 Sub Size Acc ess Default (dec) Content Description index [byte] 1 2 R/W 0x0064 Energy saving operation hysteresis (H2) of CH0 Set energy saving operation hysteresis (H2) for each CH. Refer to Section 5.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

H2 (Hex.) Weight (g) L1 L2 L3 M d Part No. O.D.

S Couplers Series KK/KKH/KK13

Effective area mm2 L1 H1 Width across flats Min. bore size M H2 Width across flats 14 Body size Mass g Model L2 Applicable hose KK3P-50N 5/8 14 21.4 4.5 12.7 36.1 13.7 1/8 -60N 6/9 5.4 18.3 38.8 18.4 17 39.9 16.5 H1 H2 -65N 6.5/10 21.9 35.9 5.9 KK4P-50N 14 43.9 13.7 17 5/8 34.7 12.7 4.5 -60N 6/9 48.4 5.4 18.3 17 46.7 16.5 1/4 -65N 6.5/10 5.9 21.9 45.1 25.2 -80N 8/12 34.4 53.2 7.4 47.6 L2

Manually Operated Integral Fitting Type/Threaded Type Series LVH

(H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions D G E C M P N L K J H2 F H1 B A Model Body material LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 M5 x 0.8 10 10 54.5 Rc 1/8, 1/4, NPT 1/8, 1/4 27 22 22 76.5 75 33 30 (SUS) Stainless steel 19 13 81 Rc 1/4, 3/8,

Prevents Micro-Bubbles

Non-locking type Locking type C (H1) (H2) 60 A B E C (H1) (H2) 2-P B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SMC A B E L J B 2-P 2-F K Body material: PFA N G A D L K 4-M Non-locking type Locking type 60 C (H1) (H2) A B SMC E J B 2-P (mm) Dimensions A B C D

H/DL/L/LL

P. 64 15-2-61 Series H/DL/L/LL Male Connector: H H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

Series H, DL, L, LL Self-align Fittings

H2 (Hex.)

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

KN Series Nozzles for Blowing

L1 Applicable fitting size d Pivoting nozzle with self-align fitting/KNK (mm) Model Nozzle size D L1 M Width across flats H1 H2 Applicable tubing O.D.

REC

Screw-in Piping M5 X 0.8 Relieving port size 50 to 500mm/s Piston speed Mounting Basic, Axial foot, Front flange, Rear flange *Auto switch attachable Dimensions REC B/Basic H2 2-Rc(PT)P Width across flats B2 2-NN G G H1 Width across flats B1 Relieving port M5 X 0.8 Standard port I Relieving port 2-Eh8 D MM AL K A N N F lNA S+Stroke H F ZZ+Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA

REC

CEP1 CE1 Head side trunnion style: RECT CE2 Width across flats B2 H2 TDe9 0.025 0.061 ML2B 2-NN 2-RcP Width across flats B1 G G Standard port Plugged (M5 x 0.8) Standard port H1 C J G5-S I CV 2-Eh8 TY D MVGQ MM AL NA TT CC K A TX TZ N N F S + Stroke H RB 40 Z + Stroke ZZ + Stroke J D(mm) 32 -X H1 H2 I K MM A AL B1 D F G H B2 E Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 20 M8 x

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

M2 K E1 E1 E2 E2 L L H1 M1 H2 M2 W Model Applicable tubing O.D.

AS

L5 (1) L5 (1) L4 Mass (g) Mass (g) Panel-cut dimensions Panel-cut dimensions H1 H2 d D1 D1 L1 L2 L3 M d H1 L1 L2 L3 M H2 Model Model Max. Min. Max. 34.4 Min.

High Power Cylinder Series RHC

Contact SMC when disassembly is required. 14 Wear ring Resin CX 15 Cylinder tube gasket NBR 16 Rod seal NBR MQ RHC RZQ D-X Individual -X 1205 Series RHC Dimensions: Basic Style 20 to 40 2 x Rc P NN GB GA H2 NN H1 MM 2 x NIf8 D NE C 1.5 1.5 Effective thread length 2 x FL AL E E Width across flats KA NF 10 10 N JD A K F N JC NA S + Stroke F H WH B ZZ + Stroke (mm) A AL B C D E F GA GB H H1

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G H1 Width across flats B1 Standard port I Relief port 2 x Eh8 D MM AL A F K NA N N H S + Stroke F ZZ + Stroke (mm) ZZ S P N I E D A 12.5 11 10 10 13 F Bore size Stroke range AL K MM NA NN G H2 41 32 32 26 B2 H H1 22 17 17 13 B1 0 6 6 5 8 8 8 50 45 45 41 200 to 1000 150

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

(Hexagon width across flats) (Hexagon width across flats) H2 H2 (Hexagon width across flats) (He (Hexagon width across flats) xagon width across flats) (Hexagon width across flats) D3 L5 A1 D1 A2 T1 Metric Size L4 Weight (g) AS A2 A1 M L3 L2 L1 d T1 D1 D2 H2 H1 Max.

High Power Cylinder Series RHC

Contents Urethane 12 50 Piston seal RHC50-PS NBR 13 63 Wear ring RHC63-PS Resin 14 Set of nos. 12 to 16 above 80 Cylinder tube gasket RHC80-PS NBR 15 100 Rod seal RHC100-PS NBR 16 Seal kits are sets consisting of items 12 through 16, which can be ordered using the seal kit number for each bore size. 5 High Power Cylinder Series RHC Dimensions/Basic Type 20 to 40 Rc P Rc P GA H2 NN NN GB

RHC

MVGQ CC RB J D-X 20Data 10-6-11 11 Series RHC Dimensions: Basic Style 20 to 40 Rc P Rc P GA H2 NN NN GB I H1 MM D NB ND NE C Effective thread E E NF 10 N JD N JC 10 A K F NA S + Stroke F H WH B ZZ + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B C D E