Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: MT (M + T)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: MT (M + T)

Cooling Capacity: 030 (Cooling Capacity: 2600/3200W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: MT (M + T)

Cooling Capacity: 040 (Cooling Capacity: 3800W/4200W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: MT (M + T)

Type: -, Cooling Method: -, Cooling Capacity: 1,100/1,300 W (50/60 Hz), Piping thread type: Rc, Optional specifications: Compatible with deionized water (pure water) piping / High pump head specification

Type: -, Cooling Method: -, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: Rc, Optional specifications: Compatible with deionized water (pure water) piping / High pump head specification

Type: -, Cooling Method: -, Cooling Capacity: 2,100/2,400 W (50/60 Hz), Piping thread type: Rc, Optional specifications: Compatible with deionized water (pure water) piping / High pump head specification

Cooling Capacity: Cooling Capacity: 2600/3200W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: M + T

Cooling Capacity: Cooling Capacity: 3800W/4200W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: M + T

HRX-OM-M090

9-12 9.6.1 HRS012--10-(BJM), HRS018--10-(BJM) . 9-12 9.6.2 HRS012--20-(BGJM), HRS018--20-(BGJM), HRS024--20-(BGJM) . 9-12 9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT . 9-13 9.6.4 HRS012--20-T, HRS018--20-T, HRS024--20-T . 9-13 9.6.5 HRS012--20-MT, HRS018--20-MT, HRS024--20-MT . 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.8 Compliance . 9-16 9.9

Made to Order

Bore size Stroke adjustment range A B MH MT MA MI MM MK ML G L 12 to 25 MM MI 12 16 20 25 25 (15) 57.7 (64.9) 25.2 (32.4) 3.5 29 M4 x 0.7 5.5 14 5 20 8 5 to 30 28 (20) 26 (36) 58.5 (68.5) 3.5 29 M5 x 0.8 5.5 14 5 20 10 G 36 (25) 26 (38) M6 x 1 67.5 (79.5) 4.5 37 7 20 8 24 12 5 to 50 MK MT ML L MA 40 (30) 29 (39) M6 x 1 71 (81) 5 37 7 20 8 24 12 5 to 50 30.5 (40.5) 78.5 (88.5) Stroke 32 38

HRX-OM-X071

capacity . 9-11 9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.7.1 HRR050-W-20. 9-15 9.7.2 HRR050-W-40. 9-15 9.8 Types

1

) 85 53 254 110 78 279 85 53 256 110 78 281 R Series MGG only Stroke ML MT MH + Stroke Y + Stroke ZZ + 2 strokes Series MGC 20 to 50 Width across flats MA MM A Port B Port MD 10 A A Port B Port A 10 (MI) View A-A Front mounting flange R Stroke ML MT Y + Stroke MH + Stroke ZZ + 2 stroke Series MGP MGPM, MGPL Common Dimensions MB MC (Width across flats) Bore size (mm) MA MB MC MH ML MD MP

HRX-OM-R016

9-6 9.4.1 HRS030--20-(BJMT) . 9-6 9.5 Heating capacity . 9-6 9.5.1 HRS030-A-20-(BJMT) . 9-6 9.5.2 HRS030-W-20-(BJMT) . 9-6 9.6 Pump capacity. 9-7 9.6.1 HRS030--20-(BJM) . 9-7 9.6.2 HRS030--20-T . 9-7 HRS Series HRX-OM-R016 Contents 9.6.3 HRS030--20-MT . 9-8 9.7 Required facility water flow (for water-cooled type) . 9-8 9.8 Compliance . 9-9 9.9 Sample DoC. . 9-10 9.10 Daily Check Sheet . 9

1

Connector entry upward direction) 4 A A B 4 A A B 4 A A B 4 A A B A B 4 A PE 3EB X 1P 5EA 106.2 5.5 24.6 23.2 116.6 96.2 20 20 35 81.6 74.1 20 30.2 52.2 43.8 2 x M2.6 2 x 4-40 UNC [For N or T thread] 40.2 40.2 8 2B 2B 2B 2B 2B 12.3 1/8 [4(A), 2(B) port] M5 x 0.8 (External pilot) [External pilot port] 4 x 4.5 (For mounting) One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 5/32"

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

471 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 50 37 113 84 201 150 314 235 490 358 804 603 1,256 942 Bore size (mm) Part no. 8 MT-S8 8 12 MT-S12 12 MT-S16 16 16 MT-S20 20 20 MT-S25 25 MT-S32 32 25 MT-S40 40 Replacement parts for rod end male thread.

MTS

A B Hs A B Hs Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV A B C A B Hs Hv A B A B Hs Hv A B C A B Hs Hv C 15.5 15 20 20 15 19.5 19.5 19.5 19.5 46 46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5

ZP

5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A

ZP

5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A

Precision Cylinder Series MTS

MT-S8 8 40 MT-S12 12 Caution Do not apply a load that is 50% or more of the theoretical output.