Fieldbus System

End Plate EX600-ED2-l EX600-ED3-l Power connector Model specification M12 (5-pin) plug 7/8 inch (5-pin) plug 24 VDC 10%, Class 2, 2 A 24 VDC 10%, 8 A Power supply (for Control/Input) Power supply (for Output) 24 VDC +10/5%, Class 2, 2 A 24 VDC +10/5%, 8 A Enclosure IP67 (Manifold assembly) Standards CE marking, UL (CSA), RoHS recognition Weight 0.4 lbs (170 g) 0.4 lbs (175 g) EX600-ED3-l

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

-4-l01-X3 G46-4-l02-X3 0.4 MPa Pressure gauge G46-2-l01-X3 G46-2-l02-X3 Round type Note 2) 0.2 MPa G46-7-l01-X3 G46-7-l02-X3 0.7 MPa Clean Room Compliant, Copper-free, Fluorine-free (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-l01MS-X3 G49-4-l02MS-X3 0.4 MPa Pressure gauge

Fieldbus System

/Side ported Type 11/Bottom ported Symbol A, B port Type 10/Side ported Type 11/Bottom ported SY3000 SY5000 SY7000 SY5000 SY7000 N1 SY3000 SY5000 SY7000 SY5000 SY7000 C2 1/8" V N3 5/32" V V V N7 1/4" V V V V V N9 5/16" V V V V N11 3/8" V V 2 V C3 3.2 V C4 4 V V V C6 6 V V V V V C8 8 V V V V C10 10 V V C12 12 V V Straight Straight CM* Straight port, mixed sizes V V V V V LN3

Fieldbus System

Note 2) Without SI unit, the symbol is nil. i A, B port size (Metric) A, B port size (Inch) Type 10/ Side ported Type 11/ Bottom ported Type 10/ Side ported Type 11/ Bottom ported Symbol Symbol A, B port A, B port SY3000 SY5000 SY5000 SY3000 P SY5000 SY5000 C2 C3 C4 C6 C8 CM N1 N3 N7 N9 CM P 2 One-touch fitting 1/8" One-touch fitting P P P P 3.2 One-touch fitting 5/32" One-touch fitting Straight

Pressure Gauge Guide

Model (Standard) Model Pressure range (1) VY1 Indication unit Connection thread Note MPa GP46-10-01 to 02 GP46-10-01 to 02L2 GP46-10-01 to 02L5 0 to 1.0 G 1 8 R MPa 1 4 R PPA Note 1) Do not apply pressure more than the maximum display pressure. This will cause a malfunction. Be sure to read the precautions in page 14-11-15 for selection and installation.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% Serial wiring: EX180 Response Time Type of actuation Response time ms (at 0.5 MPa) SJ2000 SJ3000 2 position single 2 position double 3 position 4 position dual 3 port valve 16 or less 10 or less 34 or less 30 or less 16 or less 10 or less 22 or less 30 or less Gateway system Serial transmission system

Precision Clean Regulator

SRP1-M5 SRP1-01 Pressure gauge part no.

HRX-OM-X084

/20. 9-1 9.1.2 HRR010-W-10/20. 9-3 9.1.3 Refrigerant with GWP reference . 9-5 9.1.4 Communication specification . 9-5 9.2 Outline dimensions . 9-6 9.2.1 HRR010-A-10/20. 9-6 9.2.2 HRR010-W-10/20. 9-7 9.3 Flow Chart . 9-8 9.3.1 HRR010-A-10/20. 9-8 9.3.2 HRR010-W-10/20. 9-8 HRR Series HRX-OM-X084 Contents 9.4 Cooling capacity . 9-9 9.4.1 HRR010-A -10. 9-9 9.4.2 HRR010-W-10. 9-9 9.4.3 HRR010-

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L A L D Applicable fitting size d Model 10-KQP-04 16 32 6 4 10-KQP-06 18 35 8 6 10-KQP-08 20.5 39 10 8 10-KQP-10 22 43 12 10 10-KQP-12 24 44.5 14 12 10-KQP-01 16 31.5 5 1/8" 10-KQP-03 16 32 6 5/32" 10-KQP-07 18 35 8.5 1/4" 10-KQP-09 20.5 39 10 5/16" 10-KQP-11 22 43 11.5 3/8" Type 16, Cassette base Type 10, Tie-rod base Series Manifold type SUP block disk EXH block disk 10 SV1000-59-1A SV1000

Table of Contents

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Display Pressure: 10 (1.0MPa), Connection Thread: 01 (R 1/8), Grade: SRA (Precision Cleaning, Clean Room M5.5)

Display Pressure: 1.0MPa, Connection Thread: R 1/8, Grade: Precision Cleaning, Clean Room M5.5, Attachment: -

EtherNet/IP TM Compatible Fieldbus System

Service Class Inst Attr ID Values ID ID Reset 01 h [Identity Object] 1 h 01 (Type1 reset) 37 No.EX-OMS0014-A < Properties tab > Network information including the GW unit MAC address and communication speed are displayed. 38 No.EX-OMS0014-A Specification Specifications Basic Specifications Item Specifications Power supply voltage range Power supply for input and control: 24 VDC 10% Power

Table of Contents

ZS-10-A With lead wire ZS-10-5ANote) When ordering switch with 5 m long lead wire, indicate both part numbers. Lead wire length Caution 0.6 m Nil Ex.) ZSE2-01-15CN1 pc. ZS-10-5 A-501 pc.

Water Regulator

Model Pressure range *1 Indication unit Connection thread Note MPa Port size 01 Rc1/8 02 Rc1/4 R1/8 R1/4 G46-7-02-SRB 0 to 0.7 R1/4 G46-10-02-SRB 0 to 1.0 G46-4-01 to 02-SRB 0 to 0.4 MPa Set pressure range: 0.05 to 0.69 MPa 02 WR110 X215 *1: Do not apply more pressure than the max. pressure displayed. It may cause a malfunction.

Water Regulator

Model Pressure range *1 Indication unit Connection thread Note MPa Port size 01 Rc1/8 02 Rc1/4 R1/8 R1/4 G46-7-02-SRB 0 to 0.7 R1/4 G46-10-02-SRB 0 to 1.0 G46-4-01 to 02-SRB 0 to 0.4 MPa Set pressure range: 0.05 to 0.69 MPa 02 WR110 X215 *1: Do not apply more pressure than the max. pressure displayed. It may cause a malfunction.

AWM20 to AWM40

AWM20 AWD20 AWM30 AWD30 AWM40 AWD40 Model Option Bracket assembly Note 1) AW20P-270AS AR20P-260S AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 Set nut G36-10-01 G36-2-01 Round type Note 2) Standard 0.02 to 0.2 MPa set Standard 0.02 to 0.2 MPa set Pressure gauge Square embedded type Note 3) GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge

AWM20 to AWM40

AWM20 AWD20 AWM30 AWD30 AWM40 AWD40 Model Option Bracket assembly Note 1) AW20P-270AS AR20P-260S AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 Set nut G36-10-01 G36-2-01 Round type Note 2) Standard 0.02 to 0.2 MPa set Standard 0.02 to 0.2 MPa set Pressure gauge Square embedded type Note 3) GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

ZS-27-01 847 Series PSE300 Specifications Model PSE3 PSE533 PSE543 PSE563 PSE531 PSE541 PSE561 PSE532 PSE530 PSE560 PSE564 PSE550 Applicable pressure sensor Set (differential) pressure range Setting/Display resolution Pressure range Note 1) 0.2 to 2 kPa 0.01 kPa 50 to 500 kPa 1 kPa 0.1 to 1 MPa 0.001 MPa 10 to 100 kPa 0.1 kPa For low pressure 0 to 100 kPa 10 to 0 kPa 10 to 101 kPa 0.1 kPa

3 Port Solenoid Valve

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% Response Time Response time ms (at 0.5 MPa) 7 or less Mass Valve model Number of solenoids 1 pc. (Single) 2 pcs.