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www.stevenengineering.com I 6.11 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H O U T B U F F E R ZPT V A C U U M E N T R Y ( A L S O M O U N T I N G T H R E A D D I A) P A D D I A M E T E R S Y M B O L T H R E A D D I A M E T E R 2~ 8 10~ 16 20~ 32 40 50 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 P A D M AT E R I A L Male

C J H F I Hexagon width across flats 8 M5 x 0.8 J H F Hexagon width across flats 10 Hexagon width across flats 2 Hexagon width across flats 12 M8 x 1.25 Y D C Hexagon width across flats 12 Hexagon width across flats 3 2 A B 3 2 A B Dimensions: 10 mm Stroke (mm) With a stroke of 10 mm A B C D F H I J Y Model ZPT10F10-B5-A10 10 12 10 12.5 27 38.5 74.5 1.5 ZPT13F10-B5-A10 13 15 23 10.5 13 27.5

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc

Type: Thermo-Chiller, Cooling Method: Air-Cooling, Cooling Capacity: 1,100/1,300 W (50/60 Hz), Piping thread type: Rc, Optional specifications: None

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

www.stevenengineering.com I 1.83 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCA1 H O W T O O R D E R S E R I E S N C A 1 A I R C Y L I N D E R O P T I O N S A D J U S T A B L E S T R O K E E X T E N D X C 8 O P T I O N XC8 A NC A1 A U T O S W I T C H C A P A B L E M O U N T I N G A D J U S TA B L E R A N G E A: 0~1 B: 0~2 B O R E S I Z E S T R O K E T E C H N I C A L SPECIFICATIONS A D J U S

Pad Dimensions/Models With buffer 10 to 40 w r q ZPT 10 D N J 10 A10 B5 y Connection thread (Male thread) L Width across flats P Buffer specification e M A10 M10 x 1 A14 M14 x 1 E (Buffer body) J Rotating K Non-rotating t Vacuum inlet (Female thread) N Width across flats G H H F B5 M5 x 0.8 B01 Rc1/8 N01 NPT1/8 T01 NPTF1/8 K Width across flats J A Model A B C D2 E F G H J K Vacuum inlet

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

A 6.5 3.2 7 6 NN x M4 x 0.7 tapped through hole +0.025 0 3H9 ( ) depth 2 3H9 ( ) depth 2 +0.025 0 A 4 HB GB Cross-sectional view A-A Dimensions [mm] Model F G GB H HB I J M N NN Z ZZ MXQ6A-10Z 22 18 9 23 38 10 27.5 64.5 4 2 50 60 MXQ6A-20Z 25 15 9 26 38 10 27.5 74.5 4 2 50 60 MXQ6A-30Z 21 12 48 13 37.5 95.5 6 3 63 73 MXQ6A-40Z 26 10 24 28 48 15 47.5 107.5 6 3 75 85 MXQ6A-50Z 27 20 34 28

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

5000 0 10 5000 15000 Flow rate [L/min (ANR)] 0 15000 Flow rate [L/min (ANR)] 90 AL20-D to AL60-D Series Dimensions AL20-D T N S J M U Bracket (Option) D R C B V Q IN OUT 2 x P (Port size) A Clearance for maintenance G S N T U D M J AL30-D to AL40-06-D R C V Q IN OUT 2 x P (Port size) B A E Clearance for maintenance G AL50-D to AL60-D T N S J M D U Bracket (Option) R V Q C B IN OUT 2 x P

A port B port 3-Q1 For unit mounting (mm) A B C D E(g6) F(h9) G H J K L M N P Q1 R S1 S2 T U V W X Model CRBU2W15-D CRBU2W15-DE CRBU2W20-D CRBU2W20-DE CRBU2W30-D CRBU2W30-DE M5 x 0.8 M3 x 0.5 10.5 10.5 11 10 11.511 14 13 12 13 15.514 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 15.5 6 10 0.5 29 M3 x 0.5 3.5 M3 x 0.5 21 3 29 36 48 0.004 0.012 0 0.043 6 14 42 34.5 10 20 1.5 M5 x 0.8 17 7 10 0.5

A port B port 3-Q1 For unit mounting (mm) A B C D E(g6) F(h9) G H J K L M N P Q1 R S1 S2 T U V W X Model CRBU2W15-D CRBU2W15-DE CRBU2W20-D CRBU2W20-DE CRBU2W30-D CRBU2W30-DE M5 x 0.8 M3 x 0.5 10.5 10.5 11 10 11.511 14 13 12 13 15.514 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 15.5 6 10 0.5 29 M3 x 0.5 3.5 M3 x 0.5 21 3 29 36 48 0.004 0.012 0 0.043 6 14 42 34.5 10 20 1.5 M5 x 0.8 17 7 10 0.5

A port B port 3-Q1 For unit mounting (mm) A B C D E(g6) F(h9) G H J K L M N P Q1 R S1 S2 T U V W X Model CRBU2W15-D CRBU2W15-DE CRBU2W20-D CRBU2W20-DE CRBU2W30-D CRBU2W30-DE M5 x 0.8 M3 x 0.5 10.5 10.5 11 10 11.511 14 13 12 13 15.514 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 15.5 6 10 0.5 29 M3 x 0.5 3.5 M3 x 0.5 21 3 29 36 48 0.004 0.012 0 0.043 6 14 42 34.5 10 20 1.5 M5 x 0.8 17 7 10 0.5

QCR: When the internal volume of a rotary actuator varies depending on the A and B ports, use formula (1). P + 0.1 0.1 QCR = V x x 10-. Formula (1) P + 0.1 0.1 Formula QC2 = QC x n x Number of actuators x Reserve factor . Formula (5) QCR = 2V x x 10-. Formula (2) P 0.1 QCP = 2 x a x L x x 10-.

E L Double shaft/Port location: Side ported MRQ K G1 F D B N V1 Body (B) T V2 M S Body (A) C G2 J F L A 2 x R E Size: 10 Size: 10, 15, 20, 30, 40 A port B port N W 2 x R 2 x M3 x 0.5 depth 3 Size 10 only (For unit mounting) Y X DRefer to page 61 for details of shaft types J, K, T and Y.

J Use caution when handling a cylinder, which is running at a high speed and a high frequency, because the surface of a cylinder tube could get so hot enough as to cause you get burned. D-C7/C80 50 50 + 45 (n 2) 10 15 15 + 45 ( n 2) (n = 2, 4, 6) 2 D-H7/H7W D-H7NF D60 + 45 (n 2) 60 15 10 D-C73C/C80C D-H7C 15 + 50 ( n 2) (n = 2, 4, 6) -X 2 65 + 50 (n 2) 65 15 10 4.

J Use caution when handling a cylinder, which is running at a high speed and a high frequency, because the surface of a cylinder tube could get so hot enough as to cause you get burned. D-C7/C80 50 50 + 45 (n 2) 10 15 15 + 45 ( n 2) (n = 2, 4, 6) 2 D-H7/H7W D-H7NF D60 + 45 (n 2) 60 15 10 D-C73C/C80C D-H7C 15 + 50 ( n 2) (n = 2, 4, 6) -X 2 65 + 50 (n 2) 65 15 10 4.