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Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 40 25 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10

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10) D1 E B D2 A Model S C S C S C S C 0.016 0.043 MHZ2-10 K 7 12f8 52.8 11 15 Applicable tubing End boss assembly MHZ2-16 K 0.016 0.043 10 16f8 58.7 15 20 MHZ2-20 K 0.020 0.053 D2 12 20f8 70.5 19 22 0.020 0.053 MHZ2-25 K 15 25f8 82.9 24 25 D1 MHZ Other dimensions and specifications correspond to the standard type.

Electric Actuators

62 to 1000 to 1000 to 700 to 500 to 1000 LJ1H102PH-K 24 66 to 400 110 104 LJ1H102NH-K 28 70 to 400 LJ1H202PA-K 34 76 to 500 112 106 LJ1H202NA-K 38 80 to 500 LJ1H102PB-K 26 68 to 600 145 110 104 LJ1H102NB-K 30 72 to 600 LJ1H202PF-K 32 74 to 250 112 106 LJ1H202NF-K 36 78 to 250 LJ1H303PA-K 40 82 to 500 114 108 LJ1H303NA-K 42 84 to 500 Page Standard stroke (mm) and Speed (mm/s) Nonstandard

smcmaintenancepartslist

AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR50(K) AR40(K)-06 AR60(K) No.

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-X CXS -R 10 15 20ZZ SS Z Data (Z) Manual lever insertion 1.7 K KK Hexagon (O) (Z) (mm) O K Model CXS10-R CXS15-R Width across flats 12 6.5 8.5 Width across flats 13 (mm) Symbol ZZ Z SS KK Stroke 50 40 30 20 50 10 10 50 40 30 20 40 30 20 10 10 20 50 40 30 Model CXS10-R CXS15-R 24.5 40 50 142 132 117 107 125 30 115 100 80 19.5 97 90 45 Dimensions other than those listed above are the same

AC Servo Motor Driver (Pulse input type/Positioning type ）

LSN 44 6.2 k LOP 45 LOP RD RD 49 RD (Note 5) 24 V DC OPC 12 20 21 (Note 7, 8) 13 DICOM DICOM Approx. 14 (Note 7, 8) RA 1.2 k (Note 2) Approx. 100 PP 10 Isolated Approx. 1.2 k PP2 37 (Note 1) Approx.

NCQ2/CQ2

L1 20 Series (N)CQ2 The dimensions are the same with or without an auto switch.

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LVC Select an option mark in page 17-3-10 by Applicable Fluids Check List for special fluids outside of the standard. LVA VXP2130: Option C, K, Q, S only.

CRB2/CRBU2/CRB1

(mm) Size Size Q1 = M 15 20 30 40 Q1 = M 15 20 30 40 Thread Shaft type K T K T K T K T Thread M3 x 0.5 2.5 2.5 2.5 2.5 M3 x 0.5 2.5 2.5 2.5 2.5 L1 = L1 = M4 x 0.7 3.3 3.3 3.3 L1 M4 x 0.7 3.3 3.3 3.3 L1 M5 x 0.8 4.2 4.2 M5 x 0.8 4.2 4.2 Q1 Q1 62 Series CRBU2 (Sizes: 10, 15, 20, 30, 40) Made to Order XC1, 2, 3, 4, 5, 6, 7, 30 Shaft type Standard W J K Refer to page 36.

5 Port Solenoid Valve

Sumitomo 3M Limited Fujitsu Limited SOL.A SOL.B SOL.A SOL.B () () (+) (+) 17 17 Station 9 Station 9 () () (+) (+) 18 18 SOL.A SOL.B () () (+) 19 COM. (+) 19 Station 10 () () (+) 20 COM. (+) SpecialWiring Specifications (Option) [-K] 20 SOL.A SOL.B () (+) 21 Positive COM Negative COM Station 11 () (+) 22 Mixed single and double wiring are available as an option.

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K 20 m roll 100 m reel TUS1208 TUS0425 TUS0604 TUS0805 TUS1065 Model M Tubing O.D.

Smooth Cylinder/Low Speed Cylinder

Standard stroke (mm) Bore size 12, 16 20, 25 Standard stroke 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Double acting Action D Built-in Magnet Cylinder Model If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch.

Vacuum Pad

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

0.4

mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

Hydraulic

H G I J K L A B C D E F M R Size Tolerance +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 AD-FI-40 9 9 16 16 +0.027 0 +0.027 0 +0.027 0 +0.027 0 36 38 55 55 16 18 22 22 9 9 12 12 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 12 30 30

Compact Rotary Actuator Series CRQ2

double shaft length Change of double shaft length XA38 K 10, 15, 20, 30, 40 MSZ K J XA39 XA40 XA41 XA45 K K K XA46 CRQ2X MSQX Y Y Y Y Y 20, 30, 40 Y MRQ K, T J K K, T K 10, 15, 20, 30, 40 K K K K, T K X Z X, Z J Z J J, Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 J T Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft

Refrigerated Air Dryers Series IDF/IDU

AFF37B-14 AM650-14 37 176.5 300 AMH650-14 AMD650-14 AME650-14 AMF650-14 A B AT55C-20 IDFB55E HAW75-20 AFF75 -20 AM850-20 55 264.7 450 AMH850-20 AMD850-20 AME850-20 AMF850-20 A B AT75C-20 IDFB75E AFF75 -20 AM850-20 HAW110-30 75 353.0 600 AMH850-20 AMD850-20 AME850-20 AMF850-20 For screw compressors (when an aftercooler is installed) Air compressor Local line Sub line Main line Note 2) Air

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Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).