Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Double acting 125, 140 160, 180 200 Double rod CQ2W 7-6-115 10 to 300 Long Stroke 32, 40, 50 63, 80, 100 Single rod CQ2 Double acting 7-6-121 125 to 300 Anti-lateral Load Single rod CQ2S 32, 40, 50 63, 80, 100 Double acting 32 to 40/5 to 100 50 to 100/10 to 100 7-6-132 With End Lock 20, 25, 32 50, 63, 80 100 Single rod CBQ2 Double acting 20 to 63/10 to 100 80, 100/25 to 100 7-6-142 Air-hydro

Plate Cylinder

300 Other intermediate strokes can be manufactured upon receipt of order.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

325 63 51 64 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 80 56 68 30 12.5 25 37.5 50 75 100 125 150 175 200 225 250 103 116 128 141 166 191 216 241 266 291 316 341 100 56 76 32 12.5 25 37.5 50 75 100 125 150 175 200 225 250 103 116 128 141 166 191 216 241 266 291 316 341 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

500 700 Average speed Va mm/s 50 100 200 300 500 700 Average speed Va mm/s Collision speed V mm/s Note) Use average speed to calculate static moment.

Cylinder with Lock Series CLS

MLGP 300 300 ML1C 200 200 [Example] 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5 MPa P 0.5 MPa P 250 4000 3000 3000 200 2000 180 250 2000 160 140 200 1000 125 180 700 800 900 Load mass: m (kg) Load mass: m (kg) 1000 700 800 900 160 600 140 600 500 500 125 400 400 300 300 D200 200 -X Individual -X 100 100 100 500 400

High Vacuum Angle Valve

(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

CJ2X/CUX/CQSX/CQ2X/CM2X

20 25 32 40 Bore size (mm) MK(2) 32 Piston speed (mm/s) 0.5 to 300 40 0.27 0.4 0.65 1.2 Allowable kinetic energy (J) RS Q G Note) Other intermediate strokes can be manufactured upon receipt of order.

Air Slide Table Series MXS

MXS2550 0.025 0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 0.01 0.01 0.005 0 100 200 300 400 0 100 200 300 400 0 50 100 150 200 250 300 Load (N) Load (N) Load (N) D-X Individual -X 57 Series MXS Dimensions: MXS6 Basic style 2 x M2.5 x 0.45 thread depth 3 Operating port 2 x M3 x 0.5 6 J I Max. 10.5 (With stroke adjuster at retraction

MHZ

MPa 0.5 MPa 0.6 MPa 0.5 MPa MHW 150 0.4 MPa 0.4 MPa 10 0.4 MPa 0.3 MPa 0.2 MPa 0.4 MPa 0.3 MPa 0.3 MPa 0.3 MPa MRHQ 100 L 0.2 MPa 0.2 MPa 0.2 MPa 5 Misc. 50 D0 10 20 30 40 50 0 50 100 150 Gripping point L (mm) Gripping point L (mm) 20MHZ2-16D/MHZL2-16D MHZ2-40D 400 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa 50 350 0.6 MPa 0.6 MPa 0.6 MPa 0.6 MPa Gripping force (N) 300

MHZ

MPa 0.5 MPa F 80 6 0.3 MPa 0.3 MPa 0.4 MPa 0.4 MPa 0.3 MPa 0.2 MPa 60 0.2 MPa 0.2 MPa 0.3 MPa 4 40 0.2 MPa 2 20 0 20 40 60 80 100 10 20 30 0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F Gripping point L (mm) Gripping point L (mm) MHZ2-10D/MHZL2-10D MHZ2-32D 300

CJ2X/CUX/CQSX/CQ2X/CM2X

20 25 32 40 Bore size (mm) MK(2) 32 Piston speed (mm/s) 0.5 to 300 40 0.27 0.4 0.65 1.2 Allowable kinetic energy (J) RS Q G Note) Other intermediate strokes can be manufactured upon receipt of order.

CJ2X/CUX/CQSX/CQ2X/CM2X

20 25 32 40 Bore size (mm) MK(2) 32 Piston speed (mm/s) 0.5 to 300 40 0.27 0.4 0.65 1.2 Allowable kinetic energy (J) RS Q G Note) Other intermediate strokes can be manufactured upon receipt of order.

Compact Cylinder

Lateral load Operating pressure: 1 MPa 1000 200 300 500 Stroke Eccentric distance 100 100 Load weight (kg) 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 63 Allowable lateral load (N) 50 40 63 1 32 25 20 50 40 10 32 0.1 25 10 100 200 300 500 1000 Maximum piston

Auto Switch Guide

C76 Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL C85 C95 CP95 Auto Switch Mounting Bracket Part No.

2

150 Nil C D Nil H L S 300 300 75 Auto-drains listed on page 95 are attached.

2–4

Auto Switch Weight Unit: g Model D-M9N D-M9P D-M9B 0.5 8 8 7 Lead wire length (m) w Do not use anything other than the mounting screws attached to the auto switch body to secure the switch.

REA/REB

: Standard Stroke Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) 25 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900,

REA/REB

200, 250, 300, 350, 400, 450, 500 15 750 MK(2) 20 1000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 Made to Order Specifications (For details, refer to page 10-21-1.)

Mechanically Jointed Rodless Cylinders

400 300 200 100 MY3A max.

Sine Rodless Cylinder Series REA/REB

Number of axes 10 150, 200, 300 Symbol Specifications 150, 200, 300, 400, 500 15 750 1 axis XB10 Intermediate stroke (Using exclusive body) 200, 300, 400, 500, 600 20 1000 X168 Helical insert thread specifications 200, 300, 400, 500, 600, 800 25 1200 25 200, 300, 400, 500, 600, 800, 1000 2 axes 1500 32 Note 1) Stroke exceeding the standard stroke will be available upon request for special