Fieldbus System 250 k/500 kbps 156 k/625 k/ 2.5 M/5 M/10 Mbps 9.6 k/19.2 k/45.45 k/93.75 k/ 187.5 k/500 k/1.5 M/3 M/6 M/12 Mbps 21.6 to 26.4 VDC 100 mA or less Communication speed 21.6 to 26.4 VDC 100 mA or less Power supply for control Power supply voltage Internal current consumption 22.8 to 26.4 VDC 11 to 25 VDC 100 mA or less Power supply for output Power supply voltage Power supply for Power supply
Symbol Maximum ambient Rod boot material temperature One side Both sides J JJ 70C Nylon tarpaulin Symbol Specifications K KK 110C Heat resistant tarpaulin -XA Change of rod end shape Mounting Bracket Part No. Maximum ambient temperature for the rod boot itself.
With external pilot specifications (Pitch) P = 10.5 13.5 46.9 18.3 11.8 14.1 8.4 8.6 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 10 19.7 24.6 23 5 3 E 5 3 E 3 5 E 3 5 E 43.2 43 56.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 C2 C2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 5/16" PE PE X X C1 C1 2 x M12 One-touch fitting [PE: Pilot EXH port] Applicable tubing
Select the graph that corresponds to the imaginary stroke l. k Imaginary stroke l = (Stroke) + k + l k: Distance between the center and end of the plate (Example) q When using CXSJM6-10 and l = 15 mm: Imaginary stroke l = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30n). 6 2.75 mm 10 4 mm 15 5 mm 20 w When using CXSJL25-50 and l =
For mixed single and double wirings, enter -K to the order code options.
Cushion Suffix for cylinder Nil N F Lube type Non-lube type Steel tube J K N R H Nil Nylon tarpaulin Heat resistant tarpaulin Without cushion With cushion on rod end With cushion on head end With cushion on both ends Rod boot D Cushion T Except tubing I.D. 40 Auto switch is not mountable. When specifying symbol more than one, combine symbols in alphabetically.
Cushion Suffix for cylinder Nil N F Lube type Non-lube type Steel tube J K N R H Nil Nylon tarpaulin Heat resistant tarpaulin Without cushion With cushion on rod end With cushion on head end With cushion on both ends Rod boot D Cushion T Except tubing I.D. 40 Auto switch is not mountable. When specifying symbol more than one, combine symbols in alphabetically.
J 70C Nylon tarpaulin K 110C* Neoprene cloth * Maximum ambient temperature for the rod boot only. Mounting Bracket Part No.
Select the graph that corresponds to the imaginary stroke l. l k Imaginary stroke l = (Stroke) + k + l k: Distance between the center and end of the plate 6 (Example) 1. When using CXSJM6-10 and l = 15 mm: Imaginary stroke l = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30 (6) ). 2.75 mm 10 4 mm 15 5 mm 20 6 mm 25 2.
Select the graph that corresponds to the imaginary stroke l. l k Imaginary stroke l = (Stroke) + k + l k: Distance between the center and end of the plate 6 (Example) 1. When using CXSJM6-10 and l = 15 mm: Imaginary stroke l = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30 (6) ). 2.75 mm 10 4 mm 15 5 mm 20 6 mm 25 2.
L k Imaginary stroke L' = (Stroke) + k + L k: Distance between the center and end of the plate 6 (Example) q When using CXSJM6-10 and L = 15 mm: Imaginary stroke L' = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30 6 ). 2.75 mm 10 4 mm 15 5 mm 20 6 mm 25 w When using CXSJL25-50 and L = 10 mm: Imaginary stroke L' = 50 + 6 + 15 = 71
L k Imaginary stroke L' = (Stroke) + k + L k: Distance between the center and end of the plate 6 (Example) q When using CXSJM6-10 and L = 15 mm: Imaginary stroke L' = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30 6 ). 2.75 mm 10 4 mm 15 5 mm 20 6 mm 25 w When using CXSJL25-50 and L = 10 mm: Imaginary stroke L' = 50 + 6 + 15 = 71
)-B/AR25(K)-B t e q IN OUT t Modular F.R.L. e q r IN OUT w r w AC-A AC-B AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.
V V K* K* K* -XA46 -XA51 Change of long shaft length (Without keyway) V V V V T, J, K* K* T, K* J* K* MSQ MSZ CRQ2X MSQX -XA52 Change of short shaft length (Without keyway) V V K* K* K* -XA53 Change of double shaft length (Both without keyway) V V V K* -XA54 Change of long shaft length (With four chamfers) V V V X, Z* X, Z* -XA55 Change of short shaft length (With four chamfers)
K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.
K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.
(If not specifying dimension C2, indicate instead.) Applicable shaft type: K Equal dimensions are indicated by the same marker. Minimum machining diameter for d1 is 0.1 mm. Applicable shaft types: K, T Minimum machining diameter for d1 is 0.1 mm.
(If not specifying dimension C2, indicate instead.) Applicable shaft type: K Equal dimensions are indicated by the same marker. Minimum machining diameter for d1 is 0.1 mm. Applicable shaft types: K, T Minimum machining diameter for d1 is 0.1 mm.
For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46. 24 High Vacuum Angle Valve Series XLD, XLDV Dimensions (mm) 1in=25.4mm XLDV-25/With solenoid valve 11 C Fn (KF flange) Fb (K flange) C Port R (exhaust port) K K 2.5 41.5 Initial exhaust solenoid valve Main exhaust solenoid valve G A B 8 10.5 Port P (pressure port) A Max 10.5 (except connector
For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46. 24 High Vacuum Angle Valve Series XLD, XLDV Dimensions (mm) 1in=25.4mm XLDV-25/With solenoid valve 11 C Fn (KF flange) Fb (K flange) C Port R (exhaust port) K K 2.5 41.5 Initial exhaust solenoid valve Main exhaust solenoid valve G A B 8 10.5 Port P (pressure port) A Max 10.5 (except connector