Environment

How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !

MXQ

F A F MX MTS Lr MY 16 16 16 Lr = 120 mm MXQ16-10 MXQ16-10 MXQ16-10 0.04 MXQ16-75 MXQ16-100 MXQ16-125 MXQ16-75 MXQ16-100 MXQ16-125 MXQ16-125 MXQ16-125 MXQ16-125 CY MXQ16-50 MXQ16-50 MXQ16-50 0.06 MXQ16-75 MXQ16-20 MXQ16-30 MXQ16-20 MXQ16-20 MXQ16-30 MXQ16-30 0.12 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ16-75 MXQ16-40 MXQ16-75 MXQ16-75

Air Slide Table/Long Stroke Type Series MXY

N) Pitch moment Yaw moment Roll moment F F L1 A1 Mp A2 L2 W L3 A3 Load Mass: W Mr Graph (1) Static moment Dynamic moment MXY6 W My MXH W L3 A3 0.6 A2 L2 Rubber stopper screw Mr 0.5 Load mass W kg MXU L1 A1 Metal stopper screw Mp 0.4 W My MXS W 0.3 W 0.2 MXQ Mey Mep 0.1 We We 0.0 A2 L3 A3 L2 Collision speed V mm/s 0 100 200 300 400 500 280 560 MXF MXW MXY8 Note) Static moment: Moment generated

Air Slide Table

Table displacement of section A when loads are applied to the section F with the slide table retracted.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Applicable tubing O.D. d L2 L3 M1 L2 L3 M1 TMH ASD AS D2 D2 L1 L1 AS-FE KE L4 AS-FG L4 AS-FP H (Hexagon width across flats) H (Hexagon width across flats) AS-FM AS-FM D3 D3 AS-D L5 A1 L5 A1 A2 D1 D1 AS-T A2 ASP T ASN T AQ ASV Inch Size AK L4 L5 (1) A1 (2) A2 (2) M1 Max.

LEC-OM069xx

H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1 * * * * 4 5 6 External Latch Signal 1 Pn511.1 7 8 H /EXT1 *

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

A1 D1 L5 D1 A2 T T Inch Size Weight (g) L4 (1) L5 (1) A1 (2) A2 (2) M1 d T H D1 D2 D3 L1 L2 L3 Model Max.

LEC-OM071xx

H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1 * * * * 4 5 6 External Latch Signal 1 Pn511.1 7 8 H /EXT1 *

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Auto switch Key Direction indicating label Key Direction indicating label Magnet A Magnet B +4 0 +4 0 0 90 18 90 ve 00 ve o ve o 1 o ro A port B port gr o e A port B port g v o y y o e gr e o k k r f g o f y o e y g e e n e Auto switch R ra g k k n n io ra at f ot f o o n e io g at e Angle adjustment range 3 ot

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Auto switch Key Direction indicating label Key Direction indicating label Magnet A Magnet B +4 0 +4 0 0 90 18 90 ve 00 ve o ve o 1 o ro A port B port gr o e A port B port g v o y y o e gr e o k k r f g o f y o e y g e e n e Auto switch R ra g k k n n io ra at f ot f o o n e io g at e Angle adjustment range 3 ot

F/ISE

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

A 24 B B PSE56-B2 (mm) Model A A 8.2 12 9.2 12.2 15.5 9.5 B R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 ZS-31-X H D (mm) Model 1 E D 20 20 29 29 E 9 9 13 13 F R 1/8 NPT 1/8 R 1/4 NPT 1/4 G Rc 1/8 NPT 1/8 Rc 1/4 NPT 1/4 H 14 14 17 17 I 1.5 1.5 1.6 1.6 ZS-31-X188 ZS-31-X189 ZS-31-X175 ZS-31-X186 G M5 x 0.8 I F 839

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

Electric Rotary Table

Thin rectangular plate (cuboid) Position of rotation shaft: Passes through the center of gravity of a plate. a1 a a1 a2 b Step Motor (Servo/24 VDC) a2 a = m1 + m2 3 a12 3 a22 = m 12 a2 = m 12 a2 = m1 12 4a12 + b2 12 4a22 + b2 + m2 5. Thin rectangular plate (cuboid) Position of the rotation shaft: Passes through the center of gravity of the plate and perpendicular to the plate.

Series MXP Precision Air Slide Table

Deflection on A when load is applied on F. Table deflection when yawing moment is applied. Deflection on A when load is applied on F. Table deflection when roll moment is applied. Deflection on A when load is applied on F.

Compact Rotary Actuator Series CRQ2

Gravity is applied. mg F l l mg Friction force is applied. Rotation shaft is vertical (up and down). 2 Ta = = t2 Ts = F l Gravity is applied in rotating direction.

Compact Manifold Regulator Series ARM5

1361213613VEF VEP Note 1) In the case of A1 and B1, a pressure gauge or a plug is mounted on the body side, while in case of A2 and B2, on the manifold side.

CATALOG

F E R E N T D I A.

Table of Contents

Gripping point L (mm) MRHQ F F Misc.

90

(K type) V Single unit: ZK2FManifold: ZZK2-A2 Note 1) For silencer common exhaust type, individual exhaust port is provided to each station. Note 2) Silencer common exhaust and individual port exhaust cannot be mixed in the same manifold.