SMC Pneumatic Clean Series

Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Lead wire length (m) Load voltage Direct mounting Rail mounting Indicator light Wiring (Output) Pre-wire connector Special function Type Electrical entry Applicable load 125 to 200 125 to 160 0.5 (Nil) 3 (L) 5 (Z) None (N) AC DC In-line In-line Perpendicular Perpendicular 3-wire (NPN equivalent) IC circuit A76H Z76 5 V Reed switch Solid state switch Grommet A72 A73 A73C A72H A73H Z73 200

RSH

RSH20, 32 Graphq Graphw 1.0 RSH32 RSH32 RSH32 Bore size 50, 63, 80/ m =0 Bore size 50, 63, 80/ m =0.1 RSH20 RSH20 RSH20 0.9 Operating pressure : P (MPa) 1300 1300 0.8 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 800 800 0.2 50 Weight : W (kg) Weight : W (kg) 700 700 0.1 600 600 100 200 300 400 500 0 63 500 500 Lateral load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0

Series CQ2

/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.

24

speed of 400 mm/s.

NCA1

150 150 2759 200 200 2760 250 200 2760 325 325 2761 400 325 2761 Stroke (In Inches and Hundredths of Inches) Bore 150 200 250 325 400 Note: Quantity is one piece.

Air Cylinder Series CM2

With Rod Boot (mm) l Symbol h Z B3 e f Stroke 1 to 50 1 to 50 1 to 50 51 to 100 51 to 100 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore size 36 18 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 20 36 18 32 72 85 97 110 135

10

, 400, 450, 500, 600 Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 MB1 Up to 1800 CA2 Up to 1500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 125 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800,

Turntable Cylinder Series MGT

Electrical entry Wiring (output) Special functions 0.5 (Nil) 3 (L) 5 (Z) Applicable load Indicator light Type Electrical entry direction DC AC Vertical Horizontal IC circuit Z76 3 wire 5V Grommet Yes Reed switch Z73 24V 12V 100V Relay PLC 2 wire 5V 12V 100V or less IC circuit Z80 No 3 wire (NPN) IC circuit 3 wire (PNP) Y7PV Y7P Y59A Y69A 5V 12V IC circuit Lead wire indicator symbol

Cylinder with Lock

[mm] Bore size Standard stroke Max. stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160

Cylinder with Lock

[mm] Bore size Standard stroke Max. manufacturable stroke Stroke range q Stroke range w 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Up to 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500,

MLGP

CNS CLS CLQ MLGP RLQ MLU Selection Conditions/Table (1) ML1C DVertical Upward facing Downward facing Horizontal -X l1 = Eccentric distance 20l2 = Distance between the plate and load center of gravity m Data Mounting orientation m m l1 = Eccentric distance Maximum load speed V 201 to 400 mm/s 50 to 200 mm/s 50 to 200 mm/s 201 to 400 mm/s 50 to 200 mm/s 201 to 400 mm/s Graph (Slide bearing

Cylinder with Lock

Chart (1) 400 st 500 st 600 st 700 st 400 st 500 st 600 st 700 st 10 5 4 300 st 300 st 3 200 st 200 st Load movement time: t (S) 2.

MLGP

CNS CLS CLQ MLGP RLQ MLU Selection Conditions/Table (1) ML1C DVertical Upward facing Downward facing Horizontal -X l1 = Eccentric distance 20l2 = Distance between the plate and load center of gravity m Data Mounting orientation m m l1 = Eccentric distance Maximum load speed V 201 to 400 mm/s 50 to 200 mm/s 50 to 200 mm/s 201 to 400 mm/s 50 to 200 mm/s 201 to 400 mm/s Graph (Slide bearing

MGZ Series

(same side) Reed switch D-Z73, Z76, Z80 20 1 pc., 2 pcs. (different sides) 60 2 pcs. (same side) D-Y59A (B), Y69A (B) Y7P (V) 20 1 pc., 2 pcs. (different sides) 70 2 pcs. (same side) D-Y7NW (V), Y7PW (V) Solid state switch Y7BW (V) 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Note 2) ( ): Denotes the dimensions of D-Z73. Since this is a guideline including hysteresis, not meant to be guaranteed. (assuming approximately 30% dispersion.) There may be the case it will vary substantially depending on an ambient environment.

CL

CL-40 CL-50 CL-63 CL-80 CL-100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Maximum Stroke For the maximum stroke of the CA1 series 40 to 100, and CS1 series

CL

CL-40 CL-50 CL-63 CL-80 CL-100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Maximum Stroke For the maximum stroke of the CA1 series 40 to 100, and CS1 series

CLS

200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-9-7 8 Cylinder with Lock Double Acting, Single Rod Series CLS 125, 140, 160, 180, 200, 250 How to Order M9B CLS L 125 125 100

Transfer

500 1000 1500 0.1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) 30 40 20 20 5 4 3 10 10 5 4 3 ML2B40 ML2B40 2 5 4 3 Moment (Nm) Moment (Nm) Moment (Nm) 2 ML2B32 ML2B32 1 ML2B40 ML2B40 ML2B40 ML2B40 2