5-Port Solenoid Valve

B Circular Connector B EX500 C Individual EXH (SUP) spacer assembly EX600 C EX250 SY7000222-1A [for 10 valves (30 pcs.)] SY5000222-1A [for 10 valves (20 pcs.)] SY7000221-1A [for 10 valves (30 pcs.)] SY3000222-1A [for 10 valves (20 pcs.)] SY5000221-1A [for 10 valves (20 pcs.)] SY300023-24A [for 10 valves (20 pcs.)]

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

) (Specify 1/8 (01) or 1/4 (02)) SUP Relocation EXH Relocation '-~~~r~~_ce_r _ _ .---__ ~~ r:::..:.~-,-,c.

Table of Contents

" M5 x 0.8 18.3 23.1 12 12.7 7 13.5 AS121F-U10/32-07 AS221F-01-04 9.3 27.5 20.4 4 1/4" 10-32UNF 14.3 17 AS221F-01-01 AS221F-01-06 27.5 27.5 6 20.4 11.6 20.4 36.1 32.1 27.1 13.5 31.1 9.3 1/8" 14.2 12 (12.7) 1/8 16 12.7 AS221F-01-03 AS221F-01-08 32.4 8 20.4 15.2 18.5 19 27.5 25.3 17 9.3 5/32" 12 (12.7) AS221F-01-05 AS221F-01-10 14.2 14.3 40.2 10 23.1 18.5 21 15 21 30.2 36.1 31.1 27.1 33.1 17

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

[dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv 10-SS3YJ5-20 10-SS3YJ5-40-M5 10-SS3YJ5-40-01 10-SS3YJ5-41-M5 10-SS3YJ5-41-01 10-SS3YJ5-41-C4 10-SS3YJ5-41-C6 M5 x 0.8 0.47 0.71 0.98 0.71 1.0 0.68 1.0 0.43 0.52 0.36 0.49 0.37 0.35 0.27 0.13 0.21 0.25 0.20 0.26 0.17 0.25 0.74 0.81 0.92 0.80 0.96 1.0 1.0 0.32 0.28 0.24 0.23 0.25 0.25 0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5

V

-16ASUP B L O C K P L AT E P R PR VVQ1000-N5-Station (1-Max. stations) N A M E P L AT E [-N] Direct exhaust [-S] B U I LT I N S I L E N C E R VVQ1000-F-L(VQ1000) E L B O W F I T T I N G S A S S E M B LY I N D I V I D U A L EXH S PA C E R EXH B L O C K B A S E A S S E M B LY VVQ1000-19A(VQ1000) F P L KQPP L A N K I N G P L U G 23 04 06 08 10 01 03 07 2 S TAT I O N S M AT C H I N G F I T T

Table of Contents

ZS-10-A With lead wire ZS-10-5ANote) When ordering switch with 5 m long lead wire, indicate both part numbers. Lead wire length Caution 0.6 m Nil Ex.) ZSE2-01-15CN1 pc. ZS-10-5 A-501 pc.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

.) 10-SYJ7123-5LOU-01 (-Q) 3 sets (Single solenoid part no.) 10-SYJ7223-5LOU-01 (-Q) 2 sets (Double solenoid part no.)

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

SYJ300/500/700

[dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv 10-SS3YJ5-20 10-SS3YJ5-40-M5 10-SS3YJ5-40-01 10-SS3YJ5-41-M5 10-SS3YJ5-41-01 10-SS3YJ5-41-C4 10-SS3YJ5-41-C6 M5 x 0.8 0.47 0.71 0.98 0.71 1.0 0.68 1.0 0.43 0.52 0.36 0.49 0.37 0.35 0.27 0.13 0.21 0.25 0.20 0.26 0.17 0.25 0.74 0.81 0.92 0.80 0.96 1.0 1.0 0.32 0.28 0.24 0.23 0.25 0.25 0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5

Modular F.R.L. Units

-R1 G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G27-10-R1 G36-4-01 G46-4-01 Round type (with color zone) Standard G36-10-01-L G46-10-01-L 0.02 to 0.2 MPa setting G36-4-01-L G46-4-01-L Square embedded type 2 Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] 0.02 to 0.2 MPa setting GC3-4AS [GC3P-010AS (Pressure gauge cover only)] Option Pressure gauge 1 ISE35-N-25-MLA [ISE35-N-

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

VFR

02 01 02 01 02 01 02 01 02 Light/Surge voltage suppressor (At TZ) Applicable cable O.D. 6 to 8 Applicable cable O.D. 2.3 to 2.8 Light/Surge voltage suppressor (At EZ) Light Light Max. 10 Max. 10 Other dimensions are the same as the grommet type.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

L (10) 8 Dimensions (24) (35) Applicable fittings size d 4 Model A L D 10-KQ2P-04 16 32 6 6 10-KQ2P-06 18 35 8 8 10-KQ2P-08 20.5 39 10 10 10-KQ2P-10 22 43 12 12 10-KQ2P-12 24 44.5 14 10-KQ2P-01 16 31.5 5 10-KQ2P-03 16 32 6 10-KQ2P-07 18 35 8.5 10-KQ2P-09 20.5 39 10 10-KQ2P-11 22 43 11.5 5.5 Rail mounting pitch 12.5 0 1 2 3 4 5 6 7 8 9 No.

SYJ3000/5000/7000

length) 63.6 [65.8] 107.5 [109.7] (Light/Surge voltage suppressor) 54.2 69.6 [76.6] 50.1 [57.1] + 45 34.7 8.5 31.5 21.5 6 6 17 17 43.9 15 1/8 (P, R port) 45.5 32 24 L plug connector (L): SYJ5140-L-01 M plug connector (M): SYJ5140-M-01 DIN terminal (D): SYJ5140-D-01 M8 connector (WO): SYJ5140-WO-01 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 82.6 Max. 10 75.4 50.1 [

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(Nl/min = 1904.1) 6 x 1m 6 x 1m 8 x 1m AS3001F-08 (Nl/min = 549.6) 8 x 1m AS3001F-08 (Nl/min = 549.6) AS3001F-06 (Nl/min = 353.3) AS3001F-06 (Nl/min = 353.3) AN101-01 (Nl/min = 1089.5) AN110-01 (Nl/min = 1904.1) 10 x 1m AS4001F-10 (Nl/min = 873.5) 10 x 1m AS3001F-08 (Nl/min = 549.6) 12 x 1m AS4001F-10 (Nl/min = 1.17) 6 x 1m 6 x 1m AS3001F-06 (Nl/min = 353.3) AS3001F-06 (Nl/min = 353.3) AN200

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Function Port size Rc Valve model VHS VZA4121-01 VZA4221-01 VZA4321-01 VZA4421-01 VZA4141-1-01 VZA4141-1-02 VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

9 M18 x 1.5 9 H M18 x 1.5 10 H Width across flats 16 45 Width across flats 16 Width across flats 37 28 4 x M4 x 0.7 Width across flats 24 3 x M3 x 0.5 G G 10 10 F F E E Y Y 3 3 18 34 C C A A B D B D Dimensions (mm) Dimensions (mm) A B C D E F G H Y A B C D E F G H Y Model Model ZPT40HBJ25-01-A18 ZPT63HBJ25-01-A18 72 127.5 83 138.5 50-01-A18 50-01-A18 107 162.5 118 173.5 40 41 28 43 20.5

5 Port Solenoid Valve Series VQZ1000/2000/3000

AN101-01 T0604 x 1 m AS3001F-06 AN110-01 T0604 x 1 m AS3001F-06 VQZ1151-01 VQZ1121-C6 T0806 x 1 m AS3001F-08 VQZ2151-02 VQZ2121-C6 AN200-02 T1075 x 1 m AS4001F-10 AN300-03 T0604 x 1 m AS3001F-06 T1209 x 1 m AS4001F-12 VQZ3121-C6 VQZ3151-03 909 Series VQZ Model Selection Sonic conductance C [dm3/(sbar)] Type of actuation Voltage Electrical entry Light/surge voltage suppressor Manual override

smcmaintenancepartslist

Model Option Bracket assembly Note 1) AR10 AR25(K) AR20(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S AR50P-270AS Note 2) AR20P-270AS AR20P-260S AR10P-270AS AR10P-260S G27-10-R1 AR25P-270AS AR25P-260S G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Note 3) Note 3) Set nut G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L GC3-10AS [GC3P-010AS (Pressure gauge

SX

SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02 AN110-01 SZ Conditions [When using SGP (Steel pipe)] Base mounted Series MB