smcmaintenancepartslist

For 20 to 63, remove the lock piston seal. d. For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !

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w e t o u q !

V

www.stevenengineering.com I 6.11 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H O U T B U F F E R ZPT V A C U U M E N T R Y ( A L S O M O U N T I N G T H R E A D D I A) P A D D I A M E T E R S Y M B O L T H R E A D D I A M E T E R 2~ 8 10~ 16 20~ 32 40 50 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 P A D M AT E R I A L Male

Compact Cylinder

28 36 38 43.5 48.5 57 65.5 U 21.5 22.5 25 28 30 32 37.5 42.5 51 59 U 19 20 23 26 27.5 30 35 40.5 49 57 U 23.5 24.5 27.5 30.5 36.5 40 45 50.5 59 67 U 26.5 27.5 30 32.5 39.5 42.5 48 53.5 61.5 70 U 21 22 24.5 27.5 34 37.5 43 48 56.5 64.5 U 27.5 28.5 31 34 40.5 43.5 49 54.5 62.5 71 U 24.5 25.5 28 31 37.5 40.5 46 51.5 59.5 68 U 33 36.5 42 47 55.5 65.5 12 16 20 25 32 40 50 63 80 100 The applicable

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

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D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !

ZP

Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made

AC Servo Motor Driver (Pulse input type/Positioning type ）

Connect the driver power output (U/V/W) to the servo motor power input (U/V/W) directly. Do not let a magnetic contactor, etc. intervene. Otherwise, it may cause a malfunction. CAUTION Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U V V M V M V W W W W 3 2 3.

Electric Actuator

LEY ll -lB 16 25 32 A B C With motor cover/LEY ll -lC 16 25 32 Motor cable Motor cable Motor cable (2 x 5) Step motor Servo motor Step motor Servo motor 15 15 Lock cable (3.5) 20 24 Lock cable 20 20 20 20 24 Cable length 400 Motor cable Cable length 250 65 24 65 20 24 Motor cable (2 x 5) W X X2 [mm] [mm] T2 X2 Size T2 Step motor Servo motor Size W X W X 16 25 32 7.5 83 16 25 32 105.8 124.3

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1 Drain q r e w t i u y o !0 !

Compact Hydraulic Cylinder

1 u t w y o !2 Bore size 20 Bore sizes 20 & 25 CHQ CHKm CHN CHM CHSm CH2m Description Material Note Parts List No.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

For large flow (3.2 W) For large flow, vacuum (3.2 W) Nil V U W 02 2 stations Note) Note) 20 20 stations (Max.)

4/5 Port Solenoid Valve

Please be sure to fill in the blank referring to back page 10. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P)

0.4

S AXT100-1-P Note 3) U S U S U S w U S AXT100-1-J 20 Note 3) U S AXT100-1-F Note 3) e r AXT100-1-GU20 Note 1) Suffix -XP to the end of the part number for dust-protected SI unit.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly 11 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly 12 AXT625-3A-20 End plate (D) !

AC Servo Motor Driver (CC-Link Type ）

(b) Connection of driver and servo motor 1) The servo motor power supply terminals (U, V, W) of the driver match in phase with the power input terminals (U, V, W) of the servo motor. Servo amplifier Servo motor Driver U U V V M W W 2) The power supplied to the driver should not be connected to the servo motor power supply terminals (U, V, W).

VFS

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

3 w @1 @2 !5 t y q r e !0 !3w #0 o @0 !6 i !9 !8 u o @0 !7 i !9 !8 u t @6 @4 #1 @3 @5 Round bar rod end type (D) Chamfered rod end type (K) @7 #4 #2 32, 40, 50 20 Only one roller is provided for 32. @2 u !5q y !4 !9 i@0w!2!1 @1 @2 t u !5 !4!8!9i w!2!1 !0 o e @0 !6 q y !0 o e !6 !8 t @1 Component Parts No. Description Material Note Component Parts (For single acting) No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

Modular F.R.L. Units

When the above factors are present, or there is some doubt, use a metal bowl for safety. 86 AL10-A to AL60-A Series Construction AL10-A AL20-A w q t w q e OUT IN OUT IN y r u y u AL30-A/AL40-A AL50-A/AL60-A w q t w q t e e IN OUT IN OUT r y u r i y u Component Parts No.