AC Servo Motor Driver (CC-Link Type ）

50 20 9 15 9.

Base Mounted Metal Seal/Rubber Seal Series VQ

The manifold with an vacuum ejector unit type is mounted from the U side. One vacuum ejector unit corresponds to one station.

NCQ2/CQ2

22.5 25 28 30 32 37.5 42.5 51 59 U 19 20 23 26 27.5 30 35 40.5 49 57 U 23.5 24.5 27.5 30.5 36.5 40 45 50.5 59 67 U 26.5 27.5 30 32.5 39.5 42.5 48 53.5 61.5 70 U 21 22 24.5 27.5 34 37.5 43 48 56.5 64.5 U 27.5 28.5 31 34 40.5 43.5 49 54.5 62.5 71 U 24.5 25.5 28 31 37.5 40.5 46 51.5 59.5 68 U 33 36.5 42 47 55.5 65.5 U 21.5 22.5 25.5 28 36 38 43.5 48.5 57 65.5 12 16 20 25 32 40 50 63 80 100

Compact 5-Port Solenoid Valve

For models without an SI unit (S0), note the number of output points of the SI unit that will be mounted. u P, E port entry, SUP/EXH block assembly Symbol P , E port entry SUP/EXH block assembly Application U U side (2 to 10 stations) Internal pilot All D D side (2 to 10 stations) B Both sides (2 to 24 stations) US U side (2 to 10 stations) Internal pilot, Built-in silencer D-sub connector

Compact Cylinder

28 36 38 43.5 48.5 57 65.5 U 21.5 22.5 25 28 30 32 37.5 42.5 51 59 U 19 20 23 26 27.5 30 35 40.5 49 57 U 23.5 24.5 27.5 30.5 36.5 40 45 50.5 59 67 U 26.5 27.5 30 32.5 39.5 42.5 48 53.5 61.5 70 U 21 22 24.5 27.5 34 37.5 43 48 56.5 64.5 U 27.5 28.5 31 34 40.5 43.5 49 54.5 62.5 71 U 24.5 25.5 28 31 37.5 40.5 46 51.5 59.5 68 U 33 36.5 42 47 55.5 65.5 12 16 20 25 32 40 50 63 80 100 The applicable

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

20 24.5 18.5 21.5 20 23 24 27 23 26 Auto Switch Mounting Height D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A9V D-M9V D-F9WV D-A73C D-A80C D-A7 D-A80 D-F9BAL D-P5DWL Bore size (mm) U U U U U U U U U U 12 22 23 26 20.5 26.5 19.5 16 25 29 23.5 29.5 26 22.5 20 31 27 31.5 28 24.5 25.5 25 30 34.5 31 34 28.5 27.5 32 26.5 29 34 27 35 38

ZP

ZPY25D10--A10 59 93 23 Flat with ribs U C ZPY25D20--A10 ZPY20 -A10 69 131 20 23 28 14 24 1.7 1.8 4 42 51 ZPY25 -A10 U C ZPY25D30--A10 79 141 25 ZPY32 -A10 U C 77 ZPY25D40--A10 89 177 42.5 32 35 14.5 24.5 2.3 4.5 99 187 ZPY25D50--A10 Dimensions by Stroke Dimensions by Tubing 20, 25 32 H Model F G F G Model J K L U C U C U C U C ZPY-4-A10 ZPY 10--A10 5 1.8 14.5 87 53.5 53 87.5 23 ZPY-6-A10

AC Servo Motor Driver

50 20 50 8 16 8.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U CAUTION V V M V M V W W W W Connecting a servo motor of the wrong axis to U, V, W, or CN2 of the driver may cause a malfunction. 3 3 3.

Series SV

U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Series SV2000 ... ... 20 For 20 stations Stations 2 stations Symbol 02 Note Note 1) Double wiring specification ... ... ... ...

0.4

L kit <u SUP/EXH block assembly>

V100

(Conforming to DIN) Clip Without indicator light AXT100-20-1 Rated voltage With indicator light 16.8 Voltage symbol Part no. AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 13.8 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V 1. It is able to change the cylinder port between side ported and top ported.

Compact Hydraulic Cylinder

1 u t w y o !2 Bore size 20 Bore sizes 20 & 25 CHQ CHKm CHN CHM CHSm CH2m Description Material Note Parts List No.

Electric Actuator

to 100 25 92 1 26.5 40 87 120 14.1 123.9 156.9 15.8 82.4 115.4 14.1 123.5 156.5 15.8 105 to 400 20 to 100 32 118 1 34 60 88.2 128.2 17.1 116.8 156.8 17.1 76.6 116.6 17.1 116.1 156.1 17.1 105 to 500 Motor left side parallel type/LEY L 25 32 Motor right side parallel type/LEY R 25 32 U S1 U S1 [mm] T2 T2 S1 T2 U Size 25 32 47 91 1 61 117 1 Note) When the motor is mounted on the left or right

CQ2

U 26 29 31 34 38 41.5 47.5 54 U 22 25 27 30 34 37.5 43.5 50 U 27 30.5 36.5 40 U 29 32.5 38.5 42 U 26.5 30 36 39.5 2.3-62 Series CQ2K 12 to 25 Without Auto Switch 12, 16 Standard (Through-hole)/CQ2KB 20, 25 Rear boss mount (mm) Rear boss mount Bore (mm) 12 16 20 25 G Th9 0 0.043 0 0.052 0 0.043 0 0.043 15 20 13 15 1.5 1.5 2 2 Rod end male thread (mm) Rod end male thread Bore (mm) C1 X H1

JXCx-OMT0023

50 20 50 7 20 8.

Table of Contents

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Air Slide Table

Double-ported type Model Stroke 10 20 30 40 50 75 100 125 150 MXQ6A-Zmm(6, 7, 8, 9) u u v v v MXQ8A-Zmm(6, 7, 8, 9) u u v v v v MXQ12A-Zmm(6, 7, 8, 9) u u v v v v v MXQ16A-Zmm(6, 7, 8, 9) u v v v v v v v MXQ20A-Zmm(6, 7, 8, 9) u v v v v v v v v MXQ25A-Zmm(6, 7, 8, 9) v v v v v v v v v Adhesive application points Height interchangeable type Auto Switch Mounting Made to Order Model Selection

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 B A u !7 !6 y q w t !5 r e i u !2 !3 In-line motor type: LEY D 25 32 63 !2 #0 @9 When rod end male thread selected u u !0 @6 @7 @8 @7 @5 Component Parts No. Description Material Note No.

smcmaintenancepartslist

For 20 to 63, remove the lock piston seal. d. For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !