Cooling Capacity: 15 kW, Cooling Method: Water-cooled, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460-480 VAC (60 Hz)], Option: w/Caster Adjuster-foot and Fluid Fill Port

Cooling Capacity: 150, Thread Type: Rc, Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option 1: AK (A + K)

Cooling Capacity: 150 (15 kW), Cooling Method: A (Air-cooled), Pipe Thread: N [NPT, (w/Rc-NPT conversion Fitting)], Option: AK (w/Caster Adjuster-foot and w/Fluid Fill Port, Manual Fill)

Cooling Capacity: 150 (15 kW), Cooling Method: W (Water-cooled), Pipe Thread: N [NPT, (w/Rc-NPT conversion Fitting)], Option: AK (w/Caster Adjuster-foot and w/Fluid Fill Port, Manual Fill)

Cooling Capacity: 150 (15 kW), Cooling Method: A (Air-cooled), Pipe Thread: F [G, (w/Rc-G Conversion Fitting)], Option: AK (w/Caster Adjuster-foot and w/Fluid Fill Port, Manual Fill)

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

36.1 31.1 32.1 27.1 R 1/8 14.2 14.2 18 21 37.2 41.7 40.1 42.6 45.6 48.4 13.5 18.5 16 17 18.5 21 22.9 28.2 21.9 25.2 28.2 31 10.9 12.9 10.9 12.9 14 16.2 16.2 18.4 18.3 20.2 ASS 33 40.4 35.4 34.4 29.4 R 1/4 18.5 18.5 ASR 36 40 Reference dimensions for M5 and R threads after installation. 12.9 ASF Inch Size A M1 L5 Max.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS1001FG-04-X214 ASV AK Needle Valve/Flow Characteristics VCHC Note) The flow characteristics are representative values.

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

34.5 17 50 (51) AS32l1FSl-U03-06 6 1/4 19 16.6 AK 10.4 21.8 32.1 28.7 13.3 24.5 28.5 9.3 19.2 36 (37) AS32l1FSl-U03-08 8 13.2 22.7 33 28 14.2 AS32l1FSl-U03-10 10 15.9 26.7 37 15.6 39 (40) AS32l1FSl-U03-12 12 18.5 29.7 40 26.8 17 41 (42) AS42l1FSl-U04-10 10 1/2 24 (23.8) VCHC 3/8 19 16.6 55.4 54 50.2 48.8 ASR ASQ 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 60 (59) AS42l1FSl-U04

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1110 B Diaphragm Valve for Ultra High Purity Air operated type Series AZ3542 & 4542 Dimensions inch (mm) AZ3542 & 4542 Ports: 2PW (Welded) Ports: 2P (Machined) M5 x 0.8 Actuation port Actuation port M5 x 0.8 1.57 (40) 1.57 (40) FORGED BODY BAR STOCK BODY Note) 2.24 (57) 2.24 (57) 0.44 (11.2) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Model Metric size Inch size ASP 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS1001F 6, 10, 16, 20 ASN AS2001F 20, 25, 32 AS2051F 20, 25, 32, 40 AQ AS3001F 40, 50, 63 ASV AS4001F 63, 80, 100 AK Flow Rate and Effective Area ASS AS1001F AS2001F AS3001F AS2051F AS4001F Model JIS Symbol Metric size 6 6 8 10 6 8 3.2, 4, 6 4 10, 12 12 ASR Tubing O.D.

Vacuum System Peripherals:

40 e Valve Model Fill in the blanks below with symbols of necessary specifications.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

AS221F-02 AS231F-02 R 1/4 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" 40, 50, 63 AS321F-02 AS331F-02 R 1/4 40, 50, 63 AS321F-03 AS331F-03 R 3/8 63, 80, 100 AS421F-04 AS431F-04 R 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can be

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASN M5 Nil U10/32 01 02 03 04 AQ N ASV AK Needle Valve/Flow Characteristics Note) The flow characteristics are representative values.

Cooling Capacity: 10 kW, Cooling Method: Water-cooled, Pipe Thread: F [G, (w/Rc-G Conversion Fitting)], Option: w/Caster Adjuster-foot and w/Fluid Fill Port, Manual Fill

Cooling Capacity: 11.5kW, Thread: G, w/Rc-G Conversion Fitting, Option: A + K

Cooling Capacity: 100 (11.5kW), Thread: F (G, w/Rc-G Conversion Fitting), Option: AK (A + K)

Cooling Capacity: 100 (10 kW), Cooling Method: W (Water-cooled), Pipe Thread: F [G, (w/Rc-G Conversion Fitting)], Option: AK (w/Caster Adjuster-foot and w/Fluid Fill Port, Manual Fill)

CY1

25 98 7.0+Lo 32 180 8.6+Lo 40 364 10.4+Lo Bore size (mm) 6.

Possible to transfer a workpiece at low-speed.

20 30 40 Size 20 30 40 The figure shows the view from the long shaft end.