Display Pressure: 1.0MPa, Connection Thread: R 1/8, Grade: Precision Cleaning, Clean Room M5.5, Attachment: Clear Cover Removable, Wrench Tighten

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4 @1 w @4 !0 y !3 !5 @3 !0 !

HRX-OM-X084

. 4-1 4.2 Starting and Stopping . 4-2 4.2.1 Operation . 4-2 4.2.2 Operation restart when alarm is generated . 4-3 4.2.3 Stopping the product . 4-5 4.2.4 Cautions for re-start . 4-5 4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List

Low Maintenance Filter Series FN1

FN11V FPM KT-FN11V 7 Low Maintenance Filter Series FN1 Dimensions Rc 1/4 0 315 45 IN OUT B.C.D230 135 225 42 4-11 G46-15-02 Pressure gauge port size Rc 1/4 Note) Use the Pc 1/4 port marked with an asterisk when designing an air release circuit.

Table of Contents

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

AU

With bowl guard (standard) with polycarbonate AR Model IR AU100 AU200 AU300 Model VEX 4 1 8 3 , 8 1 4 1 Port size 950 1,450 1,600 Weight (g) AMR Standard Bowl guard ITV B31P B32P B32P AD32 G46-10-01 AD32 Bracket Accessory Option Float type auto-drain IC Note) Pressure guage with limit indicator Relieving type VBA Metal bowl Option Lubricator with drain cock VE Note) in the gauge part no

AU

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Model IR AU100 AU200 AU300 Model VEX 4 1 8 3 , 8 1 4 1 Port size 950 1,450 1,600 Weight (g) AMR Standard Bowl guard ITV B31P B32P B32P AD32 G46-10-01 AD32 Bracket Accessory Option Float type auto-drain IC Note) Pressure guage with limit indicator Relieving

5

= 2, 3, 4, 5) D-M9V 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9V 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9 D-A9 10 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9WV D-M9AV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9W 15 15 20 + 15 (n 2) (n = 4, 6) Note 4) D-M9A 15 20 20 + 15 (n 2) (n = 4, 6) Note 4) D-A7/A80 D-A7H/A80H D-A73C/A80C 5 10 15 + 10 (n 2) (n = 4, 6) Note 4) Rail mounting

Display Pressure: 4 (0.4MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Display Pressure: 0.4MPa, Connection Thread: R 1/4, Grade: Precision Cleaning, Clean Room M5.5, Attachment: Clear Cover Non Removable, Wrench Tighten

Display Pressure: 0.4MPa, Connection Thread: R 1/4, Grade: Precision Cleaning, Clean Room M5.5, Attachment: Clear Cover w/Protrusion, is Removable

EX500-GPR1A.eng

Socket Connector Pin Layout Plug Connector Pin Layout 1 8 1 7 6 5 4 3 2 8 3 4 5 6 7 Two communication connectors in SI unit and one communication connector in Input unit are installed respectively. To the communication connector ( C2 ) or ( 1 ) of SI unit, connect the branch cable with M12 connector from GW.

Display Pressure: 7 (0.7MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Display Pressure: 10 (1.0MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Display Pressure: 7 (0.7MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5)

Display Pressure: 10 (1.0MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5)

Display Pressure: 2 (0.2MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5)

CATALOG

:E701 01 (1/8) 02 (1/4) 02 (1/4) 02 (1/4) 03 (3/8) 03 (3/8) 04 (1/2) 04 (1/2) Courtesy of Steven Engineering, Inc. !

Table of Contents

O.D. 4 2.5 1 4 1 4 3 8 KFF04-02 KFF06-02 KFF06-03 KFF08U-02 KFF08N-02 KFF10U-02 KFF10N-02 KFF12U-02 KFF12N-02 10 33.5 26.8 15 15 17 1.6 25 27 30 17 17 19 15.5 1.5 33.2 26.5 6 15.2 3 12 6 4 35.2 28.5 5 6 11 17 21 30 35 45 4 5 5.5 6.5 7 8 Connection thread Applicable tubing 14 17 1 4 33.2 26.5 15 16.2 28 8 10 6.5 7.5 1 4 32 17 17 34.8 27.5 15 18.8 12 8 9 35 36 1 4 19 17 35.3 28.5 15 19.3 15

KJ

O.D. 4 2.5 1 4 1 4 3 8 KFF04-02 KFF06-02 KFF06-03 KFF08U-02 KFF08N-02 KFF10U-02 KFF10N-02 KFF12U-02 KFF12N-02 10 33.5 26.8 15 15 17 1.6 25 27 30 17 17 19 15.5 1.5 33.2 26.5 6 15.2 3 12 6 4 35.2 28.5 5 6 11 17 21 30 35 45 4 5 5.5 6.5 7 8 Connection thread Applicable tubing 14 17 1 4 33.2 26.5 15 16.2 28 8 10 6.5 7.5 1 4 32 17 17 34.8 27.5 15 18.8 12 8 9 35 36 1 4 19 17 35.3 28.5 15 19.3 15