CXS

When using CXSJM6-10 and l = 15 mm: Imaginary stroke l = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30 (6) ). 2.75 mm 10 4 mm 15 5 mm 20 6 mm 25 2.

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The general dimensions in this catalog are subject to change without notice 5/32 Couplings 7/16 1/2 15/16 1 5/16 5/16 Typ. MEM MEM 5/8 41/64 27/32 1 1/8 3/8 MEM 1/4 Typ. Slim line coupler not shown 5/8 27/32 1 1 C6 C2-SL C2 C4 C8 C6 C3 C1 C5 C2 1/2 C7 C3 1/2 Reducing Couplings not shown Note not shown not shown 1 1/8 7/16 Dia. 3/8 Dia. Typ. 3/8 Dia. 5/16 Dia. Typ. 1/4 Dia.

Compact Type

CAT.ES20-174 A Compact Type Dual-Rod Cylinder 15, 20, 25, 32 additionally released. Series CXSJ/6, 10, 15, 20, 25, 32 Series CXSJ/6, 10, 15, 20, 25, 32 Auto switches can be installed from 3 directions.

Compact Type Dual-Rod Cylinder Series CXSJ

Compact Type Dual-Rod Cylinder 15, 20, 25, 32 additionally released. Series CXSJ/6, 10, 15, 20, 25, 32 Series CXSJ/6, 10, 15, 20, 25, 32 Auto switches can be installed from 3 directions.

21

Number of auto switches Same surface Different surfaces Same surface (n 2) 2 D-M9m/M9mW D-A9m 15 + 45 10 15 Note 1) Note 1) 45 45 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 D-H7BAL/H7NF 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 D-C73C/C80C D-H7C 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) (n 2) 2 D-B54/B64 D-G5NTL 15 + 50 10 15 75 75 + 55 (n 2) (n = 2, 4, 6) (n 2) 2 20 + 50 D-B59W

Moisture Control Tube

Correction Factor C2 for Ambient Air Relative Humidity Vc: Actuator volume (mm3) D : Bore size (mm) s : Stroke (mm) Temperature Relative humidity Correction factor C2 Vc = D2s 4 25C 40C 10C 0.2 0.4 0.6 20% Fig. 2 Piping Volume Chart 0.5 1.0 1.3 40% 140 1.0 1.7 2.8 60% 2.1 4.0 5.9 75% 120 6 tube Correction Factor C3 for Supply Pressure Supply pressure (MPa) Correction factor C3 10 Tube volume

17

h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 Applicable cylinder Applicable cylinder 4.5 67.3 12 5 (Max. 16.5) 70 RB1412 3.5 46.7 7 5 (Max. 16.5) 60 RB1007 5.5 73.2 15 8 (Max. 20) 90 RB2015 6 4.5 67.3 12 8 (Max. 20) 74 RB1412 5.5 73.2 15 9 (Max. 25) 100 RB2015 4 4.5 67.3 12 9 (Max. 25) 94 RB1412 1194 MY1B Series Mechanically Jointed Rodless Cylinder Basic Type Side Supports Side

Unit Manifold Valve

Solenoid valve No. 3 4 3 2 1 15 (For C2: 16) 2 No. 4 No. 3 No. 2 No. 1 21.6 4 3 (2) 26 6 2 1 1 No.1 Groove side Barb fitting [1(P), 2(A), 3(R) port] Applicable tubing O.D. 4, I.D. 2.5, Polyurethane tubing (made by SMC) Soft nylon tubing (made by SMC) Connector (For C2) (33.3) (L = 300 to 1000) Lead wire length Cut dimension for panel mount (mounting surface) 32.6 31 25 20 (10) (10) 6 (15)

2

Air leakage will occur. 1/2 15 to 30 20 to 22 Connection Female Thread: G Uni thread port size Wrench tightening angle after tightened by hand [deg] Tightening torque [Nm] 5. Use R external threads with Rc internal threads and NPT external threads with NPT internal threads. 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 Piping Caution 1/2 15 to 30 14 to 15 2.

Fluoropolymer Piping Equipment

C2 H2 (E2) L2 Class 3 to 5 LQ1E3A-R3 3/8" 1/8" 24 15 21 14 35.5 31.5 28 16.5 1.8 LQ1E4A-R2 1/2" 1/4" 6 9 9 24 20 21 17 43 38.5 28 23 3.6 LQ1E4A-R3 1/2" 3/16" 15 14 35.5 31.5 16.5 2.9 LQ1E4A-R4 1/2" 1/8" 1.8 LQ1E5A-R2 3/4" 3/8" 39.5 20 36 17 54 47.5 49 23 5.8 46 LQ1E5A-R3 3/4" 1/4" 3.6 LQ1E5A-R4 3/4" 3/16" 15 14 51 42 16.5 2.9 LQ1E6A-R2 1" 1/2" 24 21 56.5 52.5 28 9 46 LQ1E6A-R3

Electric Actuator

[kg] 0 0 20 0 25 20 15 10 5 5 10 15 L4 Vertical Work load [kg] Work load [kg] 1,500 2,000 2,000 2,000 1,500 1,500 1,500 1,000 L5 [mm] L5 [mm] L5 [mm] L5 [mm] 1,000 1,000 1,000 500 500 500 500 Mey m 0 0 0 1 2 3 4 5 Work load [kg] 0 0 5 10 15 Work load [kg] 0 0 Work load [kg] 0 25 20 15 10 5 5 10 15 20 L5 Work load [kg] 5 Series LEF Table Accuracy A side B side Traveling parallelism [mm] (

Table of Contents

N.O. 125 VAC 15 15 4 2 10 10 4 2 250 VAC 15 15 3 1.5 10 10 3 1.5 8 VDC 15 15 3 1.5 15 15 5 2.5 15 15 3 1.5 10 10 5 2.5 14 VDC 30 VDC 3 6 6 1.5 5 5 5 2.5 125 VDC 0.5 0.5 0.3 0.3 0.05 0.05 0.05 0.05 250 VDC 0.25 0.25 0.2 0.2 0.03 0.03 0.03 0.03 16-12-6 2 Paddle Style Flow Switch Series IF3 Fluid and Ambient Temperature Range Enclosure Open type Using indoors away from water drop.

Environment

10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

15 17 20 25 118 139 167 202 14 16 19 24 15 17 20 25 Single Shaft Type The dimensions below show pressurization to B port

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) Other dimensions are the same as the single shaft. l 25 30 40 45 N 15 17 20 25 U 89 105 130 156 L 14 16 19 24 Model G 11 13 15 19 H 27 29 38 44 UU 109 127 155 186 K 5 5 5 5 UU 134 158 192 232 Model H 27 29 38 44 G 11 13 15 19 M 20 22 25 30 N 15 17 20 25 L 14 16 19 24 Model H 36 41 50 60 CRA1BY50 CRA1BY63 CRA1BY80 CRA1BY100 CRA1BX50 CRA1BX63 CRA1BX80 CRA1BX100 CRA1BZ50 CRA1BZ63 CRA1BZ80

Mechanically Jointed Rodless Cylinders

MY3A40-16AStroke MY3A25-16AStroke MY3A63-16AStroke MY3A16-16AStroke 1 Seal belt 9 Polyamide Stainless steel NBR NBR MY3A40-16BStroke MY3A25-16BStroke MY3A63-16BStroke MY3A16-16BStroke 10 Dust seal band 1 Gasket bumper Piston seal RMA-40 RMY-40 RMA-25 RMY-25 RMA-63 RMY-63 RMA-16 RMY-16 15 16 2 2 Polyamie 18 MYA40-15-R6658 MYA25-15-R6657 MYA63-15-R6659 MYA16-15-R6656 1 Scraper O-ring NBR 10.5

Rotary Actuator

Single round shaft: ClRA1BT Double shaft (round shaft, with four chamfers): ClRA1BJ Double round shaft: ClRA1BK D D D H H H H UU UU M N 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size D (g6) H Size D (g6) G H M N UU L Size D (g6) H UU 30 8 25 50 15 36 63 17 41 80 20 50 100 25 60 30 8 6 25 10 8 75 7.8 50 15 11 36 20 15 118 14 63 17 13 41 22 17 139 16 80 20 15 50 25 20 167 19 100 25 19 60 30 25 202 24

XL

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

High Vacuum Angle Valve, XL Series

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

Hydraulic

15 20 20 2 pcs. 5 10 15 10 20 15 Auto Switch Mounting Bracket Part Nos.