NCQ2/CQ2

st 20 st 20 st 20 st 20 st 20 st LY 32 40 50 57.2 28 67.2 12 38 22 67.2 33 17 77.2 43 27 LH 34.5 73.7 18.5 28.5 73.7 39.5 23.5 83.7 49.5 33.5 63.7 44.5 76.7 40.5 17.5 86.7 50.5 27.5 96.7 50.5 27.5 60.5 37.5 106.7 4 x LD LT LG LZ LX A LS X Y X Y NCQ2 CQ2 L L1 L1 LD LG LX LH LY Bore size (mm) LZ Y X 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 32 57 57 4 30 71 27 43.5 48.5 34.7 39.7

Table of Contents

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

MY1

Mass m X-axis Y-axis Z-axis Z 20 W 20mm 30mm 50mm 2kg 50 Y 30 3 Calculation of load factor for static load m: Mass m m max (from 1 of graph MY1B/m = 27 (kg) Load factor = m/m max = 2/27 = 0.07 X M: Moment m M max (from 2 of graph MY1B/M) = 13 (Nm) M = m x g x X = 2 x 9.8 x 20 x 10= 0.39 (Nm) M Load factor = M/M max = 0.39/13 = 0.03 M: Moment Y M max (from 3 of graph MY1B/M) = 1.6 (Nm

Vacuum Pad

5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A

Vacuum Pad

5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A

Vacuum Pad

5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A

Vacuum Pad

5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A

Electric Actuator/Slider Type

800 Me L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 600 600 600 600 L5 Wall Y 400 400 400 400 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20 30 25 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z Me 400 400 400 400 m 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60

Table of Contents

Stainless steel, PPS, NBR FKM O-ring (Body) NBR t Return spring Stainless steel Cover SPCE y Clip Stainless steel q 17-2-66 7 Series VDW10/20/30 Compact Direct Operated 2 Port Solenoid Valve For Water and Air Dimensions VDW11 VDW21 22 20 Lead wire 300 300 Lead wire VC 27 20 21 27 Rectifying device VDW AC type Rectifying device 2-3.5 27 20 AC type 14 2-3.2 20 VQ 20.5 VX2 17 VX Courtesy

ZP

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

Table of Contents

Note) D1: Max. diameter 15-4-20 13 Inch-size One-touch Fittings Series KQ2 Branch Y: KQ2U Applicable tubing O.D.

Air Cylinder Series CM2

A H MM NDH10 NX1 U1 R2 Y Z A1 E1 L1 MM NDH10 R1 NX U1 A Applicable bore size (mm) 20 25, 32 40 Bore size (mm) 20 25, 32 40 Part no.

Battery-less

500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg

MGG

32Stroke Stroke Stroke 1.2 2 1.7 (Ball bushing type) (Ball bushing type) (Ball bushing type) 1.5 1 1.5 500st Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) 600st 400st 1 500st 400st st: Stroke (mm) 1 st: Stroke (mm) 300st st: Stroke (mm) 0.5 400st 300st 200st 0.5 300st 0.5 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 20 40 60 80 100 10 20 30 40 50 60 10 20 30 40 50 Allowable

15

LEC Y Motorless Motorless Grease pack order number: GR-S-010 (10 g)/GR-S-020 (20 g) LAT LZ LC3F2 885

Air Cylinder

16-20 1 1/8 0.551 1/2 1.84 3/4 3 5/8 5/8 3/4 5 3/4 3/4 1.06 6 3/8 1 1.71 5/16-24 2.6 0.3 200 (2") 1.26 3/8 2.4 3/8 2 1/2 3/8 7/16-20 1 1/8 0.551 1/2 2.19 3/4 3 3/4 5/8 3/4 5 7/8 3/4 1.06 6 1/2 1 1.75 5/16-24 3.1 0 250 (2.5") 1.3 3/8 2.48 3/8 3 3/8 7/16-20 1 1/8 0.551 1/2 20 Medium Duty Air Cylinder Series NCA1 Non-Rotating Rod Double Rear Clevis Mounting Type NC A1KX F R P + Stroke Y 2-EE

5 Port Solenoid Valve

mmm J kit: PC wiring compatible flat ribbon cable 325 20 Max. 16 stations T kit:Terminal block box 660 20 Max. 20 stations 455 Note 4) L kit: Lead wire 20 Max. 24 stations M kit: Circular connector 390 20 Max. 24 stations M5 thread C2 (2) C3 (3.2) C4 (4) N1 (1/8") N3 (5/32") C kit: Connector 115 20 Max. 20 stations SS0755-mCmC (Manifold pitch: 8.5) Rc1/8 S kit: Serial transmission (EX510)

5

Y-G02 20 34 8.5 l16 25 M8 x 1.25 10.3 11.5 8 8 +0.4 +0.2 16 21 IY-G02 Y-G03 25, 32 41 10.5 l20 30 M10 x 1.25 12.8 14 10 10 +0.4 +0.2 20 25.6 IY-G03 Y-G04 40 42 16 22 30 M14 x 1.5 12 14 10 18 +0.5 +0.3 36 41.6 IY-G04 Y-G05 50, 63 56 20 28 40 M18 x 1.5 16 20 14 22 +0.5 +0.3 44 50.6 IY-G05 Y-G08 80 71 23 38 50 M22 x 1.5 21 27 18 28 +0.5 +0.3 56 64 IY-G08 Y-G10 100 79 24 44 55 M26 x 1.5 24 31

Electric Actuators

10 20 20 20 20 LG1H20 LG1H21 LG1H21 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy

smcmaintenancepartslist

For 20 to 63, remove the lock piston seal. d. For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !