5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly 10 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

High Vacuum Angle Valve

w, e w e Symbol External 1.3 x 10-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

smcmaintenancepartslist

7 @7 w !9 q @5 @4 #8 @1 @3 @2 !1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

AC Servo Motor Driver (Pulse input type/Positioning type ）

Connect the driver power output (U/V/W) to the servo motor power input (U/V/W) directly. Do not let a magnetic contactor, etc. intervene. Otherwise, it may cause a malfunction. CAUTION Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U V V M V M V W W W W 3 2 3.

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

Compact Cylinder

Standard (mm) Bore size (mm) Stroke range (mm) A B C D E F H I J K L M N O P Q S U W Z 32 40 50 63 80 100 5 to 100 5 to 100 10 to 100 10 to 100 10 to 100 10 to 100 13 13 15 15 21 27 16 16 20 20 25 30 45 52 64 77 98 117 17 17 22 22 26 26 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M16 x 2.0 M20 x 2.5 10.5 10 13 13 16 14 14 17 17 22 27 7 7 8 8 10 12 34 40 50 60 77 94 5.5 5.5 6.6 9 11 11 65.5 72

Table of Contents

Refer to pages 12-10-4 to 12-10-5 for the details on effective holding force and allowable overhanging distance. Misc. D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !

Table of Contents

1 Drain q r e w t i u y o !0 !

VFR

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly !0 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

Electric Actuator

2 3 Cable color Circuit U V W Red White Black Connector D terminal no. 12 13 7 6 9 8 11 10 3 Connector A2 terminal no.

AC Servo Motor Driver (CC-Link Type ）

(b) Connection of driver and servo motor 1) The servo motor power supply terminals (U, V, W) of the driver match in phase with the power input terminals (U, V, W) of the servo motor. Servo amplifier Servo motor Driver U U V V M W W 2) The power supplied to the driver should not be connected to the servo motor power supply terminals (U, V, W).

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

S U S U S U S w U S AXT100-1-J 20 Note 3) U S e r AXT100-1-F Note 3) AXT100-1-GU20 Note 1) Suffix -XP to the end of the part number for dust-protected SI unit.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

S U S U S U S w U S AXT100-1-J 20 Note 3) U S e r AXT100-1-F Note 3) AXT100-1-GU20 Note 1) Suffix -XP to the end of the part number for dust-protected SI unit.

0.4

S AXT100-1-P Note 3) U S U S U S w U S AXT100-1-J 20 Note 3) U S AXT100-1-F Note 3) e r AXT100-1-GU20 Note 1) Suffix -XP to the end of the part number for dust-protected SI unit.

AC Servo Motor Driver (CC-Link Type ）

(b) Connection of driver and servo motor 1) The servo motor power supply terminals (U, V, W) of the driver match in phase with the power input terminals (U, V, W) of the servo motor. Servo amplifier Servo motor Driver U U V V M W W 2) The power supplied to the driver should not be connected to the servo motor power supply terminals (U, V, W).

4/5 Port Solenoid Valve

Please be sure to fill in the blank referring to back page 10. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P)

Modular F.R.L. Units

When the above factors are present, or there is some doubt, use a metal bowl for safety. 86 AL10-A to AL60-A Series Construction AL10-A AL20-A w q t w q e OUT IN OUT IN y r u y u AL30-A/AL40-A AL50-A/AL60-A w q t w q t e e IN OUT IN OUT r y u r i y u Component Parts No.

Compact Hydraulic Cylinder

7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !

AC Servo Motor Driver

U CNP3 CNP3 V V W W 10 3 10.