TABLE OF CONTENTS

Body Brass Body Hydrolic Oil Non-Flammable NR NR NR NR Standard R R R R Hydrochloric Acid NR NR NR NR Hydrogen R R R R # Inert Gases R R R R JP4 JET Fuel V V V V JP5 JET Fuel V V V V Kerosene R R R R Ketones PP NR PP NR Lacquer PP PP PP PP Linseed Oil R R R R Lubrication R R R R Mercury R*** NR R*** NR Natural Gas R R R R Nitric Acid PP NR PP NR Nitrogen R R R R Oxalic Acid NR NR NR NR Oxygen

Vacuum Unit

K V V J V1 R V2 V V V B V None (SI unit only) C V V D V None (SI unit only) E Pressure switch for vacuum 0 to 101 1 Install the release valve or vacuum breaker in the middle of the vacuum piping. 2 Supply valve maintains vacuum by energization (20 ms or more). Stopping the vacuum turns on the release valve. Refer to the precaution on page 44.

Secondary Batteries

Applicable cylinder series: 90-/91-CDLQ, 90-RSDQ Applicable auto switches : D-M9BW(V)L-900, D-M9BW(V)SDPC-900, D-A90L-900 Applicable bore size (mm) Cylinder series 20 25 32 40 50 Auto switch mounting brackets are not required.

LEC-OM02704CN

[] 2.5 1.2 (3) [] 20 1 [J] 5.6 22 145V TND20V-680KB (135[V]) (78) 370V TND10V-221KB (360[V]) 1.

AMR3000 to 6000

IS1000-01 Model 0.1 to 0.4 MPa Set pressure range (OFF) 0.08 MPa Differential 1a Contact point construction 2 VA AC, 2 W DC Max. contact point capacity 12 V 48 V 100 V 24 V Voltage (AC, DC) 50 mA 40 mA 20 mA 50 mA Max. current 1.2 ms Operating time 30 G Shock resistance JIS Symbol AMR5100 AMR4000 AMR3000 14-7-1 2 Series AMR3000 to 6000 How to Order E3 03 R S AMR 4 0 00 Adapter Assembly (Part

AMR3000 to 6000

IS1000-01 Model 0.1 to 0.4 MPa Set pressure range (OFF) 0.08 MPa Differential 1a Contact point construction 2 VA AC, 2 W DC Max. contact point capacity 12 V 48 V 100 V 24 V Voltage (AC, DC) 50 mA 40 mA 20 mA 50 mA Max. current 1.2 ms Operating time 30 G Shock resistance JIS Symbol AMR5100 AMR4000 AMR3000 14-7-1 Series AMR3000 to 6000 How to Order E3 03 R S AMR 4 0 00 Adapter Assembly (Part

SMC Basic Pneumatics

A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .

%silltr

A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

(Special Order) M A N U A L O V E R R I D E P I L O T O P E R AT O R Non Locking Push Type (Flush) *A Non Locking Push Type (Extended) B Lock Type (Screw Type) *C Lock Type (Lever) Internal R External (Special Order) V O LTA G E Note) * Special Order 1 100VAC (Special Order) 2 200VAC (Special Order) 3 110VAC 4 220VAc 5 24VDC 6 12VDC 9 Others (Special Order) E L E C T R I C A L E N T R Y

Vacuum Equipment

If the leakage volume is 30 /min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

Vacuum

l xDiinensiom:With Sp*r 2 Nllt $enies I Indluifrnl Unll/ llalu (Dimensions in millimeters Valve: Applicable valve / NVJ300 (N.O. type) Nzxi-v@K38@@@ Spacer 2 Gor side Srf,f,r,r 2,/ZX1-s,2 Ak supply passur port Exterml vacuum rreestxe aoat Valve: Appllcable valve /Air operatd Nar-v@K6 Ak opEted EXrA) GXr A) M3XO,5 r ^ T ul . oi : l f r l | t M5xO.8 c (PV pdt) Air supply Exthal v Nol6) XDi.nensidrstFo

Vacuum

l xDiinensiom:With Sp*r 2 Nllt $enies I Indluifrnl Unll/ llalu (Dimensions in millimeters Valve: Applicable valve / NVJ300 (N.O. type) Nzxi-v@K38@@@ Spacer 2 Gor side Srf,f,r,r 2,/ZX1-s,2 Ak supply passur port Exterml vacuum rreestxe aoat Valve: Appllcable valve /Air operatd Nar-v@K6 Ak opEted EXrA) GXr A) M3XO,5 r ^ T ul . oi : l f r l | t M5xO.8 c (PV pdt) Air supply Exthal v Nol6) XDi.nensidrstFo

Gun Type Ionizer

(Rated voltage 125 V, Plug JIS C 8303, Inlet IEC 60320-C13) *1 Measured with a high pressure probe of 1000 M and 5 pF *2 Measurement value based on a charged plate (Dimensions: 150 mm x 150 mm, Capacitance: 20 pF) as defined in the U.S.

Miniature Regulator Series ARJ210

AV Regulating pressure range AU Ambient and operating temperature range Weight AF Model AR Port size Model IR IN OUT ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 Rc 1/8 VEX NPT 1/8, M5 x 0.8 NPT 1/8 4 One-touch fitting AMR R 1/8, M5 x 0.8 6 One-touch fitting NPT 1/8, M5 x 0.8 5/32" One-touch fitting ITV 1/4" One-touch fitting JIS Symbol

Title not found

r l i | v l l . s o w d ; l w | v w f f Y L : f <.t __ I i i Y f Fw -t wl5uwl sor-;sS sownsot Y r.L. rr 5 r r a r s o s o w l s o w f s o v l , * ; * 1 i ' l , l -1 l a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a MX9IEtr-@EHN+NE_I T l I r I I I I l I o , o o @ o a @ @ @ esrio" ruup @Auto switch See catalogs lor switch sereqon

Table of Contents

1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

MGC

70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 50 75 150 115 82.5 45 194 42 M10 200 95 12 11 135 115 210 190 19 23 142 Bore size (mm) W WH W V U T S Z R Y Q X O P 20 25 32 40 50 30 23 36 40 86 12 26 140 12 80 21 30 M6 x 1 M5 x 0.8 30 25 44 47 98 13 31 153 12 80 21 37 M6 x 1 M5 x 0.8 25 28.5 50 53 112 16 38 161 12 82 21 37 M6 x 1 Rc 1/8 20 33 60 63 132 20 47 188 12 92 25 44 M8 x 1.25

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

1 V 1.04 V 1.05 V 5 V Current output (4 to 20 mA) 4 mA 4.16 mA 4.19 mA 20 mA *1 The analog output current from the connected equipment should be 20 A or less when selecting 0 to 10 V.

“

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.02 to 0.2 MPa V V V 1 0.02 to 0.4 MPa V V V 2 0.02 to 0.8 MPa V V V + ARM ARP e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR-A IR-A IR r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + IRV VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH t Port size SRP a

Direct Solenoid

5 1 . 1 Eody '/bEooy ,l3lnt|yr.rdudos body and (2) rodd| pltls. v.' Body AlBafiUy lrr|r|dr bodv *rd 12) bqd.n dns. 1sl $!ool A Sbr As,y. 1 Spdn9 A,ICI338 1 -!sqp!r arr$&5 q!!!o 1 Spec6r arr338.l 7 a,rl3s&s Sol. Ga3kt 4xT33314 9. 1 I 115'120 V 5ffi0 Hz 220/2{0 V glto Hz z v 50to Ha a@t{}9 am1-r0 aml{7 I Sol. Cap Arsy. (Rut$r acc68s ptug) I Sol. Cap A3sy. {RacBd nontock op6r.) c. Sol.