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Example: Set 20 W (100 W 20%) for the 100-W external regenerative resistors with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur. 2. When set to the factory setting (Pn600 = 0), the DRIVERs built-in option has been used.

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur. 2. When set to the factory setting (Pn600 = 0), the DRIVERs built-in option has been used.

CX CY Width across flats B2 Width across flats NA MQQ M Mounting hole S + Stroke Z + Stroke ZZ + Stroke RHC In the case of 40 In the case of 20 to 32 MK(2) Single acting, Spring extend: CVM3G T Bore size Stroke RS Q G RS H A RZQ MI W S CEP1 H + Stroke CE1 Z + 2 x Stroke ZZ + 2 x Stroke CE2 ML2B I H1 H FZ FY FX FT B1 FD MM B F K AL B2 C2 D H2 HX A Eh8 Bore size (mm) 20 25 32 40 20 0 0.033

19 23 28 36 10 12 16 20 25 8 8 8 0 0 RZQ MI W S CEP1 Double Clevis Style: CVS1D CE1 Lube type (CVS1D), Non-lube type (CVS1DN) CE2 ML2B With rod boot C J G5-S Width across flats B1 CV Rod d9 MVGQ CC Connection port A ZZ + l + Stroke Z + l + Stroke h + l RB S + Stroke Z + Stroke ZZ + Stroke J Stroke range Bore size (mm) DA AL B B1 C D E F H1 HX CX CDH10 CZ J K L (mm) 40 50 63 80 100 32 40 40

(mm) D-A9, D-A9V D-M9, D-M9W D-M9V, D-M9WV Bore size (mm) A B W A B W A B W 6 10 16 20 25 32 13.5 5.5 3.5 (1) 17.5 9.5 0.5 17.5 9.5 1.5 12.5 9.5 7.5 (5) 16.5 13.5 3.5 16.5 13.5 5.5 16 11.5 9.5 (7) 20 15.5 5.5 20 15.5 7.5 20 15 24 19 9 24 19 11 13 (10.5) 22.5 16 26.5 20 10.5 26.5 20 12.5 14.5 (12) 23.5 18.5 27.5 22.5 12.5 27.5 22.5 14.5 16.5 (14) Note 1) Figures in the table above are used

Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 14 8 20 to 200 18 15.5 13 38 93 1/8 44 8 12 2 85 10 18 5.5 6 4 5 to 200 26 16.5 10 20 to 300 22 19.5 17 45 103 1/8 52.5 10 14 2 96 10 25 6.5 9 7 6 to 300 31 20 10 20 to 300 22 19.5 17 45 104 1/8 57.5 12 18 2 97 10 25 6.5 9 7 6 to 300 38 301 to 500 26 12 20 to 300 30 27 19 52 112 1/8 66 16 25 2 104 10 (

Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) 414 Air Cylinder: Non-rotating Rod Type Double Acting, Double Rod MBKW Series Standard Basic: (B) Cushion valve Port W V G 2 x Rc P G Width across flats KB Q E CJ1 CJP E D MM MM E KA B C CJ2 Section Q-Q Q JCM Width across flats B1 H1 A AL F H N MA MB Width across flats B1 ZZ + 2 x Stroke S + Stroke N F H + Stroke A AL H1 CM2 2 x 4

LEFS16/Ball Screw Drive (1 kg = 2.2 lb) Horizontal Vertical 12 12 Lead 5: LEFS16B 10 10 Work load: W [kg] Work load: W [kg] 8 8 Lead 10: LEFS16A 6 6 Lead 5: LEFS16B 4 4 Lead 10: LEFS16A 2 2 0 0 Speed: V [mm/s] 0 100 200 300 400 500 600 Speed: V [mm/s] 0 100 200 300 400 500 600 LEFS25/Ball Screw Drive Vertical Horizontal 20 20 Lead 6: LEFS25B Work load: W [kg] Work load: W [kg] 15 15 Lead

: HYCB32 to 63 Cushion (Width across flats 4) W V W V Port U U 2 x P (Rc, NPT, G) Width across flats KA 2 x 4 x J G G MM HA D E E T H1 MB Width across flats B1 K C MA FA AL B N A F N H S + Stroke FB ZZ + Stroke CJ5 CG5 (mm) Bore size A Stroke range AL B B1 C D Ee11 F FA FB G H H1 MA MB J K KA MM N P S T U V W HA ZZ HY 32 40 50 63 500 or less 22 24 32 32 18 20 27 27 50 58 70 84 17 19 24 24

With air cushion WA 2-M5 x 0.8 Relief port GB 2-P (Rc, NPT, G) GA GA RA MM H1 RA 10 10 Width across flats B1 MM H1 W W Width across flats B1 D D MAX.WH MAX.WH E-0.05 0 E-0.05 0 I AL H + Stroke K A AL C0.1 KA A K F F 8-J S + Stroke H ZZ + 2 Stroke NA (mm) MM NA P RA S WA WH 20 20 20 A AL Bore size B1 C D E F GA H H1 I M6 x 1 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 J K KA M14 x 1.5

0 20 10 30 40 50 60 Pushing force and trigger level range 120 70% 80 Specific Product Precautions 40% 40 0 0 20 40 60 80 100 120 140 Gripping point L [mm] Pushing speed [mm/sec] 42 Electric Gripper 3-Finger Type Step Motor (Servo/24 VDC) LEHS10, 20, 32, 40 Series LEHS RoHS How to Order 10 3 K 4 1 S 1 LEHS 6N q w e r t y u i o !

47 55 16 8 94 19 39 52.4 1/8 27 10 14 26 37 30 30 6 32 135 M14 X 1.5 50 Up to 300 17 30 58 62 20 11 108 27 45 64.5 1/4 32 12 18 44 32 35 33 7 41 155 M18 X 1.5 63 Up to 300 19 32 72 64 20 11 114 27 45 76.6 1/4 32 12 18 38 50 35 39 7 46 161 M18 X 1.5 With air cushion (mm) Bore (mm) Stroke range (mm) W P WA WB WC WD WH WH2 30 30 25 20 20 20 20 25 32 40 50 63 M5 M5 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1

Basic type 0.57 1.2 2.6 High precision type 0.63 1.4 2.8 20 28 42 Step motor (Servo/24 VDC) Motor size Motor type Encoder Incremental A/B phase (800 pulse/rotation) 24 VDC 10% Power supply [V] Power consumption [W] Note 5) 11 22 34 Standby power consumption when operating [W] Note 6) Max. instantaneous power consumption [W] Note 7) 7 12 13 14 42 57 Table Rotation Angle Range External stopper

H1 CJP 0 E 0.05 I CJ2 C Corner of the cover (20 to 63) B TH TT D JCM Width across flats KA Width across flats B1 MM CM2 TW TY TX 4 x TF +0.10 TE 0 CM3 (TV) ZZ + Stroke Z + Stroke TZ CG1 Clevis (20 to 63) (mm) CG3 CG3 Bore size (mm) Standard stroke A AL B1 B C CD CZ D GA E F GB H H1 I J KA MM L 20 25 32 40 50 63 20 23 23 29 35 35 12 15 15 20.5 26 26 (29) (33) (40) (49) (60) (74) 2 2 2 2 2

C Rc(PT)P Rear cylinder port Width across flats Rc(PT)P Front cylinder port Width across flats B1 MM W GR GR E D C GL1 GL W T 16 Effective thread length MB 4-J 16 GF 4-J V Q VA H1 N K F GE BN A H S + Stroke ZZ + Stroke With rod boot e 9 l 13 h f ZZ + Stroke (mm) Effective thread length (mm) Width across flats Stroke range (mm) Bore size (mm) D F B A B1 H1 BP GL B2 BN GC GL1 C GA GB GD Ee11

13 340 1/2 66 140 12 20 16 47 125 15 340 1/2 77 140 12 20 16 55 160 20 375 3/4 94 159 12 24 20 60 109 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW Front flange type: CHAWF Width across flats G 4-FD 4-J 2-Rc P T T V V Cushion adjustment screw MM Width across flats G GA Air release GA M MM R (max.) d d W W D E E D FY B MA a a FT C MA B F NA NA F K A A K

High Flow/ Power Saving Type Ep. 7 Ep. 9 Ep. 11 How to Order JSX 2 1U S N 403 R 5 GS B w y e r t u o i q U High flow type q Size w Valve type e Body material i Electrical entry Symbol Size 1 10 2 20 3 30 Symbol Valve type Symbol Body material S Stainless steel C Brass Symbol Electrical entry Size CE/UKCAcompliant 10 20 30 2(OUT) 1 N.C.

D-A9, D-A9V D-M9, D-F9W D-M9V, D-F9WV Bore size (mm) B W A W W B B A A 6 10 16 20 25 32 9.5 1.5 17.5 0.5 5.5 9.5 13.5 17.5 3.5(1) 13.5 5.5 16.5 3.5 9.5 13.5 12.5 16.5 7.5(5) 15.5 7.5 20 5.5 11.5 15.5 16 20 9.5(7) 19 11 24 9 15 19 20 24 13(10.5) 20 12.5 26.5 10.5 16 20 22.5 26.5 14.5(12) 22.5 14.5 27.5 12.5 18.5 22.5 23.5 27.5 16.5(14) Note 1) Figures in the table above are used as a reference

P Spring extend One-touch fitting port size P Spring return H1 H G F D N CX MM AL CI L P U A CD I B1 E K NA NN RR Bore size (mm) 0 0.033 20 41 8 13 8 12 M8 x 1.25 20 12 18 8 5 M20 x 1.5 9 15.5 13 5 28 15 24 1/8 11.5 20 0 0.033 25 45 8 13 10 12 M10 x 1.25 22 12 22 8 5.5 M26 x 1.5 9 19.5 17 6 33.5 15 30 11.5 1/8 26 0 0.033 32 45 8 13 12 20 M10 x 1.25 27 15 22 10 5.5 M26 x 1.5 12 19.5 17 6