Cooling Capacity: Cooling Capacity: 3800W/4200W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Method: Water-cooled Refrigeration, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: Applicable to Deionized Water Piping

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: B (Earth Leakage Breaker)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: BJ (B + J)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: J (Automatic Water Supply Function)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: T (High-pressure Pump)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: MT (M + T)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: BJM (B + J + M)

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: Earth Leakage Breaker

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + J

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: Automatic Water Supply Function

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: High-pressure Pump

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: M + T

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + J + M

Air Cylinder Series CM2

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN 204 Air Cylinder: With End Lock Series CBM2 Specifications Bore size (mm) 40 20 25 32 Holds the cylinders home position even if the air supply is cut off.

Air Cylinder

10.5 40 41 46 20 77 90 102 115 140 12.5 25 37.5 50 75 181 194 206 219 244 27 10.5 Symbol Stroke (mm) With Air Cushion Boss-cut Female Rod End (mm) (mm) Bore size A1 H MM ZZ 20 8 20 M4 x 0.7 95 25 8 20 M5 x 0.8 95 32 12 20 M6 x 1 97 40 13 21 M8 x 1.25 125 Bore size WA 20 13 25 13 32 13 40 16 Bore size ZZ Without With rod boot 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 20 103 130 143

Air Cylinder Series CA2

Stroke range (mm) A Bore size (mm) AL B B1 C D E F G H1 J K KA M MM N CS1 P Without rod boot With rod boot 40 Up to 500 20 to 500 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 11 M14 x 1.5 27 1/4 3/8 3/8 1/2 1/2 CS2 50 Up to 600 20 to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 11 M18 x 1.5 30 63 Up to 600 20 to 600 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 14 M18 x 1.5 31 80 Up to

CA2

S + Stroke H ZZ + l + Stroke ZZ + Stroke MB1 CA2 CS1 Stroke range (mm) A Bore size (mm) B C AL B1 D E F G H1 J KA M MM With rod boot Without rod boot C76 40 50 63 20 to 500 up to 500 30 27 60 22 44 16 32 10 15 M8 x 1.25 14 11 M14 x 1.5 8 20 to 600 up to 600 35 32 70 27 52 20 40 10 17 M8 x 1.25 18 11 M18 x 1.5 11 C85 20 to 600 up to 600 35 32 85 27 64 20 40 10 17 M10 x 1.25 18 14 M18 x 1.5

e

1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 LC3F2 LC3F2 Speed (mm/s) Speed (mm/s) Speed (mm/s) Xm Xm Load Mass: E-MY2H (Single Axis) D-m D-m E-MY E-MY E-MY2H/m1 E-MY2H/m2 E-MY2H/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) 10 10 10 E-MY2H25 E-MY2H25 E-MY2H25 5 5 5 E-MY2H16 4 4 E-MY2H16 4 E-MY2H16 3 3 3

Vacuum

4.5 40 7.5 7 6 Deptt 6 5 1 2 5 15.5 78.5 29 5 M4 x 0.7 6 M O x I O I 20 5.5 I 46 I 9.5 Deptf 8 '13.519.5 89 tlictD!