NVZseies

Individual, Common Not required (Use turbine oil #1(lSO VG32) if lubrication is Free 30Gy'5G (8.5 -2000H2) Dust proot Solenoid S ifications Grommet (G) (H), Plug connector (L) (M), DIN connector (D) 1 1 OV 5 a/6aqz, 220V. a I oqz 24V 5a,1a Hz 12V,24V 15+10% of rated voltage utass E ot equrvatenl (z5u r l 81'F or less 1.8W,,,2.1W (W/LED) 4.zVA/6OHz 4.5vA/soHz 3VA/60H2 3.5VA/50H2 DC : Diode

3 Way,3 Port Solenoid Valve NVZ Series

Individual, Common Not required (Use turbine oil #1(lSO VG32) if lubrication is Free 30Gy'5G (8.5 -2000H2) Dust proot Solenoid S ifications Grommet (G) (H), Plug connector (L) (M), DIN connector (D) 1 1 OV 5 a/6aqz, 220V. a I oqz 24V 5a,1a Hz 12V,24V 15+10% of rated voltage utass E ot equrvatenl (z5u r l 81'F or less 1.8W,,,2.1W (W/LED) 4.zVA/6OHz 4.5vA/soHz 3VA/60H2 3.5VA/50H2 DC : Diode

MHx-OMY0005

MHF2-8D1 MHF2-8D2 GR-S-010(10g) MHF8-PS MHF8-PS MHF8-PS-2 122021 GR-L-005(5g) 122021 P.13 16 3-4. /2 MHF2-12D20D 1 12: 16 2 1620: 3 17 4 12:R 18 5 1620:C 6 19 7 20 NBR 8 A 21 NBR 9 B 22 NBR 10 C 11 12 13 14 15 MHF2-12D MHF2-12D1 MHF2-12D2 MHF12-PS MHF12-PS MHF12-PS 202122 MHF2-D,D1(12,16,20)GR-S-010(10g) () MHF2-D2(12) GR-L-005(5g) () GR-S-010(10g) () MHF2-D2(16,20

Table of Contents

DZ/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

45

D D side Applicable makers Valve stations MB1 For Mitsubishi Electric Corporation TA1 For OMRON Corporation FU1 For Fuji Electric Co., Ltd.

VZS

from D side as the 1st one.

Series VQ Metal Seal/Rubber Seal Body Ported

Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P How to Order Manifold How to Order Manifold 06 FSA D VV5Q14 06 P SC VV5Q14 D Ex.) Ex.)

Pin Cylinders Series CJP2/CJP

m t L d m t D d9 D d9 l l Part no.

Air Slide Table Series MXQ

Proper Mounting Position (Detection at Stroke End) Reed Auto Switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V Stroke B Stroke E Model A 10 20 30 40 50 75 100 125 150 10 20 30 125 40 50 150 75 100 11.5 (9) 14 (11.5) 19.5 (17) 18.5 (16) 31.5 (29) 30.5 (28) 11.5 (9) 29 (26.5) 19.5 (17) 24.5 (22) 29.5 (27) 44.5 (42) 3.5 (1) 6 (3.5) 12.5 (10) 18.5 (16) 31.5 (29) 40.5 (38) 3.5 (1) 10 (7.5)

VZ3000

VQ7 C4 C6 VZ3000-50A-1Manifold block assembly q (a) Bolt (Both sides) EVS For D side, With D-sub connector and P/R port with One-touch fitting for 8 SUP/EXH block assembly VZ3000-51A-1D w D side For U side, With D-sub connector and P/R port with One-touch fitting for 8 For D side, set with w VFN SUP/EXH block assembly VZ3000-51A-1U e DIN rail End block assembly VZ3000-52A-2D r VZ3000-52A-

Air Slide Table Series MXS

Solid State Auto Switch: D-M9B, D-M9N, D-M9P, D-M9BW, D-M9NW, D-M9PW Stroke B Stroke E Model A 40 50 150 10 20 30 40 75 100 125 150 10 20 30 125 75 100 50 B MXS6 -0.4 -0.4 -0.4 11.6 17.5 9.6 9.6 9.6 21.6 27.6 10 MXS8 4.9 -0.1 0.9 8.9 16.9 41.9 14.9 9.9 10.9 18.9 51.9 26.9 11.6 MXS12 32.4 22.4 12.4 14.4 45.4 74.4 24.4 22.4 12.4 2.4 4.4 14.4 35.4 64.4 15.6 MXS16 32.7 22.7 12.7 12.7 42.7

Vacuum Unit Ejector / Vacuum Pump System

The purity class of compressed air quality based on ISO8573-1:2010 2 : 6 : 3 Solid particle Moisture Oil Max number of particles per m3 Oil concentration (mg/m3) 0.1 < d 0.5 0.5 < d 1.0 1.0 < d 5.0 Pressure dew point Particle size d (m) Class Class (oC) at air pressure Class of 0.7 MPa 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000

Manifold Specifications

VQ7 C4 C6 VZ3000-50A-1Manifold block assembly q (a) Bolt (Both sides) EVS For D side, With D-sub connector and P/R port with One-touch fitting for 8 SUP/EXH block assembly VZ3000-51A-1D w D side For U side, With D-sub connector and P/R port with One-touch fitting for 8 For D side, set with w VFN SUP/EXH block assembly VZ3000-51A-1U e DIN rail End block assembly VZ3000-52A-2D r VZ3000-52A-

-fl Seies

qn D N coreclor.

Vacuum Unit Ejector / Vacuum Pump System

The purity class of compressed air quality based on ISO8573-1:2010 2 : 6 : 3 Solid particle Moisture Oil Max number of particles per m3 Oil concentration (mg/m3) 0.1 < d 0.5 0.5 < d 1.0 1.0 < d 5.0 Pressure dew point Particle size d (m) Class Class (oC) at air pressure Class of 0.7 MPa 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

qn D N coreclor.

Air cylinder (Series compatible with secondary batteries)

Grease pack part number: GRD -005 (5g), GR-D-010 (10g), GR-D-100 (100g) 1) Rod seal Apply a thin layer of grease to all surfaces of the new seal to make it easy to mount the rod seal and improve sealing.

VCA

Printed in Japan. 1st printing May, 2000 D-SMC.L.A. P-80 (D)

VCA

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 VX3 L VXA K 2-M Thread depth 6 2-M Thread depth 6 K VN LVC LVA LVH DIN terminal: D Conduit terminal: T LVD F F (Q) Q S 34 LVQ D LQ LVN U 25 R C 44 TI/ TIL C R G1/2 PA E E G1/2 PAX B B 2-P Port size A A D 2-P Port

Low Profile Air Gripper Series MHF2

Protrusion of Auto switch Lead wire type In-line entry Perpendicular entry Illustration Auto switch Hysteresis L L Auto switch operating position (ON) Finger position Auto switch operating position (OFF) D-M9 D-M9W D-M9V D-M9WV Model Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Hysteresis 6.5 6.5 6.5 6.5