NCQ2/CQ2

D 35 40 40 45 40 45 40 45 40 45 45 50 55 65 C Mounting bolt part no.

Electric Actuators

24 66 to 400 110 104 LJ1H102NH-K 28 70 to 400 LJ1H202PA-K 34 76 to 500 112 106 LJ1H202NA-K 38 80 to 500 LJ1H102PB-K 26 68 to 600 145 110 104 LJ1H102NB-K 30 72 to 600 LJ1H202PF-K 32 74 to 250 112 106 LJ1H202NF-K 36 78 to 250 LJ1H303PA-K 40 82 to 500 114 108 LJ1H303NA-K 42 84 to 500 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Deflection 100 200 300

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LVC Select an option mark in page 17-3-10 by Applicable Fluids Check List for special fluids outside of the standard. LVA VXP2130: Option C, K, Q, S only.

CRB2/CRBU2/CRB1

(mm) Size Size Q1 = M 15 20 30 40 Q1 = M 15 20 30 40 Thread Shaft type K T K T K T K T Thread M3 x 0.5 2.5 2.5 2.5 2.5 M3 x 0.5 2.5 2.5 2.5 2.5 L1 = L1 = M4 x 0.7 3.3 3.3 3.3 L1 M4 x 0.7 3.3 3.3 3.3 L1 M5 x 0.8 4.2 4.2 M5 x 0.8 4.2 4.2 Q1 Q1 62 Series CRBU2 (Sizes: 10, 15, 20, 30, 40) Made to Order XC1, 2, 3, 4, 5, 6, 7, 30 Shaft type Standard W J K Refer to page 36.

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Smooth Cylinder/Low Speed Cylinder

flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8

AC Servo Motor Driver (Pulse input type/Positioning type ）

642.7 Setting range: 1 to 40 PA10 INP In-position range Set an in-position range per command pulse.

Hydraulic

25 to 1000 75 3 212 156 40 53 145 40 (mm) Rod series B-series rod C-series rod Bore size (mm) MM A MA D E MM K G H ZZ A MA D E K G H ZZ 32 34 M16 x 1.5 25 22 18 7 14 55 268 -0.025 -0.064 36 40 40 M16 x 1.5 25 22 18 7 14 55 268 M20 x 1.5 30 27 22.4 9 19 60 278 -0.025 40 50 46 M20 x 1.5 30 27 22.4 9 19 60 296 M24 x 1.5 35 32 28 11 24 65 306 -0.064 46 63 55 M24 x 1.5 35 32 28 11 24

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After tightening by hand, the barb fitting type should be tightened by an additional 1/4 rotation using an appropriate wrench. 2. After tightening by hand, the barb elbow type should be tightened by an additional 1/2 rotation using an appropriate wrench. 2) M5 1. After tightening by hand, the barb fitting type should be tightened by an additional 1/6 rotation using a suitable tool. 2.

Compact Rotary Actuator Series CRQ2

double shaft length Change of double shaft length XA38 K 10, 15, 20, 30, 40 MSZ K J XA39 XA40 XA41 XA45 K K K XA46 CRQ2X MSQX Y Y Y Y Y 20, 30, 40 Y MRQ K, T J K K, T K 10, 15, 20, 30, 40 K K K K, T K X Z X, Z J Z J J, Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 J T Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft

5-Port Solenoid Valve

Series SUP blocking disk assembly EXH blocking disk assembly SY3000 SY30M-40-1A SY30M-40-2A SY5000 SY50M-40-1A SY50M-40-1A SY7000 SY70M-40-1A SY70M-40-1A MLabel for blocking disk Label to indicate and confirm on the manifold where the SUP/EXH blocking disk assemblies were inserted. (3 sheets each) * If the blocking disk assembly is ordered using the manifold specification sheet and ordered

Modular Design with Uniform Body Style

Series Body size Details 20 30 40 50 60 AF p. 61 AFM AFD p. 71 AR(K) p. 79 AW(K) p. 98 AL p. 89 2 A Modular F.R.L.

Table of Contents

K-F-X60 LJ1H202NAStroke K-F-X60 Without motor Specifications Combinations other than the above cannot be manufactured.

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Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Made to Order

FL1 (A) F1 K (mm) (H) A F1 H FL1 16.5 K 3 Bore size Stroke range 24 32 40 51 21 Up to 1000 22 18 54.5 3 22.5 Up to 1000 : Same as the standard model. 1896

Refrigerated Air Dryers Series IDF/IDU

Combination of K, L and V cannot be achieved because an auto drain can only be attached to a single option.

Table of Contents

40 50 50 55 55 65 85 , Misc.

Table of Contents

Note 2) Drain guide is G 1/4 (applicable to AW30 to 40). 1 (4) AW20(K) to 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) AW20(K) AW30(K)/40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) PPA 2 6 8 C J (5) AL N R W Port size Z (6) AW20(K) to 40(K) Body size Symbol Port size When more than one specification is required, indicate in ascending alphanumeric order.

5

WA B C B1 REC A K N Smooth Smooth ZZ + Stroke S + Stroke N F M H Low Speed (mm) MQ Bore size (mm) A AL B B1 C D E F G H H1 J K KA RHC 40 30 27 60 22 44 16 32 10 15 51 8 M8 x 1.25 6 14 50 35 32 70 27 52 20 40 10 17 58 11 M8 x 1.25 7 18 63 35 32 85 27 64 20 40 10 17 58 11 M10 x 1.25 7 18 80 40 37 102 32 78 25 52 14 21 71 13 M12 x 1.75 10 22 100 40 37 116 41 92 30 52 14 21 72 16 M12 x 1.75

Magnetically Coupled Rodless Cylinder

32 Angle coefficient (k) : k = [to 45 (= )] = 1, [to 60] = 0.9, [to 75] = 0.8, [to 90] = 0.7 Lo: Distance from mounting surface to load center of gravity (cm) 40 6 10 15 20 Bore size (mm) 2.72 1.6 + Lo 5.55 1.95 + Lo 15.96 2.4 + Lo 41.7 2.8 + Lo Allowable drive resisting force (FA) (kg) 5.