Display Pressure: 7 (0.7MPa), Connection Thread: 01M (R 1/8, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 0.7MPa, Connection Thread: R 1/8, M5 Female, Attachment: Clear Cover Removable, Wrench Tighten

S

Note) For symbol, refer to page 7. U side Base mounted plug-in 3 1 2 Stations D side 9

Display Pressure: 7 (0.7MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 7 (0.7MPa), Connection Thread: 02 (R 1/4), Grade: SRB (General Degreasing, Production Line), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 10 (1.0MPa), Connection Thread: 02 (R 1/4), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 1.0MPa, Connection Thread: R 1/4, Attachment: Clear Cover Removable, Wrench Tighten

Display Pressure: 7 (0.7MPa), Connection Thread: 02 (R 1/4)

Type: -, Maximum Indicated Pressure(Mpa): -, Outer Diameter(φ): -, Shape: Back side thread, Maximum Indicated Pressure: 0.7 MPa, Connection screw: R 1/4, Option: None, Size: 42.5, Transparent cover material: Polycarbonate (Hard coated), Attachment: Without cover ring assembly, Unit Specifications: MPa

A_HEC-OM-K001

Communication . 7-1 7.1 Preparation for Communication . 7-1 7.2 Specifications of communication method. 7-2 7.3 Communication format . 7-3 7.3.1 Control code used for communication . 7-3 7.3.2 Command code list . 7-3 7.3.3 Communication procedures and format . 7-4 7.3.4 Calculation of Check Sum . 7-6 7.4 Details of Communication Format . 7-7 7.4.1 Setting of target temp.

Table of Contents

Vane Style Size: 1, 3, 7, 20 .

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

7 Component Parts Description Material Description Material No. !1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

7 Component Parts Description Material Description Material No. !1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

CRB2/CRBU2/CRB1

Y = C2 L4 = L2 = 15 Y-3 L2 + 1.5 4.5 to 9 3 to 4 10 3 6 to 14 X-4.5 L1 +1 .5 C1 20 Y-3.5 3 to 5 5 to 10 L2 + 2 15 7 to 18 X-5.5 L1 + 1.5 3 to 4 D2 = C2 = L1 = L3 = 3 to 6 7 to 13 Y-5 L2 + 3 30 20 8 to 20 X-6.5 3 to 5 L1 + 2 X = E2 = E4 = 3 to 6 8 to 15 L2 + 5 Y-5.5 40 30 3 to 6 L1 + 3 10 to 22 X-8 Double shaft Symbol: A16 Symbol: A13 Applicable to single vane type only A special end is machined

SMC Pneumatic Clean Series

A FY H S + Stroke H + Stroke ZZ + 2 x Stroke 4-FD 40 (mm) 7 5.5 5.5 5 K 14 12 10 8 D 21 19.5 19.5 15.5 AL 88 64 62 62 H 21.5 15 15 15 S 1/4 1/8 1/8 1/8 F P H1 7 7 7 7 FD FT FY 66 60 60 60 FZ 11 8 8 8 FX 188 154 152 144 G ZZ 52 40 40 34 B E 20-0.033 0 46.5 37.5 33.5 28 N 41 32 32 26 B2 47.3 37 37 30 I 24 22 22 18 C2 22 17 17 13 B1 45 41 41 37 H2 42.5 34.5 30 24 NA A M14 x 1.5 M10 x 1.25 M10

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Mounting hole 1.5 ZZ + Stroke S + Stroke F FY 40 (mm) B WB 13 13 13 16 ZZ H H2 H1 B2 B1 80 80 82 108 F S 1/8 1/8 1/8 1/4 P A 20 25 32 40 AL 18 22 22 24 D 15.5 19.5 19.5 21 C2 34 40 40 52 FD 30 37 37 47.3 E 8 10 12 14 GC 13 13 13 16 FT 7 7 7 7 KA FL 10.5 10.5 10.5 13.5 FX 4 4 4 5 FY 60 60 60 66 FZ 36 Z 75 75 75 82 GA 8 8 8 11 GB 6 8 10 12 I 6 6 6 6 K 28 33.5 37.5 46.5 MM 5 5.5 5.5 7 NN 24

CRBU

Refer to p.1.2-7 for further information.)

Rotary Actuator/Vane Style Series CRB2

(If not specifying dimension C2, indicate instead.)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(If not specifying dimension C2, indicate instead.)

Rotary Actuator

E1 = E3 = D2 C1 = Y L1 max L4 Size (mm) 10 3 4 to 8 Y-2.5 L2 + 1.5 X L1 max L3 D1 Size D1 = Y2 = L4 = L2 = 15 C2 10 3 to 4 4.5 to 9 Y-3 L2 + 1.5 3 6 to 14 X-4.5 L1 + 1.5 C1 The standard chamfer may not be altered depending on the type of machining required. 20 15 3 to 5 5 to 10 Y-3.5 L2 + 2 3 to 4 7 to 18 X-5.5 L1 + 1.5 D2 = L1 = C2 = 30 L3 = 20 3 to 6 7 to 13 Y-5 L2 + 3 3 to 5 8 to 20