MXQ

Axial piping type (25): MXQ25L-P 17 40 11.5 79 Operating port 2-Rc 1/8 32 Other dimensions are the same as basic style. 20 8-5-39 40 Series MXQ External Dimensions of Adjuster Rubber Stopper (AS/AT) Extension End (mm) Body mounting section Stroke adjustment range (mm) Body mounting section Table mounting section A Applicable size Model P B C F G M D E P 1) H J K Q 1) A D MXQ-AS6(L) 5 16.5

90

P P Port layout No. 12 V Supply value: Self-holding type (R type) Release valve: N.C. Supply valve: N.C. Release valve: N.C. (K type) V Single unit: ZK2FManifold: ZZK2-A2-D Note 1) For silencer common exhaust type, individual exhaust port is provided to each station. Note 2) Silencer common exhaust and individual port exhaust cannot be mixed in the same manifold.

Environment

How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !

High performance type Step Motor Controller (Servo/24 VDC)

Power supply plug P.24for wiring.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

A Rectified value Rectified value P-1 P-1 (Differential) Pressure (P-3) H-1 H-1 (H-2) P-2 Min. B Nonadsorption ON Switch output 1(2) OFF Work 1 Work 2 Work n Atmosphere ZSE ISE Switch output response time when autoshift is input.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

215 Electric Actuator/Guide Rod LEYG Series p. 215 Electric Actuator/Slider LEF Series p. 31 Electric Slide Table LES/LESH Series p. 307 Electric Rotary Table LER Series p. 399 Electric Actuator/Miniature LEPY/LEPS Series p. 369 Electric Gripper (2-Finger Type, 3-Finger Type) LEH Series p. 425 * Order the actuator separately, including the actuator cable.

CRQ2

P = Thread pitch M3 x 0.5; M4 x 0.7; M5 x 0.8; M6 x 1 Enter the desired figures in the portion of the diagram. XA1 to XA24 are the standard products that have been additionally machined. Chamfer face of the parts machining additionally is C0.5. CRB2 2. CRBU2 L1 + (3 x P) L1 + (3 x P) Q1 = M Q1 = M 3. CRB1 L2 + (3 x P) L2 + (3 x P) 4. MSU L1 = L1 = L2 = L2 = CRJ 5.

CHKD/CHKG

A32 A33 A34 Note 1) Dimensions indicated with an asterisk () in the patterns A1, A2, A18, A20, A22, A31, A32, A33, and A34 are provided in the table below.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Shaft Pattern Sequencing I Applicable shaft type: S, W, Y How to Order F59 B C P D C S 50 90 X RA1 A2 A24 C10 -X6 Built-in magnet Auto switch Nil D None Built-in magnet Refer to page 11-7-13 for the part no. of auto switches.

CATALOG

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

F/ISE

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

Table of Contents

Series MHSH3 MHSH3-32D to 80D 6-TA, thread depth TB 3-UA thread depth 6 UB P .C.D.R P (Finger operating port) 3-SA, counterbore dia.

S Couplers Series KK/KKH/KK13

Lock 165 Series KK Plug (P) Socket (S) Male thread type Part no. Male thread type Body size Port size Part no.

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

LECP6_C

LED() /P.18 5.CN1: PLC /P.24 6.3 / / CN1 CN5 / DC24V /P.16 4. /P.27 6.4 I/O /P.48 12. ONOFF /P.11 3. /P.48 12. / CN1 CN5 / DC24V /P.16 4. /P.27 6.4 I/O /P.14 3.4 63 - /P.28 7. (CN1: /P.11 3. EMG ) SV1.00 INP ON INP OFF (INP PLC ) /P.24 6.3 / /P.11 3.

LECA6_C

SVRE OFF [BK RLS]DC24V [BK RLS] [BK RLS]DC24V [BK RLS] EMG /LEC 58 - 15. 15.1. / 15.2 ON 59 - 5 () 60 - 15.3 50mm 15.4 ( ) 61 - 15.5 15.6 D 100 15.7 62 - 16. , , (), 16.1 /P.16 4. LED() /P.18 5.CN1: PLC /P.24 6.3 CN1 CN5 DC24V /P.16 4. /P.27 6.4 I/O /P.48 12. ONOFF /P.11 3. /P.48 12. CN1 CN5 DC24V /P.16 4. /P.27 6.4 I/O /P.14 3.4 63 - /P.28 7. (CN1:EMG ) /P.11 3.

Digital Flow Switch

9 Specifications p. 10 Flow Range p. 11 Analog Output p. 11 Pressure Loss p. 11 IN Side Straight Section and Accuracy p. 12 Internal Circuits and Wiring Examples p. 12 Construction: Parts in Contact with Fluid p. 13 Dimensions p. 13 3-Screen Display Digital Flow Monitor PFG300 Series How to Order p. 14 Specifications p. 15 Internal Circuits and Wiring Examples p. 16