AR425 to 935

AR45 AR65 AR85 AR95 Description Model VBA Bracket Pressure gauge with limit indicator (1) B24P B25P G46-10-02 (Max. 1.0 MPa), G46-2-02 (Max. 0.2 MPa) VE Note 1) In the gauge part no. (e.g. G46-10-02), indicate kind of the connecting thread. Put nothing for Rc and N for NPT thread. Please consult with SMC for NPT pressure gauge.

Fieldbus System

Note 7) When the SD0 (Without SI unit) is specified, -D, -Dl cannot be selected. 24 24 stations B4 In the case of the 16-output SI unit Symbol 02 Stations Note 2 stations B6 Double wiring Note 1) B5 LM MM Note2) M5 thread Elbow port, mixed sizes Mixed size for different types of piping, option installed 08 02 8 stations 2 stations Specified layout Note 2) (Available up to 16 solenoids) Note

Display Pressure: 7 (0.7MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5)

Type: Stainless Steel / Clean Pressure Gauge, Maximum Indicated Pressure(Mpa): 0.7, Outer Diameter(φ): 42.5, Shape: Back side thread, Maximum Indicated Pressure: 0.7 MPa, Connection screw: R 1/4, Option: None, Size: 42.5, Grade: Parts: precision cleaning; Assembly: clean room M5.5 (class 10,000), Transparent cover material: Polycarbonate (Hard coated), Attachment: Without cover ring assembly

7ND9071en

125 5 12 12 6.5 8 150 6 10 8 11.5 16 9 13.5 8 13.5 13 200 8 9 7 8.5 12 6.5 9.5 7 11.5 250 10 9 7 7.5 13.5 9.5 7 10.5 300 12 8 6 6.5 9.5 7.5 6 9.5 350 14 6 6 5 9.5 5.5.11 HART version Select if device is used as HART 6 or HART 7 device by using the + and keys.

Display Pressure: 0.2MPa, Connection Thread: R 1/4, Grade: Precision Cleaning, Clean Room M5.5, Attachment: Clear Cover Removable, Wrench Tighten

Display Pressure: 0.4MPa, Connection Thread: R 1/4, Grade: Precision Cleaning, Clean Room M5.5, Attachment: Clear Cover Removable, Wrench Tighten

Booster Regulator Series VBA1110 to 4200 1

G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs. G46-10-01 2 pcs.

Table of Contents

7 !8 !

HRX-OM-X084

Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm Buzzer Stop . 7-3 7.3 Trouble shooting . 7-4 7.3.1 Alarm contents, causes, and troubleshooting . 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection, Exchange and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection, exchange, cleaning . 8-2 8.2.1 Daily check

AWM20 to AWM40

AWM20 AWD20 AWM30 AWD30 AWM40 AWD40 Model Option Bracket assembly Note 1) AW20P-270AS AR20P-260S AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 Set nut G36-10-01 G36-2-01 Round type Note 2) Standard 0.02 to 0.2 MPa set Standard 0.02 to 0.2 MPa set Pressure gauge Square embedded type Note 3) GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge

AWM20 to AWM40

AWM20 AWD20 AWM30 AWD30 AWM40 AWD40 Model Option Bracket assembly Note 1) AW20P-270AS AR20P-260S AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 Set nut G36-10-01 G36-2-01 Round type Note 2) Standard 0.02 to 0.2 MPa set Standard 0.02 to 0.2 MPa set Pressure gauge Square embedded type Note 3) GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge

Table of Contents

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

Compact Vacuum Unit

(Refer to the Operation Manual.) 7 Compact Vacuum Unit Series ZB Construction !3 u w q e i !4 !5 r t y !2 !2 o !

Water Regulator

Model Pressure range *1 Indication unit Connection thread Note MPa Port size 01 Rc1/8 02 Rc1/4 R1/8 R1/4 G46-7-02-SRB 0 to 0.7 R1/4 G46-10-02-SRB 0 to 1.0 G46-4-01 to 02-SRB 0 to 0.4 MPa Set pressure range: 0.05 to 0.69 MPa 02 WR110 X215 *1: Do not apply more pressure than the max. pressure displayed. It may cause a malfunction.

5

Bore size A AL B B1 B2 C2 D E F FL FD FT FX FY FZ G H H1 H2 I 20 18 15.5 34 13 26 30 8 20 0 0.033 13 10.5 7 4 60 75 8 41 5 8 28 25 22 19.5 40 17 32 37 10 26 0 0.033 13 10.5 7 4 60 75 8 45 6 8 33.5 32 22 19.5 40 17 32 37 12 26 0 0.033 13 10.5 7 4 60 75 8 45 6 8 37.5 40 24 21 52 22 41 47.3 14 32 0 0.039 16 13.5 7 5 66 36 82 11 50 8 10 46.5 Female Rod End (mm) (mm) Bore size K KA MM NA NN

AR20-B to AR60-B

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly Note 1) AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S Note 2) Round type Note 3) Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure Round type

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

C2 PSE56 0 01 Option Port size 01 02 C01 N01 N02 A2 B2 R 1/8 (with M5 female thread) R 1/4 (with M5 female thread) Rc 1/8 NPT 1/8 (with M5 female thread) NPT 1/4 (with M5 female thread) URJ 1/4 TSJ 1/4 Note Description Part no. Connector for pressure sensor controller ZS-28-C 1 pc. Output specifications Adapter with throttle Rc 1/4 ZS-31-X175 1 pc.

Display Pressure: 10 (1.0MPa), Connection Thread: 02M (R 1/4, M5 Female), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 2 (0.2MPa), Connection Thread: 01M (R 1/8, M5 Female), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C2 (Clear Cover Removable, Wrench Tighten)