ZP

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

SQ1000/2000

D side 4.6 O-ring When an EXH passage is shut off with an EXH block plate, a label is attached for external confirmation of the shut off position (one label each). Shut off labels are applied when EXH block plates are ordered with manifolds. EXH passage U side R R P R R P EXH passage shut off SUP/EXH passages shut off Set of 2 pcs.

Basic type / Direct mount type Series CY3B/CY3R

6 t !0 i q o u y !7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

Made to Order

14 6 14 17 5 16 Rc1/8 NPT1/8 G1/8 52 69 40 5.5 9 depth 7 M10 x 1.5 12 M6 x 1.0 0.07 0.15 17 7 19 22 7 20 Rc1/4 NPT1/4 G1/4 64 86 50 6.6 11 depth 8 M12 x 1.75 15 M8 x 1.25 22 0.07 0.15 8 28.5 19 7 25 Rc1/4 NPT1/4 G1/4 77 103 60 9 14 depth 10.5 M16 x 2 M10 x 1.5 21 Bore size Clamp stroke 50 mm Clamp stroke 20 mm Clamp stroke 10 mm Q R S T 32 40 50 63 Q R S T Q R S T 148 140 74 7.5 168 160 84

AC

1 Aluminum alloy VS7-2-A Aluminum alloy Sub-plate r t y u i o !0 !2 !3 !4 !5 !6 Block packing !

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

q w e r t y u i o !

Air Cylinder

With auto switch Single acting, Spring extend 6 r o u i e w y t !6 !5 !8 !1 !0 !2 !4 !3 !7 ! ! With auto switch 10, 16 r o u i e w y t !6 !5 !0 !2 !3 !4 !7 !8 !1 ! With auto switch Component Parts No.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Order) E L E C T R I C A L E N T R Y O P T I O N S None Z With Indicator Light and Surge Voltage Suppressor F Through Base H O W T O O R D E R M A N I F O L D S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 DETAILS OF YOUR LOCAL SALES OFFICE 2.74 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P

Compact Rotary Actuator Series CRQ2

2 u t e o @3 @1 @4 @0 @6 @0 CRA1 CRQ2 q w r y !5 i MSQ q w r y !5 !6 i MSZ CRQ2X MSQX MRQ With cushion Size 20/30/40 With auto switch and cushion Size 20/30/40 !3 !0 !3 !0 !4 !7 !1 !9 !2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

Hydraulic

160 42 9 174 174 140 45 100 38 17 36 22 M16 x 2 28 34 38 M33 x 2 40 3/4 43 20 205 140 240 108 (mm) Bore size (mm) ZZ R S T V W 40 246 37 114 11 7.5 8 50 262 43 116 11 10 9 63 280 47 120 11 12 10 80 312 57 132 11 16 13 100 340 66 140 12 20 16 125 340 77 140 12 20 16 160 375 94 159 12 24 20 110 Series CHAW Dimensions Center trunnion type: CHAWT ZZ + 1/2 stroke 2-Rc P T T 4-J Cushion adjustment

Table of Contents

1 Drain q r e w t i u y o !0 !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

SY

20 20 stations D R Includes the number of blanking plate assemblies.

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

EX120/121/122

Internal Circuit (Brown) +5 V +24 V TD+ TD0 V q w e r VP R x D/T x D-N DGND R x D/T x D-P SHIELD q w e r t OUTPUT Internal circuit COM A +24 V RD+ RD0 V q w e r INPUT GND FG DC-DC converter (insulated) GND +24 V TD+ TD0 V q w e r OUTPUT Power supply for output +24 V 0 V q w COM D Power supply for the input and for the control unit of the Gateway +24 V 0 V q w +24 V RD+ RD0 V q w e r INPUT

0.4

-STA1) 120 80 4 46.2 ERR T/R RUN (35) 0 1 DIP SW.

15

t H R q Accuracy e Motor mounting position r Motor type t Lead [mm] y Stroke [mm] Nil Basic type H High precision type 50 50 to to 1200 1200 Symbol LEFS25 LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 Nil In-line R Right side parallel L Left side parallel Symbol Type NZ Mounting type Z NY Mounting type Y NX Mounting type X NW Mounting type W NV Mounting type V NU Mounting type U NT Mounting